IN-SITU ANALYSIS OF ICE USING SURFACE ACOUSTIC WAVE SPECTROSCOPY
    12.
    发明公开
    IN-SITU ANALYSIS OF ICE USING SURFACE ACOUSTIC WAVE SPECTROSCOPY 审中-公开
    现场分析VEN EIS UNTER VERWENDUNG VONOBERFLÄCHENSCHALLWELLENSPEKTROSKOPIE

    公开(公告)号:EP3146292A1

    公开(公告)日:2017-03-29

    申请号:EP14898763.9

    申请日:2014-07-30

    摘要: Systems and methods of in-situ measuring the physical properties of an integrated computational element (ICE) device using surface acoustic wave (SAW) spectroscopy during fabrication are provided. The system includes a measurement device having a pump source providing an excitation pulse generating a SAW on the outer surface of the ICE. The system provides a probe radiation to be interacted with the outer surface of the ICE device and to form an interacted radiation, and an optical transducer configured to receive the interacted radiation and form a signal. An analyzer receives the signal from the optical transducer and determines a property of a material layer on the outer surface of the ICE device, and a second measurement device using at least one of optical monitoring, ellipsometry, and optical spectroscopy, is configured to measure a second property in the ICE device.

    摘要翻译: 提供了在制造期间使用表面声波(SAW)光谱原位测量集成计算元件(ICE)器件的物理性质的系统和方法。 该系统包括具有泵源的测量装置,其在ICE的外表面上提供产生SAW的激励脉冲。 该系统提供探针辐射以与ICE装置的外表面相互作用并形成相互作用的辐射,以及配置成接收相互作用的辐射并形成信号的光学换能器。 分析仪接收来自光学传感器的信号,并且确定ICE装置的外表面上的材料层的性质,并且使用光学监测,椭偏仪和光谱学中的至少一个的第二测量装置被配置为测量 ICE设备中的第二个属性。

    OPTICAL DESIGN TECHNIQUES FOR MULTILAYER THIN FILM DEVICES IN COMPACT OPTICAL SYSTEMS
    14.
    发明公开
    OPTICAL DESIGN TECHNIQUES FOR MULTILAYER THIN FILM DEVICES IN COMPACT OPTICAL SYSTEMS 审中-公开
    光学设计技术的多层薄膜器件紧凑的光学系统

    公开(公告)号:EP2992381A1

    公开(公告)日:2016-03-09

    申请号:EP14870640.1

    申请日:2014-07-28

    IPC分类号: G02B27/00

    摘要: Methods and systems for designing an integrated computational element (ICE) device are provided. The method includes generating a plurality of ICE device models with a design suite, each ICE device model being configured to detect a characteristic of interest of a sample, and including one or more layers. Further determining at least one transmission spectrum for each theoretical ICE device model for at least one distribution of incident light angles and at least one performance criteria for each ICE device model for the at least one of distribution of incident light angles. Also, ranking the ICE device model based on the at least one performance criteria of each ICE device model at the at least one distribution of incident light angles, and selecting for fabrication one or more ICE device models based on favorable angular tolerance. An optical system including an ICE device as described above is also provided.