MICRO-SPECTROMETRY MEASUREMENT METHOD AND SYSTEM

    公开(公告)号:EP3351992A1

    公开(公告)日:2018-07-25

    申请号:EP17305076.6

    申请日:2017-01-24

    Abstract: The invention concerns an optical micro-spectrometry system comprising an optical microscope (10), a spectrometry system (50) and an optical system (14) adapted to direct an excitation light beam on the sample through said at least one microscope objective (11, 12) and to collect a Raman or PL light beam from a sample.
    According to the invention, the optical micro-spectrometry system comprises an imaging system (16, 41) configured for acquiring a first image (71) and a second image (72) of the sample, by reflection or transmission of an illumination beam from a sample surface, the first image (71) having a large field of view and the second image (72) having a small field of view, a processing system (40) configured for determining an area in the first image (71) corresponding to the second image (72), a display system (44) configured for displaying the first image (71), the second image (72), and a third image (73) representing said area in overlay on the first image (71).

    SPECTROSCOPIC MODULE CONTROL METHOD
    4.
    发明公开
    SPECTROSCOPIC MODULE CONTROL METHOD 审中-公开
    光谱模块控制方法

    公开(公告)号:EP3290879A1

    公开(公告)日:2018-03-07

    申请号:EP16786142.6

    申请日:2016-04-26

    Abstract: A method of controlling a spectroscopic module that includes a measurement light source, a variable-wavelength optical filter, a photodiode, and a conversion circuit for converting a drive signal voltage into a gap displacement amount. The spectroscopic module has a reference light source for emitting a reference light beam of a known wavelength. The controlling method involves varying a gap for the incident reference light beam, extracting two maximum points among data output from the photodiode, and updating a first conversion formula provided in the conversion circuit through use of drive signal voltages and gap amounts corresponding to the two points.

    Abstract translation: 一种控制分光模块的方法,所述分光模块包括测量光源,可变波长光学滤波器,光电二极管以及用于将驱动信号电压转换为间隙位移量的转换电路。 分光模块具有用于发射已知波长的参考光束的参考光源。 控制方法包括改变入射参考光束的间隙,从光电二极管输出的数据中提取两个最大点,并且通过使用对应于两个点的驱动信号电压和间隙量来更新在转换电路中提供的第一转换公式 。

    Optical module, and electronic apparatus
    5.
    发明公开
    Optical module, and electronic apparatus 审中-公开
    光模块和电子设备

    公开(公告)号:EP2759818A3

    公开(公告)日:2018-01-10

    申请号:EP14152626.9

    申请日:2014-01-27

    Abstract: An optical module includes a stationary substrate (51), a movable substrate (52), a stationary reflecting film (54) provided to the stationary substrate, a movable reflecting film (55) provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode (571) disposed outside the stationary reflecting film in a filter plan view, a second control electrode (572) disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section (152) adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode.

    Abstract translation: 本发明提供一种光模块,其包括固定基板(51),可动基板(52),设置在固定基板上的固定反射膜(54),设置在可动基板上且与固定反射膜 第一控制电极(571),其以俯视滤波器的方式配置在所述固定反射膜的外侧;第二控制电极(572),其在所述滤波器俯视图中配置在所述可动反射膜的外侧,与所述第一控制电极相对; 控制部分152,用于使第一控制电流流过所述第一控制电极,并且使在所述滤波器平面图中具有与所述第一控制电流相反的方向的第二控制电流流过所述第二控制电极。

    COLOR MEASUREMENT DEVICE AND COLOR MEASUREMENT METHOD

    公开(公告)号:EP3141879A4

    公开(公告)日:2018-01-03

    申请号:EP15786138

    申请日:2015-04-14

    Inventor: NAGAI YOSHIROH

    CPC classification number: G01J3/52 G01J3/027 G01J3/50

    Abstract: In this color measurement device and method, an entire image and a partial image of a color chart are acquired, respectively, during conveyance of the color chart by a conveyance unit and during re-conveyance of the color chart by the conveyance unit, and an amount of positional deviation of the color chart occurring between the conveyance and the re-conveyance is derived based on the acquired entire and partial images. Then, a color of each of a plurality of patches of the color chart is measured by a color measuring unit, while a measurement position of the color measuring unit is corrected according to the derived positional deviation amount.

    SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH
    8.
    发明公开
    SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH 审中-公开
    SYSTEM,VERFAHREN UND VORRICHTUNG ZUR AUSWAHL UND STEUERUNG EINER LICHTQUELLENBANDBREITE

    公开(公告)号:EP2351169A4

    公开(公告)日:2017-08-30

    申请号:EP09822830

    申请日:2009-10-24

    Applicant: CYMER LLC

    Abstract: The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.

    Abstract translation: 带宽选择机构包括安装在色散光学元件的第二面上的第一致动器,第二面与反射面相对,第一致动器具有耦合到第一端块的第一端和耦合到第二端的第二端 所述第一致动器可操作以将相等且相反的力施加到所述第一端块和所述第二端块上,以使所述色散光学元件的所述主体沿所述主体的所述纵向轴线弯曲,并沿垂直于所述反射面的第一方向弯曲 的色散光学元件。 带宽选择机构还包括第二致动器,第二致动器可操作以在垂直于色散光学元件的反射面的第二方向上施加相等且相反的力以沿着主体的纵向轴线弯曲主体。

    SPECTROMETER WITH VARIABLE BEAM POWER AND SHAPE
    10.
    发明公开
    SPECTROMETER WITH VARIABLE BEAM POWER AND SHAPE 审中-公开
    具有可变光束功率和形状的光谱仪

    公开(公告)号:EP3183548A1

    公开(公告)日:2017-06-28

    申请号:EP15744777.2

    申请日:2015-07-09

    CPC classification number: G01J3/0291 G01J3/027 G01J3/42

    Abstract: At least one light source is configured to emit at least one beam into a sample volume of an absorbing medium. In addition, at least one detector is positioned to detect at least a portion of the beam emitted by the at least one light source. Further, at least one beam modification element is positioned between the at least one detector and the at least one light source to selectively change at least one of (i) a power intensity of, or (ii) a shape of the beam emitted by the at least one light source as detected by the at least one detector. A control circuit is coupled to the beam modification element. Related apparatus methods, articles of manufacture, systems, and the like are described.

    Abstract translation: 至少一个光源被配置成将至少一个光束发射到吸收介质的样本体积中。 另外,至少一个检测器被定位成检测由至少一个光源发射的光束的至少一部分。 此外,至少一个光束修改元件位于所述至少一个检测器与所述至少一个光源之间,以选择性地改变(i)所述光束的功率强度或(ii)由所述光源发射的光束的形状中的至少一个。 由至少一个检测器检测到的至少一个光源。 控制电路耦合到波束修改元件。 描述了相关的装置方法,制造的物品,系统等。

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