Multilayered nonon membrane in a mems sensor
    11.
    发明公开
    Multilayered nonon membrane in a mems sensor 审中-公开
    微机电传感器中的非光子膜

    公开(公告)号:EP2557406A1

    公开(公告)日:2013-02-13

    申请号:EP12175091.3

    申请日:2012-07-05

    申请人: NXP B.V.

    发明人: Besling, Willem

    IPC分类号: G01L9/00 G01L19/06

    摘要: Various embodiments relate to a MEMS pressure sensor (100)including: a lower electrode (106); an upper electrode (114) over the lower electrode; an insulating layer between the lower and upper electrodes that forms a cavity (110) between the upper and lower electrodes; and a NONON pressure membrane (116) over the upper electrode.

    摘要翻译: 各种实施例涉及一种MEMS压力传感器(100),包括:下部电极(106); 位于下电极上的上电极(114); 下电极和上电极之间的绝缘层,其在上电极和下电极之间形成空腔(110); 和在上电极上的NONON压力膜(116)。

    Force sensor with compensation
    14.
    发明公开
    Force sensor with compensation 有权
    Kraftsensor mit Kompensation

    公开(公告)号:EP2955497A1

    公开(公告)日:2015-12-16

    申请号:EP14171660.5

    申请日:2014-06-09

    申请人: NXP B.V.

    IPC分类号: G01L1/10 G01L1/26

    摘要: Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.

    摘要翻译: 本公开的方面涉及力传感器。 如可以根据一个或多个实施例来实现的,装置包括具有谐振频率的力响应部件和用力响应部件补偿变化的电路。 力响应部件响应于施加的力,根据易于波动的弹簧常数而移动。 补偿电路基于温度来确定谐振频率下的力响应分量的布朗运动,并且基于所确定的布朗运动和力响应分量的运动来生成输出。 这种输出表示施加到装置的力。

    Integrated circuit including an environmental sensor
    15.
    发明公开
    Integrated circuit including an environmental sensor 审中-公开
    Integrierte Schaltung mit einem Umgebungssensor

    公开(公告)号:EP2706567A1

    公开(公告)日:2014-03-12

    申请号:EP12183896.5

    申请日:2012-09-11

    申请人: NXP B.V.

    摘要: An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate including at least one environmental sensor. The integrated circuit also includes a cap layer located on a major surface of the substrate. The integrated circuit further includes at least one elongate channel for allowing access of said sensor to an environment surrounding the integrated circuit.

    摘要翻译: 一种集成电路及其制作方法。 集成电路包括包括至少一个环境传感器的半导体衬底。 集成电路还包括位于基板的主表面上的盖层。 集成电路还包括至少一个细长通道,用于允许所述传感器接近集成电路周围的环境。

    MEMS capacitive pressure sensor, operating method and manufacturing method
    19.
    发明公开
    MEMS capacitive pressure sensor, operating method and manufacturing method 有权
    MEMS电容式压力传感器,操作方法和制造方法

    公开(公告)号:EP2520918A2

    公开(公告)日:2012-11-07

    申请号:EP12165684.7

    申请日:2012-04-26

    申请人: NXP B.V.

    IPC分类号: G01L9/00 G01L9/12 G01L19/00

    摘要: A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The sensor is provided over an integrated circuit. The capacitances associated with the inner electrode and the outer electrode can be independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.

    摘要翻译: 一种MEMS压力传感器,其中所述电极装置中的至少一个包括内电极和布置在所述内电极周围的外电极。 传感器通过集成电路提供。 与内部电极和外部电极相关的电容可以独立测量并且可以被差分测量。 该布置使得能够实现各种不同的读出方案,并且还能够改善对器件之间的变化的补偿或者随时间的器件特性的变化。