摘要:
Various embodiments relate to a MEMS pressure sensor (100)including: a lower electrode (106); an upper electrode (114) over the lower electrode; an insulating layer between the lower and upper electrodes that forms a cavity (110) between the upper and lower electrodes; and a NONON pressure membrane (116) over the upper electrode.
摘要:
Aspects of the present disclosure are directed to force sensors. As may be implemented in accordance with one or more embodiments, an apparatus includes a force-responsive component having a resonant frequency, and a circuit that compensates for variations with the force-responsive component. The force-responsive component moves in response to an applied force, in accordance with a spring constant that is susceptible to fluctuation. The compensation circuit determines Brownian motion of the force-responsive component at the resonant frequency based on temperature, and generates an output based on the determined Brownian motion and movement of the force-responsive component. Such an output is indicative of force applied to the apparatus.
摘要:
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate including at least one environmental sensor. The integrated circuit also includes a cap layer located on a major surface of the substrate. The integrated circuit further includes at least one elongate channel for allowing access of said sensor to an environment surrounding the integrated circuit.
摘要:
Various embodiments relate to an in-cell battery management device including: an integrated circuit (IC) including a controller, a resistive balancer, a voltage sensor, and a pressure sensor; and an IC package that encloses the IC having a hole over the pressure sensor wherein the hole allows the pressure sensor to measure pressure in a battery cell; wherein the IC package is contact with the battery cell.
摘要:
Various embodiments relate to an in-cell battery management device including: an integrated circuit (IC) including a controller, a resistive balancer, a voltage sensor, and a pressure sensor; and an IC package that encloses the IC having a hole over the pressure sensor wherein the hole allows the pressure sensor to measure pressure in a battery cell; wherein the IC package is contact with the battery cell.
摘要:
A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The sensor is provided over an integrated circuit. The capacitances associated with the inner electrode and the outer electrode can be independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.
摘要:
A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The sensor is provided over an integrated circuit. The capacitances associated with the inner electrode and the outer electrode can be independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time.