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公开(公告)号：EP2440807A1
公开(公告)日：2012-04-18
申请号：EP10728406.9
申请日：2010-06-11
摘要： An active vibration isolation and damping system (11) comprising a payload (12) that has to be isolated or damped, a vibration sensor (14) for detecting a vibration of the payload, an actuator (15) for moving the payload relative to a bearing body (13) supporting the payload, and a controller (16) for providing the actuator with a signal that is representative for the vibration. The system provides a solution for the tilting problem by applying a vibration sensor that has a low stiffness connection to the payload (12) for rotation along an axis (17) perpendicular to the gravitational force (18), and a high stiffness connection to the payload (12) for the vibration detectable with the vibration sensor.
摘要翻译： 包括必须被隔离或阻尼的有效载荷（12），用于检测有效载荷的振动的振动传感器（14），用于相对于有效载荷移动有效载荷的致动器（15）的主动振动隔离和阻尼系统 支承有效载荷的支承体（13），以及为致动器提供代表振动的信号的控制器（16）。 该系统通过应用振动传感器来解决倾斜问题，该振动传感器具有与有效载荷（12）的低刚度连接以便沿着垂直于重力（18）的轴线（17）旋转，并且与振动传感器 用于振动传感器可检测的振动的有效载荷（12）。
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12.发明公开METHOD OF POSITIONING A CARRIER ON A FLAT SURFACE, AND ASSEMBLY OF A CARRIER AND AN POSITIONING MEMBER 审中-公开方法用于定位在一个平面上和支撑和载体顺序的定位元件
公开(公告)号：EP3164721A1
公开(公告)日：2017-05-10
申请号：EP15738771.3
申请日：2015-07-03
发明人： SADEGHIAN MARNANI, Hamed , WINTERS, Jasper , CROWCOMBE, William Edward , VAN DEN DOOL, Teunis Cornelis , KRAMER, Geerten Frans Ijsbrand , DEKKER, Albert
CPC分类号： G01Q70/02 , F16M7/00 , F16M11/043 , F16M11/18 , F16M11/2085 , F16M11/2092 , F16M11/24 , F16M2200/08
摘要： The invention is directed at a method of positioning a carrier on a flat surface using an positioning member, wherein the carrier comprises an upper part and a base which are connected to each other such as to be arranged remote from each other, wherein the positioning member is arranged between the base and the upper part such that the base is located at an opposite side of the positioning member with respect to the upper part of the carrier, the upper part resting on the positioning member prior to placing of the carrier onto the flat surface, wherein the upper part comprises three engagement elements, and wherein the positioning member comprises a support surface for receiving the three engagement elements of the upper part, said support surface including a plurality of sockets forming a kinematic mount for said three engagement elements, wherein the base comprises three landing elements, each landing element being associated with a respective one of the three engagement elements, and the method comprising the steps of: operating the positioning member for moving the carrier relative to the flat surface in a direction parallel thereto such as to position the carrier above a landing position; performing an action of placing the carrier on the flat surface at the landing position, said action of placing comprising: moving the base towards the flat surface until at least one of said landing elements is in contact with the flat surface and an associated engagement element of said engagement elements is released from the kinematic mount; continue said moving of the base relative to the flat surface until all landing elements are in contact with the flat surface; and continue said action of placing the carrier until all engagement elements are released from the kinematic mount.
摘要翻译： 本发明涉及在使用于定位部件worin载体上部和它们连接到海誓山盟碱包括在一个平面上定位载体的方法：诸如待远离海誓山盟布置，worin定位件 检查做了基地位于在定位构件的相对侧相对于所述载体的上部，上部搁在定位构件上之前的载体的载置在基座和上部之间被布置到所述平坦 表面，worin上部包括三个卡合元件，并且worin所述定位部件包括一个支撑面，用于接收上部的三个卡合元件，所述支撑表面包括形成用于所述的运动安装三个卡合元件插座的复数，worin 基部包括三个着陆元素，每个元素与一着陆respectivement相关联的三个卡合元件中的一个，一 第二方法包括以下步骤：操作所述定位部件用于在与其平行的方向上的载体相对于所述平坦表面上移动：如上述着陆位置的载体定位; 执行在着陆位置将载体放置在平坦表面上的作用，所述放置包括动作：向所述平坦表面上移动的底座，直至所述着陆元件中的至少一个与所述平坦表面接触，并且相关联的接合元件上 所述接合元件从所述运动学支承件释放; 所述继续相对于所述平坦表面的基体的移动，直到所有着陆元件与平坦表面接触; 并继续将载体放置，直到所有接合元件从运动学支承件释放的所述动作。
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13.发明公开SYSTEM AND METHOD OF PERFORMING SCANNING PROBE MICROSCOPY ON A SUBSTRATE SURFACE 审中-公开SYSTEM AND METHOD FOR在基板表面上进行扫描探针显微
公开(公告)号：EP3164720A1
公开(公告)日：2017-05-10
申请号：EP15738770.5
申请日：2015-07-03
发明人： SADEGHIAN MARNANI, Hamed , WINTERS, Jasper , CROWCOMBE, William Edward , VAN DEN DOOL, Teunis Cornelis , KRAMER, Geerten Frans Ijsbrand
摘要： The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface.
摘要翻译： 本发明在用扫描型探针显微镜系统上的基板表面上执行扫描探针显微镜的方法定向，该系统包括至少一个探针头，该探针头包括布置在悬臂的探针尖端和用于确定性采矿前端位置检测器 沿z方向的横向探针尖端的图像平面的位置，所述方法包括：相对于所述衬底表面的所述至少一个测试头定位; 移动探头尖端和相对海誓山盟在一个或多个方向的表面平行的基板到像面的基板的扫描与探针尖端表面; 和确定性采矿与尖端位置探测器的探针尖端的扫描用于映射期间的位置上的所述基板表面的纳米结构; worin所述定位的步骤中进行。通过将所述至少一个测试头的静态载体表面。
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14.发明公开
公开(公告)号：EP2867682A1
公开(公告)日：2015-05-06
申请号：EP13734866.0
申请日：2013-06-24
摘要： Scanning probe microscope for mapping a sample surface, comprising a plurality of probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, the device further comprising a plurality of Z-position detectors for determining a position of each probe along a Z-direction when the probe is in contact with the sample surface; wherein the plurality of probes are mounted on a plurality of heads and each of said heads is mounted on a support base, which is arranged for individually moving its associated head relative to the sample; and wherein each support base comprises a plane actuator unit comprising at least one of said motion actuators for moving the head in at least one direction parallel to the sample surface, wherein the plane actuator unit is located at a first mounting position along said support base, said first mounting position being remote from a second mounting position, wherein the head associated with the support base is mounted on the second mounting position on the support base.
摘要翻译： 本发明涉及一种用于将样品表面上的纳米结构映射的扫描探针显微镜装置，包括用于扫描样品表面的多个探针和用于使探针相对于样品运动的一个或多个运动致动器，其中 所述多个探针中的每个探针包括安装在悬臂上的探测头，其布置成使探测尖端与采样表面接触以实现扫描，该装置还包括多个Z位置检测器，用于确定每个探测尖端的位置 当所述探测尖端与所述样品表面接触时，沿着Z方向，其中所述Z方向是横向于所述样品表面的方向，以使得能够映射所述纳米结构; 其中所述多个探针安装在多个头部上，每个头部包括所述多个探针中的一个或多个; 其中每个所述头部安装在与所述头部相关联的支撑基座上，每个支撑基座布置成用于相对于所述样本单独移动其相关联的头部; 并且其中，为了使所述相关联的头部的所述单独运动能够实现，每个支撑基座包括平面致动器单元，所述平面致动器单元包括至少一个所述运动致动器，用于相对于所述样品在至少一个方向上平行移动与所述支撑基座相关联的头部 其中所述平面致动器单元沿着所述支撑基座位于第一安装位置，所述第一安装位置远离第二安装位置，其中与所述支撑基座相关联的头部安装在所述支撑件上的第二安装位置上 基础。
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公开(公告)号：EP3356763A1
公开(公告)日：2018-08-08
申请号：EP16782099.2
申请日：2016-10-03
CPC分类号： G01B11/0675 , G01B9/02065 , G01B9/02081 , G01B9/02083
摘要： The thickness of an at least partially transparent layer is measured using wavelength band limited light, with a coherence length that is less than twice the thickness of the layer. Reflections from layer are fed to a 2-n coupler (n>2) via optical transmission paths of different optical length. The 2-n coupler mix light from the path into n combinations of light from the paths, each combination with a different mutual phase offset between the light from the two paths. This leads to coherent interference between reflections from the front and back of the layer when the difference between the optical lengths of the optical transmission paths compensates for the path between reflection from the front and the back. A processing circuit computes information indicative of a phase difference between the reflections from n intensities of the 2-n coupler. The use of n>2 signals makes it possible to eliminate the influence of reflection amplitude variations on the computed phase difference.
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公开(公告)号：EP2867683A1
公开(公告)日：2015-05-06
申请号：EP13737686.9
申请日：2013-06-27
发明人： VAN DEN BRABER, Rens , VAN DEN DOOL, Teunis Cornelis , SADEGHIAN MARNANI, Hamed , RIJNVELD, Niek
摘要： An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate.
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公开(公告)号：EP2291124A1
公开(公告)日：2011-03-09
申请号：EP09755089.1
申请日：2009-05-29
申请人： Nederlandse Organisatie voor Toegepast -Natuurwetenschappelijk Onderzoek TNO , Vleugels Holding B.V.
发明人： VAN DEN DOOL, Teunis Cornelis , KRAMER, Geerten Frans Ijsbrand , TABAK, Erik , ODERWALD, Michiel Peter
IPC分类号： A61B17/00
CPC分类号： A61B17/29 , A61B2017/2939 , A61B2017/294 , A61B2090/065
摘要： The invention relates to an instrument, preferably for minimally invasive surgery, comprising a frame (27) having a proximal end and a distal end, a first working element (4) having a first origin located at the distal end and a second working element (5) having a second origin and being arranged at the distal end cooperating with the first working element, a force sensor for measuring a force exerted on at least one of the said the first and the second working elements, wherein the distal end of the frame comprises an opening (23) between the first origin and the second origin, the force sensor being arranged on the frame in a vicinity of the opening.
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