OPEN FRAME, PARALLEL, TWO AXIS FLEXURE STAGE WITH YAW COMPENSATION

    公开(公告)号:EP3251789B1

    公开(公告)日:2018-12-12

    申请号:EP17170839.9

    申请日:2017-05-12

    申请人: AEROTECH, INC.

    发明人: Mosier, Evan

    摘要: Disclosed is a stage system comprising at least one flexure frame having a fixed center and movable distal ends configured to displace a tabletop operatively connected thereto along at least one axis of movement and at least two actuators comprising a first actuator and a second actuator positioned within the at least one flexure frame. The first actuator is positioned within the at least one flexure frame at a first angle of deflection from at least one beam of the at least one flexure frame and the second actuator is positioned within the at least one flexure frame at a second angle of deflection from the at least one beam. The at least two actuators are configured to produce a compensating displacement to offset yaw error as the at least two actuators expand from a contracted first position to an expanded second position.