摘要:
Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber 12 a piezoelectric active portion 320 as a substantial drive portion of the piezoelectric element 300 and a piezoelectric non-active portions 330 having the piezoelectric layer continuous from the piezoelectric active portion but not being substantially driven, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof, electrode wiring 90 drawn out of the upper electrode 80 is provided on one end portion in the longitudinal direction of the pressure generating chamber 12. And there is provided a protection layer 100 on the other end portion in the longitudinal direction of the pressure generating chamber 12 for protecting the vibration plate being provided in a region facing an end portion of the pressure generating chamber 12 and in region facing an end portion of the piezoelectric layer 70 within the region facing the pressure generating chamber. Rigidity of the vibration plate is thereby increased.
摘要:
Disclosed are an ink-jet recording head in which rigidity of a compartment wall is improved and pressure generating chambers are arranged in a high density, a manufacturing method and an ink-jet recording apparatus thereof. An ink-jet recording head comprises: a passage-forming substrate 10 comprising at least silicon layer that consists of single crystal silicon and pressure generating chambers 12 defined thereon, which communicate with a nozzle orifice 21; and a piezoelectric element 300 for generating a pressure change in the pressure generating chamber 12, the piezoelectric element 300 being provided in a region opposite the pressure generating chamber 12 via a vibration plate, which constitutes a portion of the pressure generating chamber 12. The ink-jet recording head further comprises a joining plate 20 joined to the passage-forming substrate 10 on the surface where the piezoelectric element 300 is formed, and the nozzle orifice 21 is provided on the joining plate 20.
摘要:
An ink jet print head includes a plural number of piezoelectric vibrators (300) each consisting of a lower electrode film (60), a piezoelectric film (70) and an upper electrode film (80). The piezoelectric film and the upper electrode film of each piezoelectric vibrator are formed within the region facing each pressure generating chamber (12). The lower electrode films interconnect portions of the regions facing the pressure generating chambers and are electrically continuous to a wiring pattern connected to an external circuit; and in each of the portions of the regions facing the pressure generating chambers, each portion not having the piezoelectric vibrator is removed except a part thereof. Such a structure secures a satisfactory function of the lower electrode layer as a common electrode, increases a quantity of displacement of the piezoelectric vibrator while keeping a low compliance, increases an ink discharging speed, and reduces a drive voltage.
摘要:
An ink jet type recording head is capable of preventing the occurrence of cracks in a portion close to the circumferential wall of the pressure generating chamber of the piezoelectric active section so as to enhance the durability of the recording head. The ink jet type recording head includes a piezoelectric vibrator having a vibrating plate composing a portion of a pressure generating chamber communicated with a nozzle opening, the upper surface of the vibrating plate functioning as a lower electrode, the piezoelectric vibrator also having a piezoelectric active section composed of a piezoelectric layer formed on the surface of the vibrating plate and also composed of an upper electrode formed on the surface of the piezoelectric layer, the piezoelectric active section being formed in a region opposed to the pressure generating chamber, wherein the vibration regulating section is composed of a wide width section in which the piezoelectric layer is wider than the primary portion of the piezoelectric active section, and the wide width section is extended to a side wall and arranged on one end side of the pressure generating chamber in the longitudinal direction.
摘要:
An ink jet recording head is provided with a piezoelectric vibrator. The piezoelectric vibrator consists of a diaphragm and a piezoelectric active part. The diaphragm includes a pressure generating chamber communicating with a nozzle aperture, at least the upper surface of which acts as a lower electrode. The piezoelectric active part consists of a piezoelectric film formed on the surface of the diaphragm and an upper electrode formed on the surface of the piezoelectric film, formed in an area opposite to the pressure generating chamber. A cap member is bonded on one side of the piezoelectric film for sealing a space with a holder to the extent that the motion is secured. The piezoelectric active part is cut off from the outside of the head by sealing dry fluid in the space of the cap member.
摘要:
A liquid ejecting head (16) comprising: a nozzle group including a plurality of nozzles (27) provided in a row in a first direction; a plurality of pressure chambers (31) corresponding to the plurality of nozzles; a plurality of pressure generators (35) that are provided so as to correspond to the pressure chambers (31); a empty liquid chamber portion (33) that allow common communication with the plurality of pressure chambers (31); a communication path (34) that allow communication between the empty liquid chamber portion (33) and the pressure chambers (31); and a empty liquid chamber forming portion (46) that communicate with the empty liquid chamber portion (33); wherein the communication path (34) includes a depression that opens to first surface of a communication member including the communication path (34) and a empty liquid chamber portion (33) and that does not open to second surface(43), which is opposite from the first surface, of the communication member; and wherein a surface (51) of a case member (26) is bonded with the second surface(43) of the communication member.