摘要:
A method of forming silica film of low dielectric constant on a semiconductor substrate comprises (a) applying a silica solution of low dielectric constant for film deposition on a semiconductor substrate; (b) heat-treating the resulting film at 50 to 350 degrees C; and (c) baking the film at 350 to 450 degrees C in an inactive gas atmosphere containing 500 to 15,000 ppm of oxygen by volume. Preferably, the heat-treating (b) is carried out at 150 to 350 degrees C for 1 to 3 minutes in the air. Preferably, the baking (c) is carried out with the semiconductor substrate held on a hot plate maintained at 350 to 450 degrees C. According to such a method, a semiconductor substrate provided with silica film of low dielectric constant has a dielectric constant of less than 3, low moisture adsorption, and high film strength, while being free of damage to the metalized wiring on the semiconductor substrate.
摘要:
A photoelectric cell comprising a substrate having an electrode layer (21) on the surface thereof and a semiconductor film (22) to which a photosensitizing material is adsorbed and which is formed on the electrode layer surface, and another substrate having on the surface thereof an electrode layer (23), the both substrates being disposed with an electrolyte layer (24) therebetween, at least one substrate and one electrode layer having a transparency, wherein the cell is provided with any one of the following features 1 to 4, and has excellent characteristics, such as a quick electron mobility, an excellent extended stability of an electrolyte layer, and a high photoelectric conversion efficiency. 1. The electrolyte layer consists of an electrolyte and a liquid crystal. 2. Spacer particles (27) are interposed between the semiconductor film (22) and the electrode layer (21). 3. The spacer particles are buried in the semiconductor film, with part of them exposed from the semiconductor film and in contact with the electrode layer (23). 4. The semiconductor film contains metal oxide semiconductor particles having a specific core-shell structure.
摘要:
A method of manufacturing an integrated circuit capable of accumulating conductive fine particles efficiently and densely in micro wiring grooves and connection holes, forming a circuit with less wiring resistance and high density, and allowing high integration to be formed so as to provide excellent profitability, comprising the step of applying an integrated circuit formation coating liquid containing conductive fine particles on a substrate having wiring grooves formed therein, characterized in that the integrated circuit formation coating liquid is applied to the wiring grooves while ultrasonic wave is radiated on the coating liquid.
摘要:
A coating fluid capable of forming a silica-based coating film having a relative permittivity as low as 3 or below and a low density and excellent in resistance to oxygen plasma and suitability for other processings; and a substrate having a coating film having such properties. The coating fluid is characterized by comprising a polymer composition comprising (i) a polysiloxane which is a product of the reaction of fine silica particles with a hydrolyzate of at least one alkoxysilane represented by following general formula (I) and (ii) a readily decomposable resin; XnSi(OR)4-n (wherein X represents hydrogen, flourine, C1-8 alkyl, flouroalkyl, aryl, or vinyl; R represents hydrogen, C1-8 alkyl, aryl, or vinyl; and n is an integer of 0 to 3).
摘要:
A coating liquid for forming on a substrate surface a hard coat film which exhibits a high refractive index, being excellent in resistance to hot water, weather resistance, scuffing resistance, attrition resistance and dye affinity, and which does not exhibit photochromism, is provided. A coating liquid for forming a hard coat film, comprises a matrix-forming component and composite metal oxide particles of 1 to 100 nm average particle size, composed either of an iron oxide component and a titanium oxide component used at a specified ratio or an iron oxide component, a titanium oxide component and a silica component used at a specified ratio. A substrate coated with a hard coat film is formed by applying the above coating liquid to the substrate surface and effecting drying.
摘要:
A coating fluid for low-permittivity silica coating which can form an insulating film having a low relative permittivity of 3 or less and is excellent in the adhesion to a surface to be coated, mechanical strengths, chemical resistances such as alkali resistance, and a cracking resistance, and can remarkably level irregularities of the surface to be coated; and a substrate having a low-permittivity silica coating formed thereon. The coating fluid contains fine particles of silica, an alkoxysilane represented by the following general formula and/or a silane halide represented by the following general formula and/or a silane halide represented by the following general formula or a product of a reaction with a hydrolyzate thereof: XnSi(OR)4-n or XnSiX'4-n (wherein X represents H, F, 1-8 C alkyl, aryl, or vinyl; R represents H, 1-8 C alkyl, aryl, or vinyl; X' represents a halogen atom; and n is an integer of 0 to 3).
摘要:
A writing pad having a construction wherein two substrates each having electrodes formed on one of the surfaces thereof are disposed in parallel in such a way that their electrodes face one another with a predetermined gap between them. The gap is defined by insulating dot spacers fixed at regular intervals to at least one of the electrode surfaces. The height G of the dot spacers is smaller than 15 mu m, the mean center distance L between the adjacent dot spacers is smaller than 100 mu m, d > G and 3d
摘要:
A heavy oil hydrogenating method which comprises (a) a step of introducing heavy oil into a fixed bed type reaction column packed with a hydrogenation catalyst and conducting heavy oil hydrogenation, and (b) a step of introducing the heavy oil hydrogenated in the step (a) into a suspension type reaction column packed with a hydrogenation catalyst and conducting the hydrogenation. A hydrogenation apparatus which comprises (a') a fixed bed type reaction column packed with a heavy-oil hydrogenation catalyst and (b') a suspension type reaction column packed with a heavy-oil hydrogenation catalyst for hydrogenating the heavy oil hydrogenated in the fixed bed type reaction column. The present invention can prolong the operation time of the heavy oil hydrogenation.