INSPECTION APPARATUS, INSPECTION SYSTEM AND INSPECTION METHOD

    公开(公告)号:EP3364175A1

    公开(公告)日:2018-08-22

    申请号:EP18154343.0

    申请日:2018-01-31

    IPC分类号: G01N23/20008

    摘要: An inspection apparatus 20 is for an inspection of a target region 13 including a part of a subsurface portion 12 of a sample 10 having an approximately circular cross section. The inspection apparatus 20 includes an X-ray source 40 that emits X-rays, a crystal plate 70 being a single crystal, and a detector 80. The crystal plate 70 is disposed to reflect and diffract X-rays (refractive X-rays X5) having been emitted by the X-ray source 40 and refracted in the target region 13. The crystal plate 70 is disposed to allow X-rays (rectilinear X-rays X3) having been emitted by the X-ray source 40 and entering the crystal plate 70 without having been incident on the sample 10 to transmit through the crystal plate 70. The detector 80 detects an intensity of the X-rays (reflected and diffracted X-rays X7) reflected and diffracted by the crystal plate 70.

    BEAM GENERATION UNIT AND SMALL-ANGLE X-RAY SCATTERING DEVICE
    13.
    发明公开
    BEAM GENERATION UNIT AND SMALL-ANGLE X-RAY SCATTERING DEVICE 审中-公开
    克莱恩威廉·赫尔辛基

    公开(公告)号:EP3124961A1

    公开(公告)日:2017-02-01

    申请号:EP15767729.5

    申请日:2015-02-02

    IPC分类号: G01N23/201 G21K1/06

    摘要: A micro beam generation unit capable of simultaneously capturing anisotropic images in a high signal-to-background ratio with a compact configuration and an X-ray small-angle scattering apparatus are provided. A micro beam generation unit 110 generates X-rays having a micro spot size, with which a sample is irradiated, in order to detect diffracted X-rays by a one-dimensional detector or a two-dimensional detector. The micro beam generation unit 110 includes a slit 115 that is provided on an X-ray optical path and reshapes X-rays into parallel beams, and two channel-cut monochromator crystals 117 and 118 that are arranged in arrangement of (+, -, -, +) and remove parasitic scattering of parallel beams reshaped by the slit. Accordingly, it is possible to simultaneously obtain anisotropic images in a high signal-to-background ratio with a compact configuration.

    摘要翻译: 提供了能够以紧凑型配置和X射线小角度散射装置同时捕获高信号到背景比的各向异性图像的微光束产生单元。 为了通过一维检测器或二维检测器检测衍射X射线,微光束产生单元110产生具有照射样本的微点尺寸的X射线。 微光束产生单元110包括设置在X射线光路上并将X射线成为平行光束的狭缝115,以及排列成(+, - , - )的两个通道切割单色仪晶体117和118, - ,+),并消除由狭缝重新形成的平行光束的寄生散射。 因此,可以以紧凑的结构同时获得高信号到背景比的各向异性图像。

    X-ray diffraction apparatus and method
    14.
    发明公开
    X-ray diffraction apparatus and method 审中-公开
    Röntgenstrahldiffraktionsvorrichtung和程序

    公开(公告)号:EP2778666A3

    公开(公告)日:2014-12-03

    申请号:EP14160214.4

    申请日:2014-03-17

    发明人: Brass, E. Michael

    IPC分类号: G01N23/207

    摘要: An x-ray diffraction apparatus is provided having an x-ray diffraction head, a frame for supporting the x-ray diffraction head, and a pair of drive mechanisms of the frame configured to generate pivotal movement of the x-ray diffraction head about first and second orthogonal axes. The frame is configured such that operation of one of the drive mechanisms to rotate the x-ray diffraction head about the first axis generates rotation of both of the drive mechanisms about the first axis.

    PROCÉDÉ DE MESURE DE DIFFRACTION DES RAYONS X, SES APPLICATIONS ET DISPOSITIF DE MISE EN OEUVRE
    16.
    发明公开
    PROCÉDÉ DE MESURE DE DIFFRACTION DES RAYONS X, SES APPLICATIONS ET DISPOSITIF DE MISE EN OEUVRE 有权
    安德鲁·维也纳执行秘书长VERFAHREN ZUR MESSUNG DER STREUUNG VONRÖNTGENSTRAHLEN,ANWENDUNGSVERFAHREN UND IMPLEMENTIERUNGSVORRICHTUNG

    公开(公告)号:EP2694953A1

    公开(公告)日:2014-02-12

    申请号:EP12717425.8

    申请日:2012-04-02

    IPC分类号: G01N23/20 G01N23/207

    摘要: Method of measuring scattering of X-rays, characterized in that a compound to be analyzed is installed in a receptacle (1) comprising a flat bottom permeable to X-rays, in that an analysis by scattering of the X-rays is carried out by sending a stream of X-rays upwards in the direction of said bottom permeable to the X-rays and by measuring the stream of scattered X-rays that is reflected downwards, and in that a thermostatically controlled fluid at the same temperature as that of the compound to be analyzed in the receptacle is projected towards the flat bottom (3) permeable to X-rays, from outside the receptacle (1), and device for measuring scattering of X-rays characterized in that it comprises a receptacle (1) comprising a bottom shut off by a membrane (3) transparent to X-rays, as well as a diffractometer whose goniometer (4, 5) is installed so as to direct a beam of X-rays from below towards the membrane (3) transparent to X-rays and the detector (5) being installed for the measurement of the X-rays scattered therebelow.

    摘要翻译: 本发明涉及一种用于测量X射线散射的方法和装置,其中待分析的化合物被安装在包括X射线透过的平底的容器中,其中X射线衍射分析是通过发送 X射线向上朝向所述X射线透射底部并通过测量向下反射的散射X射线流,并且其中恒定地控制到与在容器中分析的化合物相同的温度的流体被投射向 X射线透过的平底,从容器外面。

    VERFAHREN ZUR STEUERUNG DER BEHANDLUNG EINES KRISTALLS MIT EINER FLÜSSIGKEIT
    17.
    发明授权
    VERFAHREN ZUR STEUERUNG DER BEHANDLUNG EINES KRISTALLS MIT EINER FLÜSSIGKEIT 有权
    一种用于控制晶体的治疗液体

    公开(公告)号:EP1668356B1

    公开(公告)日:2009-06-17

    申请号:EP04765420.7

    申请日:2004-09-20

    摘要: The invention relates to a method for controlling the treatment of a crystal (2) by means of a liquid, wherein an image signal is captured by an image capturing system (200), said image signal representing a momentary image of a crystal having drops poured thereon by an electrically controllable microdosing system (11, 300), said image signal having a liquid environment whereby the image signal is treated and the momentary surface of the crystal and the liquid environment thereof is determined in the entire image by the image signal; the momentary surface is compared to a predefined desired value and a corrector drop control signal is determined and sent to the microdosing system if the surface is different from the desired value and the corrector drop signal is formed in such a manner that it represents a corrected frequency and/or variable and/or form of the drops which are to be applied to the crystal and the liquid environment thereof, which are selected such that the difference with respect to the desired value is minimised.

    VERFAHREN ZUR STEUERUNG DER BEHANDLUNG EINES KRISTALLS MIT EINER FLÜSSIGKEIT
    18.
    发明公开
    VERFAHREN ZUR STEUERUNG DER BEHANDLUNG EINES KRISTALLS MIT EINER FLÜSSIGKEIT 有权
    一种用于控制晶体的治疗液体

    公开(公告)号:EP1668356A1

    公开(公告)日:2006-06-14

    申请号:EP04765420.7

    申请日:2004-09-20

    摘要: The invention relates to a method for controlling the treatment of a crystal (2) by means of a liquid, wherein an image signal is captured by an image capturing system (200), said image signal representing a momentary image of a crystal having drops poured thereon by an electrically controllable microdosing system (11, 300), said image signal having a liquid environment whereby the image signal is treated and the momentary surface of the crystal and the liquid environment thereof is determined in the entire image by the image signal; the momentary surface is compared to a predefined desired value and a corrector drop control signal is determined and sent to the microdosing system if the surface is different from the desired value and the corrector drop signal is formed in such a manner that it represents a corrected frequency and/or variable and/or form of the drops which are to be applied to the crystal and the liquid environment thereof, which are selected such that the difference with respect to the desired value is minimised.

    Verfahren zur vertikalen Justierung von Lochblenden im Strahlengang eines Röntgen-Diffraktometers
    20.
    发明公开
    Verfahren zur vertikalen Justierung von Lochblenden im Strahlengang eines Röntgen-Diffraktometers 失效
    Verfahren zur vertikalen Justierung von Lochblenden im Strahlengang einesRöntgen-Diffraktometers。

    公开(公告)号:EP0289742A2

    公开(公告)日:1988-11-09

    申请号:EP88103810.3

    申请日:1988-03-10

    发明人: Harm, Bruno, Dr.

    IPC分类号: G01N23/207

    摘要: Vor dem mit dem äußeren Goniometerkreis (4) präzise verstell­baren Detektor (5) wird eine Diagonalschlitzblende (10) ange­ordnet und durch horizontales Verstellen des äußeren Gonio­meterkreises das Maximum des Detektorausgangssignals aufge­sucht. Aus der Winkelabweichung läßt sich trigonometrisch die Höhenabweichung des Strahles zur Sollhöhe (h) bestimmen und die Lochblende (9) entsprechend verstellen.
    Die Erfindung wird angewandt zur Einstellung der Lochblenden bei Diffraktometern.

    摘要翻译: 在检测器(5)的前面布置有斜槽隔膜(10),其可以用外测角器圆(4)精确调节,并且通过水平调节外测角器圈来定位检测器输出信号的最大值。 光线高度与指定高度(h)的偏差可以从角度偏差中进行三角测量,可以相应调整光圈(9)。 本发明用于调节衍射仪中的孔径。