公开(公告)号：EP1225493A2

公开(公告)日：2002-07-24

申请号：EP02076319.9

申请日：1996-04-10

申请人： CANON KABUSHIKI KAISHA

发明人： Sekiguchi, Hiroyuki, c/o Canon Kabushiki Kaisha

IPC分类号： G05B19/23 ,  G03F7/20 ,  G01B11/00

CPC分类号： G03F7/70716 ,  G01B11/002 ,  G03F7/70725 ,  G05B19/00 ,  G05B19/231 ,  G05B2219/37275 ,  G05B2219/41172 ,  G05B2219/41181 ,  G05B2219/41202 ,  G05B2219/41212

摘要： In an alignment apparatus for moving an X-Y stage (1) to a target position by a motor (2), a laser interferometer (6) measures the position of the X-Y stage (1), and supplies position information P(x, y) to a subtracter (5) and a gain setter (8). The gain setter (8) sets a transfer function Gxy(s) of a compensator (4) on the basis of the position information P(x, y), and the compensator (4) amplifies a deviation S with the set transfer function Gxy(s) to control a driver (3).

公开(公告)号：EP0847547A2

公开(公告)日：1998-06-17

申请号：EP97917371.0

申请日：1997-04-30

申请人： PHILIPS ELECTRONICS N.V. ,  PHILIPS NORDEN AB

发明人： SCHOLTEN, Lutz ,  TRACHT, Rudolf

IPC分类号： F02D45 ,  F02D11 ,  F02D35 ,  F02D41 ,  G05B11 ,  G05B13 ,  H02P23

CPC分类号： F02D35/0007 ,  F02D11/10 ,  F02D41/1408 ,  F02D2011/102 ,  F02D2041/1409 ,  F02D2041/141 ,  F02D2041/1416 ,  F02D2041/1418 ,  F02D2041/1419 ,  F02D2041/1433 ,  G05B2219/41181 ,  G05B2219/41213 ,  G05B2219/41214 ,  G05B2219/41224 ,  G05B2219/41225 ,  G05B2219/41395 ,  G05B2219/42021 ,  G05B2219/42093 ,  G05B2219/42237 ,  G05B2219/43048 ,  G05B2219/45006 ,  H02P23/16

摘要： A control unit (75) for controlling a first state variable of a system, for example an angle of rotation ζ of a throttle valve (7) in a throttle device for use in an internal-combustion engine, the system being influenced by a disturbance variable during operation, for example an oscillating loading torque caused by air-flow fluctuations in the throttle device. The control unit (75) comprises a disturbance observer (125) for calculating a value of the disturbance variable on the basis of a mathematical model of the system, and a disturbance predictor (128) for predicting a value of the disturbance variable for a second point in time which follows a first point in time at which said value in calculated by the disturbance observer (125) by a predetermined time interval. In this manner, a phase shift between the disturbance variable actually influencing the system and a compensation for the disturbance variable realized by the system is prevented at high frequencies of the disturbance variable. In a particular embodiment, the disturbance predictor (128) comprises an artificial neural network (207) having a learning phase and a test phase. In a further embodiment, the disturbance predictor (128) supplies a signal corresponding to the value of the disturbance variable calculated by the disturbance observer (125) when the neural network (207) is in the learning phase, and a signal corresponding to the value of the disturbance variable predicted for the second point in time when the neural network (207) is in the test phase.

公开(公告)号：EP0811115A1

公开(公告)日：1997-12-10

申请号：EP96923017.0

申请日：1996-07-26

申请人： PHILIPS ELECTRONICS N.V. ,  PHILIPS NORDEN AB ,  Philips Patentverwaltung GmbH

发明人： SCHOLTEN, Lutz

IPC分类号： F02D11 ,  F02D35 ,  F02D41 ,  G05D3 ,  H02P23

CPC分类号： F02D35/0007 ,  F02D11/10 ,  F02D41/1408 ,  F02D2011/102 ,  F02D2041/1409 ,  F02D2041/141 ,  F02D2041/1416 ,  F02D2041/1418 ,  F02D2041/1419 ,  F02D2041/1433 ,  G05B2219/41181 ,  G05B2219/41213 ,  G05B2219/41214 ,  G05B2219/41224 ,  G05B2219/41225 ,  G05B2219/41395 ,  G05B2219/42021 ,  G05B2219/42093 ,  G05B2219/42237 ,  G05B2219/43048 ,  G05B2219/45006 ,  H02P23/16

摘要： An electrical actuator (11) comprises energizing means (29) for exerting an electromagnetic torque (TEM) on a rotor body (19) and a control unit (75) for controlling the angle of rotation (ζ). The control unit (75) has a cascade control structure with a first control member (81) for converting an electrical input signal (uζ) corresponding to a required angle of rotation (ζ) into an electrical intermediate signal (uEM) corresponding to a required electromagnetic torque (TEM) to be exerted on the rotor body (19), and with a second control member (83) for converting the intermediate signal (uEM) into an output signal (uI) corresponding to a required electrical current through the energizing means (29). The first and second control members (81, 83) allow for specific intermediate calculations of the required electromagnetic torque (TEM) and the required current, whereby the response time and accuracy of the control unit (75) are improved. The electrical actuator (11) is used in a throttle device for use in an air inlet of an internal-combustion engine. The throttle device comprises a throttle valve (7) which is pivotable by means of the actuator (11) in an air passage (3), the input signal (uζ) of the control unit (75) of the actuator (11) being supplied by a motor-management system of the engine.

公开(公告)号：EP0559397A2

公开(公告)日：1993-09-08

申请号：EP93301484.7

申请日：1993-02-26

申请人： CANON KABUSHIKI KAISHA

发明人： Sato, Mikio, c/o Canon Kabushiki Kaisha ,  Asada, Katsumi, c/o Canon Kabushiki Kaisha ,  Wakui, Shinji, c/o Canon Kabushiki Kaisha

IPC分类号： G05B19/19

CPC分类号： G03F7/709 ,  G05B5/01 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37313 ,  G05B2219/41117 ,  G05B2219/41179 ,  G05B2219/41181 ,  G05B2219/41195 ,  G05B2219/41346 ,  G05B2219/41367 ,  G05B2219/41457 ,  G05B2219/42104 ,  G05B2219/45026 ,  G05B2219/49258 ,  G05B2219/49271 ,  G05B2219/50046

摘要： This invention relates to a precision positioning apparatus, and particularly to a precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper, and has as its object the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidity which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus of the present invention is provided with a base body, a movable member positioned on the base plate, driving means for driving the movable member, detecting means for detecting the moved state of the movable member, and means for supplying the driving means with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting means, and the supplying means is provided with means for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving means and the output from the detecting means. The signal supplied to the driving means can be corrected by the correction signal.

摘要翻译： 精密定位装置技术领域本发明涉及一种精密定位装置，特别涉及适用于步进机等半导体曝光装置的定位控制系统的精密定位装置，其目的在于提供一种非接触型精密定位装置，其能够 根据作为非接触引导机构的特征的低刚性，适当地矫正姿势或振动的扰动，并且高速实现稳定，高精度的定位。 本发明的精密定位装置设置有基体，位于基板上的可动构件，用于驱动可动构件的驱动装置，用于检测可动构件的移动状态的检测单元，以及供给驱动 根据参考值和来自检测装置的输出值的关于可移动部件移动的信号的装置，并且提供装置设置有用于形成校正信号的装置，用于基本上否定对可动件的干扰力 通过使用提供给驱动装置的信号和来自检测装置的输出。 可以通过校正信号来校正提供给驱动装置的信号。