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公开(公告)号:EP0737844B1
公开(公告)日:2003-07-02
申请号:EP96302524.2
申请日:1996-04-10
CPC分类号: G03F7/70716 , G01B11/002 , G03F7/70725 , G05B19/00 , G05B19/231 , G05B2219/37275 , G05B2219/41172 , G05B2219/41181 , G05B2219/41202 , G05B2219/41212
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公开(公告)号:EP3090216A1
公开(公告)日:2016-11-09
申请号:EP14824912.1
申请日:2014-12-19
申请人: HUBBARD PRODUCTS LTD
发明人: OLUKOJU, Sam
CPC分类号: F25B49/02 , F25B5/02 , F25B39/02 , F25B2600/2513 , F25B2700/21173 , G05B15/02 , G05B2219/2654 , G05B2219/41181
摘要: An evaporator controller for a plural-coil evaporator of a refrigeration system, the evaporator controller comprising a mode determiner for selecting a mode of operation of the evaporator from a plurality of modes of operation, wherein one mode uses a first coil of the plurality of coils of the evaporator, another mode uses a second coil of the plurality of coils of the evaporator and at least one mode uses more than one of the plurality of coils, based on selection data and a refrigeration requirement, and a selection data updater for updating the selection data based on the selected mode of operation and a process variable of the refrigeration system.
摘要翻译: 一种用于制冷系统的多线圈蒸发器的蒸发器控制器,所述蒸发器控制器包括用于从多种操作模式中选择所述蒸发器的操作模式的模式确定器,其中一种模式使用所述多个线圈中的第一线圈 的另一模式使用蒸发器的多个线圈中的第二线圈,并且至少一种模式基于选择数据和制冷要求使用多个线圈中的多个线圈,以及用于更新所述多个线圈的选择数据更新器 基于选择的操作模式的选择数据和制冷系统的过程变量。
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公开(公告)号:EP0847547B1
公开(公告)日:2002-07-10
申请号:EP97917371.3
申请日:1997-04-30
发明人: SCHOLTEN, Lutz , TRACHT, Rudolf
IPC分类号: G05B13/02
CPC分类号: F02D35/0007 , F02D11/10 , F02D41/1408 , F02D2011/102 , F02D2041/1409 , F02D2041/141 , F02D2041/1416 , F02D2041/1418 , F02D2041/1419 , F02D2041/1433 , G05B2219/41181 , G05B2219/41213 , G05B2219/41214 , G05B2219/41224 , G05B2219/41225 , G05B2219/41395 , G05B2219/42021 , G05B2219/42093 , G05B2219/42237 , G05B2219/43048 , G05B2219/45006 , H02P23/16
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公开(公告)号:EP0559397B1
公开(公告)日:2001-07-25
申请号:EP93301484.7
申请日:1993-02-26
发明人: Sato, Mikio, c/o Canon Kabushiki Kaisha , Asada, Katsumi, c/o Canon Kabushiki Kaisha , Wakui, Shinji, c/o Canon Kabushiki Kaisha
IPC分类号: G05B19/19
CPC分类号: G03F7/709 , G05B5/01 , G05B19/19 , G05B2219/37275 , G05B2219/37313 , G05B2219/41117 , G05B2219/41179 , G05B2219/41181 , G05B2219/41195 , G05B2219/41346 , G05B2219/41367 , G05B2219/41457 , G05B2219/42104 , G05B2219/45026 , G05B2219/49258 , G05B2219/49271 , G05B2219/50046
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公开(公告)号:EP0811115B1
公开(公告)日:2003-10-08
申请号:EP96923017.6
申请日:1996-07-26
申请人: Koninklijke Philips Electronics N.V. , PHILIPS NORDEN AB , Philips Intellectual Property & Standards GmbH
发明人: SCHOLTEN, Lutz
CPC分类号: F02D35/0007 , F02D11/10 , F02D41/1408 , F02D2011/102 , F02D2041/1409 , F02D2041/141 , F02D2041/1416 , F02D2041/1418 , F02D2041/1419 , F02D2041/1433 , G05B2219/41181 , G05B2219/41213 , G05B2219/41214 , G05B2219/41224 , G05B2219/41225 , G05B2219/41395 , G05B2219/42021 , G05B2219/42093 , G05B2219/42237 , G05B2219/43048 , G05B2219/45006 , H02P23/16
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公开(公告)号:EP0737844A3
公开(公告)日:1997-08-06
申请号:EP96302524.2
申请日:1996-04-10
IPC分类号: G01B11/00
CPC分类号: G03F7/70716 , G01B11/002 , G03F7/70725 , G05B19/00 , G05B19/231 , G05B2219/37275 , G05B2219/41172 , G05B2219/41181 , G05B2219/41202 , G05B2219/41212
摘要: In an alignment apparatus for moving an X-Y stage (1) to a target position by a motor (2), a laser interferometer (6) measures the position of the X-Y stage (1), and supplies position information P(x, y) to a subtracter (5) and a gain setter (8). The gain setter (8) sets a transfer function Gxy(s) of a compensator (4) on the basis of the position information P(x, y), and the compensator (4) amplifies a deviation S with the set transfer function Gxy(s) to control a driver (3).
摘要翻译: 在通过马达(2)使XY工作台(1)移动到目标位置的对准装置中,激光干涉仪(6)测量XY工作台(1)的位置,并将位置信息P(x,y) 到减法器(5)和增益设置器(8)。 增益设定器(8)根据位置信息P(x,y)设定补偿器(4)的传递函数Gxy(s),并且补偿器(4)利用设定的传递函数Gxy放大偏差S (s)来控制驾驶员(3)。
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公开(公告)号:EP0737844A2
公开(公告)日:1996-10-16
申请号:EP96302524.2
申请日:1996-04-10
IPC分类号: G01B11/00
CPC分类号: G03F7/70716 , G01B11/002 , G03F7/70725 , G05B19/00 , G05B19/231 , G05B2219/37275 , G05B2219/41172 , G05B2219/41181 , G05B2219/41202 , G05B2219/41212
摘要: In an alignment apparatus for moving an X-Y stage (1) to a target position by a motor (2), a laser interferometer (6) measures the position of the X-Y stage (1), and supplies position information P(x, y) to a subtracter (5) and a gain setter (8). The gain setter (8) sets a transfer function Gxy(s) of a compensator (4) on the basis of the position information P(x, y), and the compensator (4) amplifies a deviation S with the set transfer function Gxy(s) to control a driver (3).
摘要翻译: 在用于通过电动机(2)将XY平台(1)移动到目标位置的对准装置中,激光干涉仪(6)测量XY平台(1)的位置,并且提供位置信息P(x,y) 到减法器(5)和增益设定器(8)。 增益设定器(8)基于位置信息P(x,y)设置补偿器(4)的传递函数Gxy(s),补偿器(4)利用设定的传递函数Gxy放大偏差S 以控制驾驶员(3)。
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公开(公告)号:EP0559397A3
公开(公告)日:1995-06-07
申请号:EP93301484.7
申请日:1993-02-26
发明人: Sato, Mikio, c/o Canon Kabushiki Kaisha , Asada, Katsumi, c/o Canon Kabushiki Kaisha , Wakui, Shinji, c/o Canon Kabushiki Kaisha
IPC分类号: G05B19/19
CPC分类号: G03F7/709 , G05B5/01 , G05B19/19 , G05B2219/37275 , G05B2219/37313 , G05B2219/41117 , G05B2219/41179 , G05B2219/41181 , G05B2219/41195 , G05B2219/41346 , G05B2219/41367 , G05B2219/41457 , G05B2219/42104 , G05B2219/45026 , G05B2219/49258 , G05B2219/49271 , G05B2219/50046
摘要: This invention relates to a precision positioning apparatus, and particularly to a precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper, and has as its object the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidity which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus of the present invention is provided with a base body, a movable member positioned on the base plate, driving means for driving the movable member, detecting means for detecting the moved state of the movable member, and means for supplying the driving means with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting means, and the supplying means is provided with means for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving means and the output from the detecting means. The signal supplied to the driving means can be corrected by the correction signal.
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公开(公告)号:EP1225493B1
公开(公告)日:2005-10-26
申请号:EP02076319.9
申请日:1996-04-10
CPC分类号: G03F7/70716 , G01B11/002 , G03F7/70725 , G05B19/00 , G05B19/231 , G05B2219/37275 , G05B2219/41172 , G05B2219/41181 , G05B2219/41202 , G05B2219/41212
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公开(公告)号:EP1225493A3
公开(公告)日:2002-08-28
申请号:EP02076319.9
申请日:1996-04-10
CPC分类号: G03F7/70716 , G01B11/002 , G03F7/70725 , G05B19/00 , G05B19/231 , G05B2219/37275 , G05B2219/41172 , G05B2219/41181 , G05B2219/41202 , G05B2219/41212
摘要: In an alignment apparatus for moving an X-Y stage (1) to a target position by a motor (2), a laser interferometer (6) measures the position of the X-Y stage (1), and supplies position information P(x, y) to a subtracter (5) and a gain setter (8). The gain setter (8) sets a transfer function Gxy(s) of a compensator (4) on the basis of the position information P(x, y), and the compensator (4) amplifies a deviation S with the set transfer function Gxy(s) to control a driver (3).
摘要翻译: 在用于通过电动机(2)将XY平台(1)移动到目标位置的对准装置中,激光干涉仪(6)测量XY平台(1)的位置,并且提供位置信息P(x,y) 到减法器(5)和增益设定器(8)。 增益设定器(8)基于位置信息P(x,y)设置补偿器(4)的传递函数Gxy(s),补偿器(4)利用设定的传递函数Gxy放大偏差S 以控制驾驶员(3)。
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