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公开(公告)号：EP1807856B1
公开(公告)日：2011-12-07
申请号：EP05807167.1
申请日：2005-10-24
申请人： EPCOS AG
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
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公开(公告)号：EP1807856A1
公开(公告)日：2007-07-18
申请号：EP05807167.1
申请日：2005-10-24
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
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13.发明公开
公开(公告)号：EP1672662A1
公开(公告)日：2006-06-21
申请号：EP05025063.8
申请日：2005-11-16
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
摘要翻译： 微机电系统开关及其制造方法。 微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且在基板的上表面和多个信号线之间包括开关接触点和多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推动杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外部致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。
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14.发明公开
公开(公告)号：EP1246216A2
公开(公告)日：2002-10-02
申请号：EP02252164.5
申请日：2002-03-26
申请人： Omron Corporation
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0063
摘要： Signal lines (5a, 5b) formed on a fixed substrate 1 are arranged on the same straight line. A movable substrate (2) is elastically supported on the fixed substrate (1) through beam portions (11) provided at two positions which are point-symmetrical with each other with a movable contact (16) centered thereon. At least portions opposing the signal lines (5a, 5b) are removed from the movable substrate (2). The movable contact (16) is elastically supported at two points that are orthogonal to the straight line on which the signal lines (5a, 5b) are arranged and do not face the signal lines (5a, 5b). A pair of protrusions 17 are formed at positions at which after closing the contacts, if a voltage were applied between the fixed electrode 4 and the movable electrode 12 without the protrusion, the fixed substrate 1 and the movable substrate 2 would contact each other following the contact between the fixed contact 7 and the movable contact 16, in a point-symmetrical manner with the movable contact 16 centered thereon. With this arrangement, it is possible to provide an electrostatic micro-relay which has a simple and small-size structure that is easily manufactured at low costs, and is superior in high-frequency characteristics with a suitable contact release force.
摘要翻译： 信号线（5A，5B）上的固定形成的衬底1被布置在同一直线上。 可移动的衬底（2）被弹性地支撑在固定的底物（1）通过在两个位置设置的梁部（11），它们是点对称的相互的可移动触点（16）为中心在其上。 在相对的所述信号线的至少部分（5A，5B）是从可动基板（2）中除去。 动触头（16）在两个点弹性支撑的确是正交的直线上的信号线（5A，5B）设置和不面对信号线（5A，5B）。 一对突出17在在哪个位置闭合触头之后形成，如果电压被固定电极4和可动电极12，而不突出部之间时，所述固定基板1和可动基板2将接触海誓山盟继 固定触点7和与该可动接点16可动接点16以点对称的方式之间的接触为中心在其上。 利用这种布置，能够提供对静电微型继电器其具有简单和小型的结构并以低成本容易地制造，并且是在与合适的接触释放力的高频特性优越。
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公开(公告)号：EP0698279B1
公开(公告)日：1997-11-26
申请号：EP94914474.5
申请日：1994-05-06
发明人： Smith,Charles Gordon
CPC分类号： H01H1/0036 , G11C11/50 , G11C23/00 , H01H1/20 , H01H1/66 , H01H59/0009 , H01H2001/0042 , H01H2059/0036 , H01H2059/0063
摘要： A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the bridging contact (8) is in contact with the base contact (3), and in the other of which the bridging contact (8) is spaced apart from the base contact (3). Deflection means (4, 5) deflects the bridging contact (8) from one stable position to the other.
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16.发明授权
公开(公告)号：EP1246216B1
公开(公告)日：2014-06-04
申请号：EP02252164.5
申请日：2002-03-26
申请人： Omron Corporation
发明人： Seki, Tomonori
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0063
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公开(公告)号：EP1619710B1
公开(公告)日：2012-03-21
申请号：EP05014807.1
申请日：2005-07-07
发明人： Lee, Moon-chul , Park, Tae-sik , Jeong, Hee-moon
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0036 , H01H2059/0063
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公开(公告)号：EP1672662B1
公开(公告)日：2008-06-25
申请号：EP05025063.8
申请日：2005-11-16
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
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19.发明公开Micro electromechanical device with reduced self-actuation 审中-公开Mikroelektromechanische Vorrichtung mit verringerterSelbstbetätigung
公开(公告)号：EP1722386A1
公开(公告)日：2006-11-15
申请号：EP05103893.3
申请日：2005-05-10
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0063 , Y10T29/42 , Y10T29/435 , Y10T29/49105
摘要： A micro electromechanical device comprising a first and a second conductor, the first conductor defining a plane and the second conductor having a collapsible portion extending at a predetermined distance above said plane and above the first conductor, said collapsible portion during use of the device being attracted by the first conductor as a result of an RF induced force, the orthogonal projection of said collapsible portion onto said plane defining a principal actuation area, said collapsible portion being movable between a distant position further from the principal actuation area to a proximate position closer to the principal actuation area, the movement of the collapsible portion being actuatable by applying an attraction force in said principal actuation area, said collapsible portion showing a variable actuation liability in longitudinal direction with a region of maximum actuation liability where the attraction force to be applied for actuation is a minimum over the whole principal actuation area, the first conductor being laterally offset from said region of maximum actuation liability by a predetermined distance, so that actuation of the collapsible portion by means of the first conductor requires a higher attraction force than said minimum.
摘要翻译： 一种包括第一和第二导体的微机电装置，所述第一导体限定平面，所述第二导体具有在所述平面上方并且在所述第一导体上方以预定距离延伸的可折叠部分，所述装置的使用期间所述可折叠部分被吸引 由第一导体作为RF感应力的结果，将所述可折叠部分正交投影到所述平面上，所述平面限定主要致动区域，所述可折叠部分可在远离主要致动区域的距离更接近 主要致动区域，可折叠部分的运动可通过在所述主要致动区域中施加吸引力来致动，所述可折叠部分在纵向具有可变致动负荷，具有最大致动责任区域，其中施加的吸引力为 整个制动器的动作是最小的 主动作区域，第一导体从最大致动责任区域侧向偏移预定距离，使得借助第一导体致动可收缩部分需要比所述最小值更高的吸引力。
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公开(公告)号：EP1619710A3
公开(公告)日：2006-09-20
申请号：EP05014807.1
申请日：2005-07-07
发明人： Lee, Moon-chul , Park, Tae-sik , Jeong, Hee-moon
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0036 , H01H2059/0063
摘要： A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance.
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