Electromagnetic micro actuator and method of manufacturing the same
    2.
    发明公开
    Electromagnetic micro actuator and method of manufacturing the same 有权
    Elektromagnetischer Mikroaktuator和Herstellungsverfahrendafür

    公开(公告)号:EP1895349A1

    公开(公告)日:2008-03-05

    申请号:EP07100852.8

    申请日:2007-01-19

    IPC分类号: G02B26/08

    CPC分类号: G02B26/085 G02B26/101

    摘要: Provided are a micro actuator and a method of manufacturing the micro actuator. A micro actuator includes a base frame, a first movable part, a second movable part, at least one pair of permanent magnets, a coil part, and a deformation suppression portion. The first movable part is rotatably connected to the base frame. The second movable part is rotatably connected to the first movable part and includes a mirror changing an optical path. The coil part includes a plurality of coil sections protruded from top surfaces of the first and second movable parts. The deformation suppression portion includes a plurality of grooves formed in the first and second movable parts between the coil sections. The deformation suppression portion suppresses a thermal deformation occurring when a current is applied to the coil part so as to reduce deformations of the first and second movable parts.

    摘要翻译: 提供微致动器和制造微致动器的方法。 微型致动器包括基架,第一可移动部件,第二可动部件,至少一对永磁体,线圈部件和变形抑制部分。 第一可移动部分可旋转地连接到基架。 第二可动部分可转动地连接到第一可移动部分,并且包括改变光路的反射镜。 线圈部分包括从第一和第二可移动部分的顶表面突出的多个线圈部分。 变形抑制部包括形成在线圈部之间的第一和第二可动部中的多个槽。 变形抑制部抑制向线圈部施加电流而发生的热变形,以减少第一和第二可动部的变形。

    Bi-axially driven MEMS Device
    3.
    发明公开
    Bi-axially driven MEMS Device 审中-公开
    双轴磨损MEMS-Vorrichtung

    公开(公告)号:EP1876139A2

    公开(公告)日:2008-01-09

    申请号:EP07100792.6

    申请日:2007-01-19

    IPC分类号: B81B3/00

    摘要: Provided is a two-axis micro-electro mechanical system (MEMS) device. The MEMS device includes a moving plate, a stage, a driving coil, a pair of magnets, and a yoke magnetic body. The moving plate is supported coaxially on a first axis to move pivotably about the first axis that is disposed perpendicularly to a second axis. The stage is supported coaxially on the second axis in an inner region of the moving plate. The driving coil includes a coaxial coil portion arranged along the first axis of the driving plate and divided at a center by the stage, and a first connecting coil portion and a second connecting coil portion. The magnets of the pair are respectively disposed. The yoke magnetic body is disposed between the pair of magnets in a region above or below the magnets and is formed of a material capable of being magnetized by the magnets in order to suddenly change a magnetic flux density according to a distance between the pair of magnets. The MEMS device provides reliable driving about the two axes and doubles the rotation force.

    摘要翻译: 提供了一种双轴微机电系统(MEMS)装置。 MEMS器件包括移动板,台,驱动线圈,一对磁体和轭磁体。 移动板同轴地支撑在第一轴线上,以便围绕垂直于第二轴线设置的第一轴线可枢转地移动。 舞台在移动板的内部区域中同轴地支撑在第二轴上。 驱动线圈包括沿着驱动板的第一轴线布置并在台架的中心被分割的同轴线圈部分,以及第一连接线圈部分和第二连接线圈部分。 该对的磁体分别设置。 磁轭磁体位于磁体上方或下方的区域中的一对磁体之间,并且由能够被磁体磁化的材料形成,以便根据一对磁体之间的距离突然改变磁通密度 。 MEMS器件提供围绕两个轴的可靠驱动并使旋转力加倍。

    A comb structure using a magnetic force
    4.
    发明公开
    A comb structure using a magnetic force 有权
    磁力使用梳状结构的增溶

    公开(公告)号:EP1006365A3

    公开(公告)日:2001-11-07

    申请号:EP99309722.9

    申请日:1999-12-03

    摘要: A comb structure in which a magnetic force, which is generated between a pair of intermeshed combs (21,22) by applying a magnetic flux thereto, is constant with respect to the relative motion between the combs, is provided. Also, an actuator and an inertia sensor both using the comb structure are provided. The comb structure includes a pair of magnetic combs (21,22), a magnetic flux guide (23) for magnetically connecting the pair of combs, a coil (24) wound around an arbitrary portion of the magnetic flux guide, and a power supply (25) connected to the coil. The pair of magnetic combs intermeshed with each other having a gap S therebetween are connected to each other by the magnetic flux guide, such that they are driven by receiving a magnetic field from the coil. The coil (24) generates a magnetic field under the influence of a current provided from the power supply (25).

    Multilayered wafer with thrick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof
    5.
    发明公开
    Multilayered wafer with thrick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof 有权
    多层光盘用厚牺牲层采用多孔硅或多孔硅和制造过程

    公开(公告)号:EP1041621A2

    公开(公告)日:2000-10-04

    申请号:EP00106011.0

    申请日:2000-03-27

    IPC分类号: H01L21/762

    摘要: A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p + -type or n + -type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.

    摘要翻译: 一种多层晶片具有厚的牺牲层,其全部通过形成氧化的多孔硅或多孔硅牺牲层和外延多晶硅层的牺牲层上生长获得的,并且及其制造方法提供。 用厚的牺牲层的多层晶片采用在多孔硅层上或氧化的多孔硅层作为牺牲层的搜索没有足够的间隙可以在衬底和在半导体致动器的悬架结构的制造中的悬架结构或之间获得 半导体惯性传感器。 因此,在晶片雅丁的制造方法,以本发明中,AP <+> - 型或n <+> - 晶片以高浓度掺杂的被准备,然后厚的多孔硅层可以简单地通过以下方式获得类型 阳极键合的晶片的表面。 所以,当多晶硅是通过外延工艺生长在多孔硅层上,它是生长比当单晶硅生长更快。

    Rotary gyroscope
    7.
    发明公开
    Rotary gyroscope 审中-公开
    旋转,Gyroskop

    公开(公告)号:EP1455162A1

    公开(公告)日:2004-09-08

    申请号:EP04251299.6

    申请日:2004-03-05

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5642 G01C19/02

    摘要: A rotary gyroscope (10) includes a base plate (1), an intermediate structure (3), including a driven element (33) floating over the base plate as supported by a driving supporter (34) radially extending therefrom, the driven element (33) performing an oscillating motion (63) with respect to a first axis (Z), which is vertical to a center plane thereof, a driving electrode (35) driving the driven element (33), and a sensing element (31) disposed in the driven element (33) and connected to the driven element (33) by a sensing connector (32) to oscillate together with the driven element (33) and concurrently to perform a sensing motion (62) with respect to a third axis (Y), which is vertical to the first axis (Z) and any second axis (X), which is parallel to a center plane, due to a Coriolis force when an angular velocity (61) is inputted from the second axis (X), and a cover (4) covering the intermediate structure (3) and having a sensing electrode (41) to detect the sensing motion (62) of the sensing element (31).

    摘要翻译: 旋转陀螺仪(10)包括基板(1),中间结构(3),其包括在由径向延伸的驱动支撑件(34)支撑的基板上浮动的从动元件(33),从动元件 33)相对于垂直于其中心平面的第一轴线(Z)执行振荡运动(63),驱动驱动元件(33)的驱动电极(35)和设置在所述驱动元件 在所述被驱动元件(33)中并通过感测连接器(32)与所述从动元件(33)连接以与所述从动元件(33)一起振荡并同时执行相对于第三轴线的感测运动(62) Y),当从第二轴(X)输入角速度(61)时,由于科里奥利力,它垂直于第一轴线(Z)和任何平行于中心平面的第二轴线(X) ,以及覆盖所述中间结构(3)并且具有感测电极(41)以检测所述感测运动(62)的盖(4) 的传感元件(31)。

    A comb structure using a magnetic force
    8.
    发明公开
    A comb structure using a magnetic force 有权
    Von Magnetkraft Gebrauch machende Kammstruktur

    公开(公告)号:EP1006365A2

    公开(公告)日:2000-06-07

    申请号:EP99309722.9

    申请日:1999-12-03

    摘要: A comb structure in which a magnetic force, which is generated between a pair of intermeshed combs (21,22) by applying a magnetic flux thereto, is constant with respect to the relative motion between the combs, is provided. Also, an actuator and an inertia sensor both using the comb structure are provided. The comb structure includes a pair of magnetic combs (21,22), a magnetic flux guide (23) for magnetically connecting the pair of combs, a coil (24) wound around an arbitrary portion of the magnetic flux guide, and a power supply (25) connected to the coil. The pair of magnetic combs intermeshed with each other having a gap S therebetween are connected to each other by the magnetic flux guide, such that they are driven by receiving a magnetic field from the coil. The coil (24) generates a magnetic field under the influence of a current provided from the power supply (25).

    摘要翻译: 提供了一种梳状结构,其中通过向其施加磁通而在一对相互啮合的梳子(21,22)之间产生的磁力相对于梳子之间的相对运动是恒定的。 此外,提供了使用梳结构的致动器和惯性传感器。 梳状结构包括一对磁梳(21,22),用于磁连接该对梳齿的磁通引导件(23),缠绕在磁通导体的任意部分上的线圈(24)和电源 (25)连接到线圈。 彼此间有间隙S的彼此相互啮合的一对磁梳通过磁通引导件相互连接,从而通过接收来自线圈的磁场来驱动它们。 在由电源(25)提供的电流的影响下,线圈(24)产生磁场。

    Image fusing apparatus using carbon nano-tube heater
    10.
    发明公开
    Image fusing apparatus using carbon nano-tube heater 审中-公开
    使用碳纳米管加热器的图像融合装置

    公开(公告)号:EP2568342A2

    公开(公告)日:2013-03-13

    申请号:EP12183348.7

    申请日:2012-09-06

    IPC分类号: G03G15/20

    摘要: An image fusing apparatus includes a heating belt including a resistance heating layer, an insulating layer formed on an inner surface of the resistance heating layer, and a release layer formed on an outer surface of the resistance heating layer; a heating supporting roller disposed (positioned) inside the heating belt and rotating with the heating belt; a pressing roller disposed (positioned) parallel to the heating supporting roller and in contact with the outer surface of the heating belt to form a nip; and an electricity supplying member to supply electricity to the resistance heating layer of the heating belt. A thickness of paper non-contact areas of opposite side end portions of the resistance heating layer of the heating belt is the same as or thicker than the thickness of a paper contact area of a middle portion of the resistance heating layer thereof.

    摘要翻译: 一种图像定影设备,包括:加热带,其包括电阻加热层;绝缘层,其形成在电阻加热层的内表面上;以及脱模层,其形成在电阻加热层的外表面上; 设置(定位)在加热带内并与加热带一起旋转的加热支撑辊; 与加热支撑辊平行设置(定位)并与加热带的外表面接触以形成辊隙的加压辊; 以及向加热带的电阻加热层供电的供电部件。 加热带的电阻加热层的相对侧端部的纸非接触区域的厚度与其电阻加热层的中间部分的纸接触区域的厚度相同或比其厚。