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    Method for measuring vibration characteristic of cantilever
    11.
    发明公开
    Method for measuring vibration characteristic of cantilever 审中-公开
    VERFAHREN ZUR MESSUNG VON VIBRATIONSMERKMALEN EINES AUSLEGERS

    公开(公告)号：EP2927699A2

    公开(公告)日：2015-10-07

    申请号：EP15161370.0

    申请日：2015-03-27

    申请人： Hitachi High-Tech Science Corporation

    发明人： Shigeno, Masatsugu ,  Shikakura, Yoshiteru

    IPC分类号： G01Q40/00

    CPC分类号： G01Q10/00 ,  G01H1/00 ,  G01Q40/00

    摘要： A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression (1):

    摘要翻译： 本公开提出了一种用于测量悬臂的振动特性的方法。 该方法包括：当对悬臂施加以共振频率f1（Hz）的振动时，测量安装在扫描探针显微镜中的悬臂的振幅V; 当振幅V等于或大于稳定振幅V0的0.90时获得时间Th（秒）; 并使用以下表达式（1）计算Q值：

    METHOD AND APPARATUS TO COMPENSATE FOR DEFLECTION ARTIFACTS IN AN ATOMIC FORCE MICROSCOPE
    18.
    发明公开
    METHOD AND APPARATUS TO COMPENSATE FOR DEFLECTION ARTIFACTS IN AN ATOMIC FORCE MICROSCOPE 审中-公开
    VERFAHREN UND VORRICHTUNG ZUR KOMPENSATION VON ABLENKUNGSARTEFAKTEN IN EINEM ATOMKRAFTMIKROSKOP

    公开(公告)号：EP3111239A4

    公开(公告)日：2017-10-04

    申请号：EP15754661

    申请日：2015-03-02

    申请人： BRUKER NANO INC

    发明人： SU CHANMIN ,  HU SHUIQING

    IPC分类号： G01Q30/06 ,  G01Q40/00 ,  G01Q60/58

    CPC分类号： G01Q40/00 ,  G01Q30/06 ,  G01Q60/34 ,  G01Q60/58

    摘要： A method of compensating for an artifact in data collected using a standard atomic force microscope (AFM) operating in an oscillating mode. The artifact is caused by deflection of the probe not related to actual probe-sample interaction and the method includes compensating for thermal induced bending of the probe of the AFM by measuring a DC component of the measured deflection. The DC component of deflection is identified by calibrating the optical deflection detection apparatus and monitoring movement of the mean deflection, thereby allowing the preferred embodiments to minimize the adverse effect due to the artifact. Notably, plotting the DC deflection profile yields a corresponding temperature profile of the sample.

    摘要翻译： 一种补偿使用以振荡模式操作的标准原子力显微镜（AFM）收集的数据中的伪像的方法。 伪影是由与实际的探针 - 样本相互作用无关的探针偏转造成的，并且该方法包括通过测量所测量的偏转的DC分量来补偿AFM探针的热诱发弯曲。 偏转的DC分量通过校准光学偏转检测设备和监测平均偏转的移动来识别，由此允许优选实施例将由伪影引起的不利影响最小化。 值得注意的是，绘制DC偏转曲线产生样品的相应温度曲线。