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    WORKPIECE TRANSPORT AND POSITIONING APPARATUS
    26.
    发明公开
    WORKPIECE TRANSPORT AND POSITIONING APPARATUS 审中-公开
    工件运输和定位设备

    公开(公告)号：EP3069367A1

    公开(公告)日：2016-09-21

    申请号：EP14859522.6

    申请日：2014-11-11

    申请人： Howard Hughes Medical Institute

    发明人： PRICE, John, H. ,  BOCK, Dravida

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20 ,  G01N1/32 ,  G01N35/00732 ,  H01J37/023 ,  H01J37/185 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20278 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/26 ,  H01J2237/2602

    摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.

    摘要翻译： 一种自动化工件处理设备，包括：处理部分，其包括处理模块，该处理模块被配置用于在处理位置处处理工件;运送模块，其包括第一梭步骤，独立于第一步骤的第二梭步骤，以及末端执行器， 第一和第二阶段中的一个，末端执行器构造成保持和运输工件进出处理模块，并且具有由第一和第二阶段的组合限定的运动范围，该运动范围从工件保持件 将处理模块外部的工作站移动到处理模块内部的处理位置，使得末端执行器限定处理模块的处理阶段，以及包括装载端口模块的自动装载和运输部分，工件通过所述装载端口模块被装载到自动装载和运输部分中 并且可通信地连接到运输模块。

    THREE-DIMENSIONAL INTERFEROMETRIC MICROSCOPY
    27.
    发明公开
    THREE-DIMENSIONAL INTERFEROMETRIC MICROSCOPY 审中-公开
    三个干涉测量观察

    公开(公告)号：EP2988115A3

    公开(公告)日：2016-08-10

    申请号：EP15183770.5

    申请日：2010-07-16

    申请人： Howard Hughes Medical Institute

    发明人： HESS, Harald F.

    IPC分类号： G01N21/64 ,  G02B21/22

    CPC分类号： G01N21/6458 ,  G01B9/02097 ,  G01B9/04 ,  G02B21/18 ,  G02B27/14

    摘要： A statistically sparse subset of switchable optical sources in a sample (S) is activated, and the activated switchable optical sources are excited such that optical beams are emitted from the activated switchable optical sources along at least two optical paths (132, 142). A first wavefront modification in a first optical beam emitted from the activated switchable optical sources along a first optical path is introduced and a second wavefront modification in a second optical beam emitted from the activated switchable optical sources along a second optical path is introduced, the second wavefront modification being distinct from the first wavefront modification. The first and second optical beams are interfered with each other to produce a plurality of output beams (152, 154) and three-dimensional position information of the optical sources is determined based on an intensity of each output beam from the plurality of output beams.

    Three dimensional interferometric microscopy
    29.
    发明公开
    Three dimensional interferometric microscopy 有权
    三维干涉显微镜

    公开(公告)号：EP2299260A3

    公开(公告)日：2011-11-02

    申请号：EP10169918.9

    申请日：2010-07-16

    申请人： Howard Hughes Medical Institute

    发明人： Hess, Harald F.

    IPC分类号： G01N21/64 ,  G02B21/22

    CPC分类号： G01N21/6458 ,  G01B9/02097 ,  G01B9/04 ,  G02B21/18 ,  G02B27/14

    摘要： A statistically sparse subset of switchable optical sources in a sample is activated, and the activated switchable optical sources are excited such that optical beams are emitted from the activated switchable optical sources along at least two optical paths. A first wavefront modification in a first optical beam emitted from the activated switchable optical sources along a first optical path is introduced and a second wavefront modification in a second optical beam emitted from the activated switchable optical sources along a second optical path is introduced, the second wavefront modification being distinct from the first wavefront modification. The first and second optical beams are interfered with each other to produce a plurality of output beams, and three-dimensional position information of the optical sources is determined based on an intensity of each output beam from the plurality of output beams.

    摘要翻译： 样本中的可切换光源的统计上稀疏的子集被激活，并且激活的可切换光源被激励，使得光束从激活的可切换光源沿至少两个光路发射。 引入沿着第一光路从激活的可切换光源发射的第一光束中的第一波前修正，并且引入沿着第二光路从激活的可切换光源发射的第二光束中的第二波前修正，第二 波前修改不同于第一波前修改。 第一和第二光束相互干涉以产生多个输出光束，并且基于来自多个输出光束的每个输出光束的强度来确定光源的三维位置信息。