公开(公告)号：EP1812945A4

公开(公告)日：2009-11-18

申请号：EP05821396

申请日：2005-11-03

申请人： OMNIPROBE INC

发明人： MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

IPC分类号： H01J37/26

CPC分类号： H01J37/302 ,  B82Y15/00 ,  G01N1/32 ,  H01J37/20 ,  H01J37/22 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/30411 ,  H01J2237/30472 ,  H01J2237/31745

公开(公告)号：EP1817557A2

公开(公告)日：2007-08-15

申请号：EP05851362.3

申请日：2005-11-03

申请人： Omniprobe, Inc.

发明人： MOORE, Thomas, M. ,  ZAYKOVA-FELDMAN, Lyudmila

IPC分类号： G01J1/04 ,  H01J3/14

CPC分类号： H01J37/22 ,  B82Y35/00 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/31745

摘要： We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.

公开(公告)号：EP1774538A2

公开(公告)日：2007-04-18

申请号：EP05810798.8

申请日：2005-07-21

申请人： Omniprobe, Inc.

发明人： Moore, Thomas, M.

IPC分类号： G21K7/00

CPC分类号： H01J37/3178 ,  G21K7/00 ,  H01J37/3056 ,  H01J2237/006 ,  H01J2237/30411 ,  H01J2237/30455 ,  H01J2237/31 ,  H01J2237/31744

摘要： We disclose a gas injection system having at least one crucible, each crucible holding at least one deposition constituent; at least one transfer tube, the number of transfer tubes corresponding to the number of crucibles, each transfer tube being connected to a corresponding crucible. There is at least one metering valve, the number of metering valves corresponding to the number of transfer tubes, each metering valve being connected to a corresponding transfer tube so that the metering valve can measure and adjust vapor flow in the corresponding transfer tube. A sensor is provided capable of sensing reactions between deposition constituents and a focused ion beam A computer is connected to receive the output of the sensor; the computer is also connected to each metering valve to control the operation of the valve, and the computer is programmed to send control signals to each metering valve to control the operation of the valve; the control signals being computed responsive to feedback from the output of the sensor.

公开(公告)号：EP1682254A2

公开(公告)日：2006-07-26

申请号：EP04810249.5

申请日：2004-11-03

申请人： Omniprobe, Inc.

发明人： MOORE, Thomas

IPC分类号： B01F1/00

CPC分类号： H01J37/20 ,  G01N1/286 ,  H01J37/26 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A coupon (100) for preparing a TEM sample holder (170) comprises a sheet of material (120) that includes a TEM sample holder form (170). There is at least one section of the sheet (120) connecting the TEM sample holder form (170) to other portions of the sheet (120). A TEM sample holder (170) is formed by cutting the TEM sample holder form (170) from the coupon in a press. The cutting joins the tip point (160) of a nano-manipulator probe tip (150) with the formed TEM sample holder (170). The tip point (160) of the probe (150) has a sample (140) attached for inspection in a TEM.