METHOD AND APPARATUS FOR DOPING A SOLID MATERIAL
    23.
    发明公开
    METHOD AND APPARATUS FOR DOPING A SOLID MATERIAL 失效
    DEVICE AND METHOD FOR日期的固体材料

    公开(公告)号:EP0689722A1

    公开(公告)日:1996-01-03

    申请号:EP93905317.0

    申请日:1993-03-08

    IPC分类号: C30B31 C25D15 H01L21 H01L39

    摘要: A doping method for a solid host material (2), preferably a film, using an electrochemical cell (1, 2, 5, 6) and the host material (2) as one of the electrodes, wherein the doping is confined to a selected region of the host material by using either a specially designed counterelectrode, for example a tip (1), or by covering the host material (2) by a layer with the exception of the selected region. The method is especially suitable for using oxygen as dopant and the preparation of oxide superconductors. By using control devices and (piezoelectric) transducers known from the scanning tunneling microscope, doped regions of submicron resolution can be produced.