-
公开(公告)号：EP2799830B1
公开(公告)日：2019-11-20
申请号：EP12861411.2
申请日：2012-12-26
申请人： Posco
发明人： KANG, Jong-Hoon , LEE, Pil-Jong , CHOI, Hee-Chae , KO, Seong-Hyun
-
公开(公告)号：EP3249372B1
公开(公告)日：2019-08-28
申请号：EP17172484.2
申请日：2017-05-23
发明人： GOLDEN, Jim , STUELKE, Robert
-
公开(公告)号：EP3134374B1
公开(公告)日：2019-05-22
申请号：EP14812774.9
申请日：2014-12-18
-
公开(公告)号：EP2132545B1
公开(公告)日：2019-04-10
申请号：EP08725261.5
申请日：2008-02-07
申请人： Rosemount Inc.
发明人： BRODEN, David A.
-
公开(公告)号：EP3124938B1
公开(公告)日：2019-02-20
申请号：EP16178293.3
申请日：2016-07-07
申请人： Kistler Holding AG
发明人： Buck, Reinhold , Giger, Martin , Graf, Philip
-
公开(公告)号：EP3035025B1
公开(公告)日：2019-01-16
申请号：EP14851283.3
申请日：2014-10-03
申请人： Fujikura Ltd.
发明人： TAKAYAMA Naoki , TOMITA Michikazu , SUTO Yuki , OKUDE Satoshi
-
公开(公告)号：EP3394586A1
公开(公告)日：2018-10-31
申请号：EP16763706.5
申请日：2016-09-02
CPC分类号： G01L19/146 , B81B7/0045 , B81B7/0048 , B81B2201/0264 , B81B2207/012 , G01L9/0054 , G01L9/0055 , G01L9/06 , G01L19/0046 , G01L19/0069 , G01L19/02 , G01L19/04 , G01L19/147 , G01L19/148 , H01L2224/48091 , H01L2924/00014
摘要： Suspending a microelectromechanical system (MEMS) pressure sensing element inside a cavity using spring-like corrugations or serpentine crenellations, reduces thermally-mismatched mechanical stress on the sensing element. Overlaying the spring-like structures and the sensing element with a gel further reduces thermally-mismatched stress and vibrational dynamic stress.
-
公开(公告)号：EP2806258B1
公开(公告)日：2018-09-12
申请号：EP13168442.5
申请日：2013-05-20
申请人： ams International AG
发明人： Oldson, Marten , Pijnenburg, Remco Henricus Wilhelmus , Bominaar-Silkens, Iris , Besling, Willem
CPC分类号： G01L9/005 , G01L9/0073 , G01L9/125 , G01L13/025 , G01L19/147 , G01L19/148
摘要： A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports.
-
公开(公告)号：EP3004828B1
公开(公告)日：2018-08-29
申请号：EP14728351.9
申请日：2014-05-27
发明人： KUISMA, Heikki
IPC分类号： G01L19/04
CPC分类号： G01L9/0072 , G01L9/0047 , G01L19/04
摘要： A microelectromechanical pressure sensor structure comprises a planar base, side walls and a diaphragm plate, attached to each other to form a hermetically closed gap that provides a reference pressure. The diaphragm plate extends along a planar inner surface on top of the side walls, and has an outer surface on the opposite side of the diaphragm plate. At least part of the outer surface of the diaphragm plate forms a planar part that includes a recess, a depth of which extends parallel to the side walls and is less than the nominal thickness of the diaphragm. A large part of reasons causing the different bending of the diaphragm and the underlying structures can be eliminated with one or more recesses arranged to the pressure sensor structure.
-
公开(公告)号：EP2589945B1
公开(公告)日：2018-06-20
申请号：EP12185006.9
申请日：2012-09-19
申请人： ROBERT BOSCH GMBH
CPC分类号： G01L19/147 , G01L13/025 , G01L19/04
-
-
-
-
-
-
-
-
-
搜索结果
534 条记录 (耗时 0.024 秒)
