公开(公告)号：EP1050743A3

公开(公告)日：2003-08-13

申请号：EP00303423.8

申请日：2000-04-25

申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

发明人： Abe, Munemitsu ,  Murata, Shinji ,  Esashi, Masayoshi

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： The invention provides a gyroscope that brings about the miniaturization of a device, improvement of detection sensitivity, and reduction of driving voltage. A gyroscope of the present invention is provided with a tuning fork (2) formed of conductive material having a plurality of legs and a support, a top glass substrate (5) and a bottom glass substrate (6) for holding the tuning fork in-between, a plurality of driving electrodes (3) for driving the plurality of legs in capacitance coupling with the legs, and a plurality of detecting electrodes (4), each detecting electrode is disposed so as to face to the end face of each leg in the extending direction corresponding to each leg.

公开(公告)号：EP0692729B1

公开(公告)日：2003-04-09

申请号：EP95906502.0

申请日：1995-01-23

申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

发明人： ESASHI, Masayoshi ,  ASADA, Norihiro Yono Office, Nippon Signal Co. Ltd

IPC分类号： G02B26/10

CPC分类号： G02B26/0841 ,  G02B26/0816 ,  G02B26/105

公开(公告)号：EP1118836A2

公开(公告)日：2001-07-25

申请号：EP00310972.5

申请日：2000-12-08

申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

发明人： Abe, Munemitsu, c/o Alps Electric Co., Ltd. ,  Shinohara, Eiji, c/o Alps Electric Co., Ltd. ,  Esashi, Masayoshi

IPC分类号： G01C19/56

CPC分类号： B81B7/007 ,  B81C2203/031 ,  G01C19/5621 ,  G01C19/5628

摘要： The invention provides a capacitive micro sensor that suppresses electric noises generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork (6) having three legs (9), driving electrodes (4) and detecting electrodes (5) provided on two glass substrates (2, 3), driving fields-through (7) that supply the driving electrodes with a drive signal, and detecting fields-through (8) that extract a detecting signal from the detecting electrodes. There is also provided a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent fields-through of the areas where the driving fields-through and the detecting fields-through are arrayed.

公开(公告)号：EP0692729A1

公开(公告)日：1996-01-17

申请号：EP95906502.0

申请日：1995-01-23

申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

发明人： ESASHI, Masayoshi ,  ASADA, Norihiro Yono Office, Nippon Signal Co. Ltd

IPC分类号： G02B26/10

CPC分类号： G02B26/0841 ,  G02B26/0816 ,  G02B26/105

摘要： The present invention relates to a small-sized thin galvanomirror for detecting the displacement angle of a mirror, which is produced by a semiconductor process. By using a semiconductor process, a movable plate (5) and a torsion bar (6) for supporting this movable plate (5) are integrally formed on a silicon substrate (2), and a planar coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Permanent magnets (10A, 10B) and (11A, 11B) for generating magnetic fields are fixedly disposed on the planar coil (7) to thereby control the amount and direction of current to be conducted to the planar coil (7) so as to variably control the swinging angle of the movable plate (5) through the balance between a magnetic force generated and a torsional force by the torsion bar (6). Furthermore, detecting coils (12A, 12B) are provided below the movable plate (5) to thereby cause a detection current to flow to the planar coil (7) by superposing it on a driving current, whereby the detection of a displacement angle of the mirror is performed through the relative inductance variation between the planar coil (7) and the detection coils (12A, 12B) based on this detection current.

摘要翻译： 本发明涉及一种用于检测通过半导体工艺制造的反射镜的位移角的小型薄电流镜。 通过使用半导体工艺，在硅基板（2）上一体地形成用于支撑该可动板（5）的可动板（5）和扭杆（6），并且平面线圈（7）和全反射镜 （8）形成在可动板（5）的上表面上。 用于产生磁场的永磁体（10A，10B）和（11A，11B）固定地设置在平面线圈（7）上，从而可变地控制要传导到平面线圈（7）的电流量和方向 通过扭杆（6）产生的磁力和扭转力之间的平衡来控制可动板（5）的摆动角度。 此外，检测线圈（12A，12B）设置在可动板（5）的下方，从而通过将驱动电流叠加在平面线圈（7）上而使检测电流流过平面线圈（7） 基于该检测电流，通过平面线圈（7）和检测线圈（12A，12B）之间的相对电感变化来执行反射镜。 $$

公开(公告)号：EP0686863A1

公开(公告)日：1995-12-13

申请号：EP95902924.0

申请日：1994-12-08

申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

发明人： ESASHI, Masayoshi ,  ASADA, Norihiro, Yono Office The Nippon

IPC分类号： G02B26/10

CPC分类号： G02B26/085 ,  G02B26/0816 ,  G02B26/105 ,  Y10S359/90

摘要： This invention relates to a thin and compact galvanomirror produced by using semiconductor fabrication technology. A flat movable plate (5) and a torsion bar (6) for rotatably supporting this movable plate (5) are integrally formed on a silicon substrate (2) by using semiconductor fabrication technology, and a flat coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Further, glass substrates (3), (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and permanent magnets (10A, 10B and 11A, 11B) for causing magnetic fields to act on the coil (7) are fixed at predetermined positions of these glass substrates. The rocking angle of the movable plate (5) is varied depending on the balance of the resulting magnetic force and the torque by controlling the quantity and direction of the current flowing through the coil (7).

摘要翻译： 本发明涉及通过使用半导体制造技术制造的薄而紧凑的电镜。 通过使用半导体制造技术，在硅基板（2）上一体地形成用于可旋转地支撑该可动板（5）的平面可动板（5）和扭杆（6），并且平面线圈（7）和全反射 反射镜（8）形成在可动板（5）的上表面上。 此外，玻璃基板（3），（4）设置在硅基板（2）的上表面和下表面上，并且使磁场作用在线圈（7）上的永久磁铁（10A，10B和11A，11B） ）固定在这些玻璃基板的预定位置。 通过控制流过线圈（7）的电流的数量和方向，可动板（5）的摇摆角度根据所得磁力的平衡和扭矩而变化。

公开(公告)号：EP0685864A1

公开(公告)日：1995-12-06

申请号：EP95902925.7

申请日：1994-12-08

申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

发明人： ESASHI, Masayoshi ,  ASADA, Norihiro, Yono Office The Nippon

IPC分类号： H01H51/26

CPC分类号： H01H50/005 ,  H01H1/20 ,  H01H2050/007 ,  H01H2050/025 ,  H01H2059/0054

摘要： This invention relates to a thin and compact solenoid relay produced by employing semiconductor production technique. A flat sheet-like movable plate (5) and a torsion bar (6) for pivotally supporting the movable plate (5) are integrally formed on a silicon substrate (2) by employing semiconductor production technique. A flat surface coil (7) is disposed on the upper surface of the movable plate (5) ad a movable contact (9), on the lower surface side. Further, glass substrates (3) and (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and a fixed contact (11) capable of coming into contact with the movable contact (9) is disposed on the lower glass substrate (4). Permanent magnets (13A, 13B and 14A, 14B for causing a magnetic field to act ont the flat surface coil are fixedly disposed on the glass substrates (3) and (4). Power is fed to the flat surface coil (7) to generate the magnetic force so as to rotate the movable plate (5) against torsion of the torsion bar (6) and to bring the movable contact (9) and the fixed contact (11) into contact with, or out of contact from, each other.

摘要翻译： 本发明涉及采用半导体生产技术制造的薄型紧凑型电磁继电器。 通过采用半导体制造技术，在硅基板（2）上一体地形成用于枢转地支撑可动板（5）的平板状可动板（5）和扭杆（6）。 平面表面线圈（7）设置在可动板（5）的上表面和可动触头（9）的下表面侧。 此外，玻璃基板（3）和（4）设置在硅基板（2）的上表面和下表面上，并且能够与可动触头（9）接触的固定触头（11）设置在 下玻璃基板（4）。 在玻璃基板（3）和（4）上固定设置用于使平坦面线圈上的磁场作用的永磁体（13A，13B，14A，14B），向平面线圈（7）供电，产生 磁力使得可动板（5）抵抗扭杆（6）的扭转而旋转，并使可动触头（9）和固定触头（11）彼此接触或脱离接触 。

公开(公告)号：EP0692729A4

公开(公告)日：1995-11-23

申请号：EP95906502

申请日：1995-01-23

申请人： NIPPON SIGNAL CO LTD ,  ESASHI MASAYOSHI

发明人： ESASHI MASAYOSHI ,  ASADA NORIHIRO YONO OFFICE NIP

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0841 ,  G02B26/0816 ,  G02B26/105

摘要： The present invention relates to a small-sized thin galvanomirror for detecting the displacement angle of a mirror, which is produced by a semiconductor process. By using a semiconductor process, a movable plate (5) and a torsion bar (6) for supporting this movable plate (5) are integrally formed on a silicon substrate (2), and a planar coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Permanent magnets (10A, 10B) and (11A, 11B) for generating magnetic fields are fixedly disposed on the planar coil (7) to thereby control the amount and direction of current to be conducted to the planar coil (7) so as to variably control the swinging angle of the movable plate (5) through the balance between a magnetic force generated and a torsional force by the torsion bar (6). Furthermore, detecting coils (12A, 12B) are provided below the movable plate (5) to thereby cause a detection current to flow to the planar coil (7) by superposing it on a driving current, whereby the detection of a displacement angle of the mirror is performed through the relative inductance variation between the planar coil (7) and the detection coils (12A, 12B) based on this detection current.

公开(公告)号：EP0604651A1

公开(公告)日：1994-07-06

申请号：EP92915839.2

申请日：1992-07-16

申请人： THE NIPPON SIGNAL CO. LTD. ,  ESASHI, Masayoshi

发明人： ESASHI, Masayoshi 11-9, Yagiyamaminami 1-chome ,  ASADA, Norihiro Yono Office Nippon Signal Co.Ltd. ,  KATO, Masakazu Yono Office Nippon Signal Co.Ltd. ,  FUTUHARA,Koichi Yono Office Nippon Signal Co Ltd.

IPC分类号： H03K19/007

CPC分类号： H03K19/007

摘要： A fail-safe logical operation circuit which includes a transformer (T) for converting binary input signals to magnetic flux to sum them up, and a level detector (1) for detecting this sum and generating binary outputs having logical values of "1" and "0". In this way, the fail-safe circuit can simplify the circuit construction and can reduce the level of the logical output.

摘要翻译： 一种故障安全逻辑运算电路，包括用于将二进制输入信号转换成磁通以将其相加的变压器（T）和用于检测该和的电平检测器（1），并产生具有逻辑值“1”和 “0”。 以这种方式，故障安全电路可以简化电路结构，并可以降低逻辑输出的电平。