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    Phase-resolved measurement for frequency-shifting interferometry
    38.
    发明公开
    Phase-resolved measurement for frequency-shifting interferometry 审中-公开
    用于频移干涉测量的相位分辨测量

    公开(公告)号：EP2267405A2

    公开(公告)日：2010-12-29

    申请号：EP10185202.8

    申请日：2005-09-20

    申请人： Corning Incorporated

    发明人： Kulawiec, Andrew W. ,  Marron, Joseph C. ,  McClimans, Donald G. ,  Tronolone, Mark J.

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02004 ,  G01B9/02002 ,  G01B9/02069 ,  G01B9/02079 ,  G01B2290/60

    摘要： A frequency-shifting interferometer gathers intensity data from a set of interference patterns produced at different measuring beam frequencies. A periodic function is matched to the intensity data gathered from the set of interference patterns over a corresponding range of measuring beam frequencies. Localized correlations involving phase offsets between the interfering portions of the measuring beam are used to inform a determination of a rate of phase change with measuring beam frequency corresponding to the optical path length difference between the interfering beam portions.

    摘要翻译： 频移干涉仪收集来自在不同测量光束频率下产生的一组干涉图案的强度数据。 周期函数与测量光束频率的相应范围上从该组干涉图案收集的强度数据相匹配。 涉及测量光束的干涉部分之间的相位偏移的局部化相关被用于通过与干涉光束部分之间的光程长度差相对应的测量光束频率来确定相位变化率。

    Lightwave interferometric distance measuring method and apparatus
    40.
    发明公开
    Lightwave interferometric distance measuring method and apparatus 有权
    Verfahren und Vorrichtung zur Messung des Abstands mittels Lichtwelleninterferometrie

    公开(公告)号：EP2149779A1

    公开(公告)日：2010-02-03

    申请号：EP09166895.4

    申请日：2009-07-30

    申请人： Mitutoyo Corporation

    发明人： Kawasaki, Kazuhiko ,  Miyata, Kaoru

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02008 ,  G01B9/02005 ,  G01B9/02069 ,  G01B2290/60

    摘要： When the geometric distance L from the body of an interferometer to a target 110 is accurately measured from distance measurement values D 1 , D 2 which are obtained by a lightwave interferometric measurement using laser beams of plural wavelengths λ 1 , λ 2, while correcting the refractive index of air, the wavelengths of the laser beams are measured by using an optical comb generated from an optical comb generator 104. In this case, the oscillation wavelength of a variable wavelength laser 101 is measured by using the optical comb, and a feedback control is performed, whereby laser beams of plural predetermined wavelengths are obtained, or a variable wavelength laser is caused to oscillate at plural arbitrary wavelengths to obtain plural distance measurement values. The wavelengths (frequencies) of laser beams when the respective distance measurement values are obtained are measured by the optical comb, and used in calculation of the geometric distance. Plural lasers 416,417 are used, and the geometric distance is obtained while the wavelengths of laser beams oscillated from the lasers are measured by the optical comb.

    摘要翻译： 当从通过使用多个波长»1，»2的激光的光波干涉测量获得的距离测量值D 1，D 2精确地测量从干涉仪的主体到目标110的几何距离L时，同时校正 通过使用从光梳发生器104产生的光梳来测量激光束的波长。在这种情况下，通过使用光梳来测量可变波长激光器101的振荡波长，并且反馈 进行控制，由此获得多个预定波长的激光束，或者使可变波长激光器以多个任意波长振荡，以获得多个距离测量值。 获得各距离测量值时的激光束的波长（频率）通过光梳测量，并用于计算几何距离。 使用多个激光器416,417，并且通过光梳测量从激光器振荡的激光束的波长，获得几何距离。