公开(公告)号：EP1678480A2

公开(公告)日：2006-07-12

申请号：EP04795935.8

申请日：2004-10-20

Applicant: LAM RESEARCH CORPORATION

Inventor： MCMILLIN, Brian, K. ,  DASSAPA, Francois, Chandrasekar

IPC: G01N21/00

CPC classification number: G01N21/68 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/443 ,  H01J37/32963

Abstract: Broadly speaking, an invention is provided for monitoring a plasma optical emission. More specifically, the present invention provides a method for monitoring the plasma optical emission through a variable aperture to detect an endpoint of a plasma etching process without interferences that could lead to false endpoint calls. The method includes collecting optical emission data from a plasma through an aperture defined by moveable members. The moveable members are capable of varying a configuration of the aperture. The method also includes holding the moveable members at a particular time to cause the aperture to maintain a fixed configuration. The method further includes detecting a specific perturbation in the plasma optical emission while holding the moveable members.

Abstract translation: 广义地说，提供了一种用于监测等离子体光发射的发明。 更具体地说，本发明提供了一种用于通过可变孔径监测等离子体光发射的方法，以检测等离子体蚀刻过程的终点，而不会导致错误的终点调用的干扰。 该方法包括通过由可移动部件限定的孔从等离子体收集光学发射数据。 可移动构件能够改变孔的构造。 该方法还包括在特定时间保持可移动构件以使得孔保持固定构造。 该方法还包括在保持可移动构件的同时检测等离子体光发射中的特定扰动。

公开(公告)号：EP1568987A1

公开(公告)日：2005-08-31

申请号：EP05290302.8

申请日：2005-02-10

Applicant: ALCATEL

Inventor： Sogan, Gloria ,  Bounouar, Julien ,  Desbiolles, Jean-Pierre ,  Gaurand, Isabelle

IPC: G01N21/71 ,  H05H1/00 ,  G01N21/66 ,  G01J3/443

CPC classification number: G01J3/443 ,  G01N21/274 ,  G01N21/68 ,  G01N2201/121 ,  G01N2201/1218 ,  G01N2201/127

Abstract: L'invention propose un procédé et un dispositif de détection d'espèces gazeuses minoritaires dans un mélange par spectroscopie d'émission optique au moyen d'un spectromètre optique (8), dans lequel on utilise la radiation émise par un plasma (4) présent dans le mélange gazeux à analyser, et on retient, dans le spectre de cette radiation, les raies d'une espèce gazeuse majoritaire dont l'amplitude est sensible à la présence de l'espèce minoritaire, et on déduit de l'amplitude de cette ou de ces raies sensibles une information sur la concentration de l'espèce gazeuse minoritaire. Il est alors possible d'assurer une surveillance d'espèces gazeuses minoritaires en temps réel.

Abstract translation: 该方法涉及保留主要和容易激发的气体物质的特征线，例如 氮气，在等离子体发射的辐射的原始光谱中（4）。 主要物种的幅度对次要和难以兴奋的物种的存在敏感，例如 湿度。 关于小物种浓度的信息从线路的幅度中扣除。 还包括用于检测次要和难以激发的气态物质的装置的独立权利要求。

公开(公告)号：EP1400793A3

公开(公告)日：2005-03-02

申请号：EP03396085.7

申请日：2003-09-15

Applicant: Metorex International OY

Inventor： Eklin, Tero ,  Krapu, Mikko

IPC: G01J3/443

CPC classification number: G01N21/67 ,  G01J3/443

Abstract: A measurement device and method are provided for OES measurements in air. An arc electrode (201, 501) has a certain thickness and a pointed end having a certain grinding angle. Holding means (202, 502) hold the arc electrode (201, 501) at a certain distance from the material to be measured. A voltage and current supply (203) generates and maintains a voltage between the arc electrode and the material to be measured and supplies current through the arc. Focusing and detection optics (205, 206, 402, 403, 404, 405, 406, 407, 408, 505, 506, 509, 604) collect and detect optical radiation. The thickness of the arc electrode (201, 501) is between 3 and 10 mm and the grinding angle is between 50 and 130 degrees. The arc distance is between 0.5 and 3 mm. An ignition spark voltage is between 5 and 20 kV, an arc voltage between 20 and 160 V and an arc current between 1 and 10 A. The focusing and detection optics (205, 206, 402, 403, 404, 405, 406, 407, 408, 505, 506, 509, 604) collect and detect at least optical radiation on a wavelength of 193 nm.

公开(公告)号：EP0799408B1

公开(公告)日：2003-03-19

申请号：EP95941976.3

申请日：1995-12-19

Applicant: VARIAN AUSTRALIA PTY. LTD.

Inventor： GLIDDON, Craig, William

IPC: G01J3/02 ,  G01J3/00

CPC classification number: H01J49/067 ,  G01J3/443 ,  H01J49/105

Abstract: An inductively coupled plasma spectrometer including shielding/sampling means (1) located between a plasma torch (3) and an optical system (4) of the spectrometer, wherein said shielding/sampling (1) means is associated with an enclosure (9) for the plasma torch such that a relatively high independance path (10, 11) is established for limiting flow of electrical current between said shielding/sampling means (1) and said enclosure (9).

公开(公告)号：EP1036371A4

公开(公告)日：2003-01-08

申请号：EP98958648

申请日：1998-11-19

Applicant: UNIV WASHINGTON

Inventor： BASIJI DAVID A ,  VAN DER ENGH GERRIT J ,  ESPOSITO RICHARD J

IPC: G01N21/64 ,  G01J3/443 ,  G01J3/45 ,  G01N27/447 ,  G02B26/10 ,  G06K7/10 ,  G06T1/00 ,  H04N1/113 ,  G01B9/02 ,  G02B26/12 ,  G03C8/32

CPC classification number: G01J3/443 ,  G01J3/45 ,  G06K7/10801

Abstract: The present invention provides a scanning apparatus to obtain automated, rapid and sensitive scanning of substrate fluorescence, optical density or phosphorescence. The scanner uses a constant path length optical train, which enables the combination of a moving beam for high speed scanning with phase-sensitive detection for noise reduction. The constant path length optical train comprises a light source, a scanning mirror (40) to receive light from the light source and sweep it across a steering mirror (50), the steering mirror receives the light from the scanning mirror and reflect the light to a substrate wherein the substrate reflects the light to a photodetector (70).

Abstract translation: 提供扫描装置以获得对衬底荧光，光密度或磷光的自动，快速和灵敏的扫描。 扫描仪使用恒定路径长度的光学列车，其能够将用于高速扫描的移动光束与用于降噪的相敏检测组合，包括光源，用于接收来自光源的光并扫描其的扫描镜 导向镜，转向镜，用于接收来自扫描反射镜的光并将其反射到基板，从而沿着扫描弧扫过基板;以及光电检测器，用于接收来自基板的发射或散射的光，其中光路 在整个扫描过程中，从光源到光电检测器的长度基本恒定。 光学系统还可以包括波导或反射镜以收集来自衬底的发射或散射的光并将其引导到光电探测器。 对于相敏检测，光源进行强度调制，检测器与相敏检测电路连接。 还提供了使用基板转换器的扫描仪。 对于二维成像，衬底在一个维度上平移，而扫描镜在第二维度扫描光束。 对于高通量扫描仪，将堆叠的基板从托盘进料器装载到传送带上。

公开(公告)号：EP0614073A1

公开(公告)日：1994-09-07

申请号：EP94301200.5

申请日：1994-02-21

Applicant: THERMO JARRELL ASH CORPORATION

Inventor： Kunselman, Garry C. ,  Crawford, Richard L.

IPC: G01J3/36 ,  G01J3/20

CPC classification number: G21K1/10 ,  G01J3/20 ,  G01J3/2803 ,  G01J3/443 ,  G01N21/68 ,  G01N21/73

Abstract: The disclosure relates to a spectroanalytical system with radiation dispersing apparatus (10) for dispersing radiation into a spectrum for concurrent application to an array (38) of exit ports; sample excitation apparatus (32) for exciting sample material to be analyzed to spectroemissive levels for generating a beam of radiation for dispersion by the dispersing apparatus; the exit port array including a corresponding array of detectors (20A to H) including a first detector (20A, 20B, 20C, 20D) positioned adjacent a first exit port positioned to sense first order radiation from an element of interest and a second detector (20E, 20F, 20G, 20H) positioned adjacent a second exit port to sense second order radiation from the same element of interest; and processing apparatus (40) for responding to outputs of the first and second detectors to provide a compensated output as a function of the quantity of the element of interest in the sample material.

Abstract translation: 本公开涉及一种具有辐射分散装置（10）的分光系统，用于将辐射分散到用于同时应用于出口的阵列（38）的光谱中; 样品激发装置（32），用于激发待分析的样品材料的分光发射水平，以产生用于由分散装置分散的辐射束; 所述出口端口阵列包括相应的检测器阵列（20A至H），所述检测器（20A至H）包括位于邻近第一出口处的第一检测器（20A，20B，20C，20D），所述第一检测器定位成感测来自感兴趣元件的一级辐射和第二检测器 20E，20F，20G，20H），其位于第二出口附近，以感测来自相同感兴趣元件的二阶辐射; 和处理装置（40），用于响应于第一和第二检测器的输出，以提供作为样品材料中感兴趣元素的量的函数的补偿输出。

公开(公告)号：EP0362577A3

公开(公告)日：1991-03-20

申请号：EP89116842.9

申请日：1989-09-12

Applicant: Fried. Krupp AG Hoesch-Krupp

Inventor： Carlhoff, Christoph, Dr. Dipl.-Phys. ,  Lorenzen, Claus-Jürgen, Dr. Dipl.-Phys. ,  Nick, Klaus-Peter, Dr. Dipl.-Phys.

IPC: G01N21/71 ,  G01J3/02

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01N21/718 ,  G01N2021/695

Abstract: Es wird ein Verfahren zur Elementanalyse mit laserinduzierter Emmissionsspektralanalyse einer Metallschmelze an ihrer Oberfläche in einer Bohrung an einem Schmelzgefäß (1) angegeben. Die Bohrung ist mit einem Rohr (4) versehen, das außen mit einem Quarzfenster (6) verschlossen ist. Über einen seitlichen Stutzen (5) am Rohr strömt ein inertes Gas mit einer Temperatur von mehr als 300 °C in die Bohrung. Das Rohr (4) ist mit einem Gehäuse (7) verbunden, an das über einen Lichtwellenleiter (14) ein Spektrometer (15) gekoppelt ist. Das Laserlicht, eines im Gehäuse befindlichen Lasers (8) wird über justierbare Linsen (9) und Spiegel (10) auf die Metalloberfläche (12) fokussiert und erzeugt dort ein Plasma (11). Das von der Metalloberfläche emittierte Plasmalicht wird mit einem justierbaren Linsensystem (13a, 13b) in den Lichtwellenleiter (14) gekoppelt und zum Spektrometer (15) geleitet.

公开(公告)号：EP4427030A1

公开(公告)日：2024-09-11

申请号：EP21968342.2

申请日：2021-12-16

Applicant: Halliburton Energy Services, Inc.

Inventor： ROWE, Mathew Dennis

IPC: G01N21/67 ,  G01N21/25 ,  G01J3/443 ,  E21B47/12

CPC classification number: G01J3/0205 ,  G01J3/443 ,  G01J2003/28420130101 ,  G01J2003/283320130101 ,  E21B49/00 ,  E21B47/12 ,  E21B47/26

公开(公告)号：EP2381240B1

公开(公告)日：2018-09-05

申请号：EP09834584.6

申请日：2009-09-08

Applicant: Hamamatsu Photonics K.K.

Inventor： WATANABE Motoyuki ,  IGUCHI Kazuya ,  SUZUKI Kengo

IPC: G01N21/64 ,  G01J3/443 ,  G01J3/44 ,  G01J3/02

CPC classification number: G01N21/645 ,  G01J3/02 ,  G01J3/0262 ,  G01J3/0267 ,  G01J3/0291 ,  G01J3/4406 ,  G01J3/443 ,  G01N2201/0632 ,  G01N2201/065

Abstract: A spectroscopic measurement apparatus 1A comprises an integrating sphere 20 in which a sample S is located, a spectroscopic analyzer 30 dispersing the light to be measured from the sample S and obtaining a wavelength spectrum, and a data analyzer 50. The analyzer 50 includes an object range setting section which sets a first object range corresponding to excitation light and a second object range corresponding to light emission from the sample S in a wavelength spectrum, and a sample information analyzing section which determines a luminescence quantum yield of the sample S, determines a measurement value ¦ 0 of the luminescence quantum yield from results of a reference measurement and a sample measurement, and determines, by using factors ², ³ regarding stray light in the reference measurement, an analysis value ¦ of the luminescence quantum yield with the effect of stray light reduced by ¦ = ²¦ 0 +³. This realizes a spectroscopic measurement apparatus, a measurement method, and a measurement program which can reduce the effect of stray light generated in a spectrometer.

公开(公告)号：EP3363932A1

公开(公告)日：2018-08-22

申请号：EP18156876.7

申请日：2018-02-15

Applicant: ARKRAY, Inc.

Inventor： KASAI, Tokuo

IPC: C25B11/02 ,  C25B9/06 ,  G01N21/67 ,  G01N21/69

CPC classification number: C25B9/16 ,  C25B9/06 ,  C25B11/02 ,  C25B11/12 ,  G01J3/443 ,  G01N21/67 ,  G01N21/69

Abstract: An electrolysis device (1) comprising a cell (10) containing a solution (60), a pair of electrodes installed in the cell (10), and a voltage application device (50) connected to the pair of electrodes. One electrode of the pair of electrodes is a smaller electrode (20), and another electrode of the pair of electroeds is a larger electrode (30). An area of a liquid-contacting portion (21) of the smaller electrode (20) with the solution (60) is smaller than an area of a liquid-contacting portion of the larger electrode (30) with the solution (60). In a state in which the solution (60) is contained in the cell (10), only the solution (60) is present between the liquid-contacting portion (21) of the smaller electrode (20) and a liquid surface (61) of the solution (60) vertically above the liquid-contacting portion (21) of the smaller electrode (20).