Near planar native-oxid VCSEL device and arrays
    73.
    发明公开
    Near planar native-oxid VCSEL device and arrays 失效
    几乎是平的VCSEL具有天然氧化物和多个激光

    公开(公告)号:EP0898344A3

    公开(公告)日:2000-04-26

    申请号:EP98109847.8

    申请日:1998-05-29

    IPC分类号: H01S3/085 H01S3/25

    摘要: A VCSEL [100] with a near planar top surface on which the top electrode [111] is deposited. A VCSEL [100] according to the present invention includes a top electrode [111], a top mirror [115] having a top surface, a light generation region [120], and a bottom mirror [116] for reflecting light toward the top mirror [115]. At least one of the mirrors includes a plurality of planar electrically conducting layers having different indices of refraction. In addition, at least one of the layers includes an oxidizable material. To expose this layer to an oxidizing agent (thereby converting the material to an electrical insulator), three or more holes [112] are etched down from the top surface of the VCSEL [100] to the layer [118] containing the oxidizable material. The oxidizing agent is then introduced into the top of these holes. The partial oxidation of the layer converts the layer to one having a conducting region [121] surrounded by an electrically insulating region, the conducting region being positioned under the top electrode.