摘要:
This disclosure describes a method of forming a VCSEL with a structural birefringent cavity. This method comprises growing a bottom distributed Bragg reflector (DBR) and a first part of a cavity on a substrate to form a bottom structure comprising a plurality of layers. One or more anisotropic features are etched on a upper layer of the bottom structure to produce a patterned growth interface. A remaining part of the cavity and a top DBR on the patterned growth interface are overgrown to form an epitaxial structure. One or more oxide apertures are formed in the epitaxial structure.
摘要:
A surface emitting laser element includes a lower DBR formed on a substrate; an active layer formed above the lower DBR; an upper DBR formed on the active layer. The upper DBR includes a dielectric multilayer that is formed as a result of dielectrics having different refractive indexes being alternately laminated and formed, a light shielding part is formed above the upper DBR, and the light shielding part has an opening at a central area for emitting light.
摘要:
A surface emitting laser device includes a substrate (101), a lower reflector (102), an active layer (104), an upper reflector (106, 113), and surface emitting lasers (11-14) configured to emit light. A second phase adjustment layer (108), a contact layer (109), a first phase adjustment layer (111), and a wavelength adjustment layer (112) are successively layered from the active layer side. The total optical thickness from the active layer side of the second phase adjustment layer (108) to the midsection of the wavelength adjustment layer (112) is approximately (2N+1)×λ/4, where λ represents a wavelength of light, and N represents a positive integer. The optical thickness from the active layer side of the second phase adjustment layer (108) to a midsection of the contact layer (109) is approximately Nλ/2. At least two of the surface emitting lasers (11-14) have the wavelength adjustment layer (112) arranged at different thicknesses and are configured to emit light with different wavelengths.
摘要:
A surface emitting laser element includes a lower Bragg reflection mirror; an upper Bragg reflection mirror; and a resonator region formed between the lower Bragg reflection mirror and the upper Bragg reflection mirror, and including an active layer. A wavelength adjustment region is formed in the lower Bragg reflection mirror or the upper Bragg reflection mirror, and includes a second phase adjustment layer, a wavelength adjustment layer and a first phase adjustment layer, arranged in this order from a side where the resonator region is formed. An optical thickness of the wavelength adjustment region is approximately (2N+1)×λ/4, and the wavelength adjustment layer is formed at a position where an optical distance from an end of the wavelength adjustment region on the side of the resonator region is approximately M×λ/2, where λ is a wavelength of emitted light, M and N are positive integers, and M is N or less.
摘要:
Disclosed is a surface-emitting laser element including a semiconductor substrate and plural surface-emitting lasers configured to emit light mutually different wavelengths, each surface-emitting laser including a lower Bragg reflector provided on the semiconductor substrate, a resonator provided on the lower Bragg reflector, an upper Bragg reflector provided on the resonator, and a wavelength adjustment layer provided in the upper Bragg reflector or lower Bragg reflector, the wavelength adjustment layers included in the surface-emitting lasers having mutually different thicknesses, at least one of the wavelength adjustment layers including adjustment layers made of two kinds of materials, and numbers of the adjustment layers included in the wavelength adjustment layers being mutually different.
摘要:
A surface emitting laser according to the present invention includes a lower reflector (101), a first spacer layer (102), an active layer (103), a second spacer layer (104) composed of a semiconductor material, a gap section (110) formed of at least one of vacuum and gas, and an upper reflector (105) in the written order, and also includes a control mechanism that changes a distance (α) between an interface between the second spacer layer and the gap section and an interface between the upper reflector and the gap section. An optical path length n eff ×d extending from an interface (A) between the lower reflector and the first spacer layer to an interface (B) between the second spacer layer and the gap section satisfies a predetermined relationship.
摘要:
Vertical-cavity surface-emitting lasers ("VCSELs") and VCSEL arrays are disclosed. In one aspect, a surface-emitting laser includes a grating layer having to form a resonant cavity with a reflective layer for a wavelength of light to be emitted from a light-emitting layer and an aperture layer disposed within the resonant cavity. The VCSEL includes a charge carrier transport layer disposed between the grating layer and the light-emitting layer. The transport layer has a gap adjacent to the sub-wavelength grating and a spacer region between the gap and the light-emitting layer. The spacer region and gap are dimensioned to be substantially transparent to the wavelength. The aperture layer directs charge carriers to enter a region of the light-emitting layer adjacent to an aperture in the aperture layer and the aperture confines optical modes to be emitted from the light-emitting layer.
摘要:
A semiconductor surface emitting laser (SEL) includes an active zone comprising quantum well structures separated by spacer layers. The quantum well structures are configured to provide optical gain for the SEL at a lasing wavelength, λ lase . Each quantum well structure and an adjacent spacer layer are configured to form an optical pair of a distributed Bragg reflector (DBR). The active zone including a plurality of the DBR optical pairs is configured to provide optical feedback for the SEL at λ lase .