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134 条记录 (耗时 0.024 秒)

    Complementary mis device
    82.
    发明公开
    Complementary mis device 有权
    补充错误的设备

    公开(公告)号：EP1848039A3

    公开(公告)日：2007-11-07

    申请号：EP07015129.5

    申请日：2002-12-10

    申请人： Ohmi, Tadahiro ,  TOKYO ELECTRON LIMITED

    发明人： Ohmi, Tadahiro ,  Koji, Kotani ,  Shigetoshi, Sugawa

    IPC分类号： H01L27/092

    CPC分类号： H01L29/045 ,  H01L21/823807 ,  H01L21/823821 ,  H01L27/092 ,  H01L27/0922 ,  H01L29/66795 ,  H01L29/7851

    摘要： A complementary MIS device includes a semiconductor substrate; an n-channel MIS transistor comprising: a first gate electrode formed on a principal surface of said semiconductor substrate via a first gate insulation film with a first crystal orientation; and first and second n-type diffusion regions formed in said semiconductor substrate at a first side and an opposite side of said first gate electrode; and a p-channel MIS transistor comprising: a second gate electrode formed on said semiconductor substrate via a second gate insulation film with a second crystal orientation; and first and second p-type diffusion regions formed in said semiconductor substrate at a first side and an opposite side of said second gate electrode, said first gate electrode and said second gate electrode being commonly connected, said second p-type diffusion region and said first n-type diffusion region being commonly connected, said first crystal orientation and said second crystal orientation being set such that a current drivability of said p-channel MIS transistor balances a current drivability of said n-channel MIS transistor.

    摘要翻译： 互补MIS器件包括半导体衬底; n沟道MIS晶体管，其包括：第一栅电极，其经由具有第一晶体取向的第一栅绝缘膜形成在所述半导体衬底的主表面上; 以及在所述第一栅电极的第一侧和相对侧形成在所述半导体衬底中的第一和第二n型扩散区; 以及p沟道MIS晶体管，包括：第二栅电极，经由具有第二晶体取向的第二栅绝缘膜形成在所述半导体衬底上; 以及在所述第二栅电极的第一侧和相对侧形成在所述半导体衬底中的第一和第二p型扩散区，所述第一栅电极和所述第二栅电极共同连接，所述第二p型扩散区和所述 第一n型扩散区共同连接，所述第一晶体取向和所述第二晶体取向被设定为使得所述p沟道MIS晶体管的电流驱动能力平衡所述n沟道MIS晶体管的电流驱动能力。

    Complementary mis device
    83.
    发明公开
    Complementary mis device 有权
    KomplementäreMIS-Vorrichtung

    公开(公告)号：EP1848039A2

    公开(公告)日：2007-10-24

    申请号：EP07015129.5

    申请日：2002-12-10

    申请人： Ohmi, Tadahiro ,  TOKYO ELECTRON LIMITED

    发明人： Ohmi, Tadahiro ,  Koji, Kotani ,  Shigetoshi, Sugawa

    IPC分类号： H01L27/092

    CPC分类号： H01L29/045 ,  H01L21/823807 ,  H01L21/823821 ,  H01L27/092 ,  H01L27/0922 ,  H01L29/66795 ,  H01L29/7851

    摘要： A complementary MIS device includes a semiconductor substrate; an n-channel MIS transistor comprising: a first gate electrode formed on a principal surface of said semiconductor substrate via a first gate insulation film with a first crystal orientation; and first and second n-type diffusion regions formed in said semiconductor substrate at a first side and an opposite side of said first gate electrode; and a p-channel MIS transistor comprising: a second gate electrode formed on said semiconductor substrate via a second gate insulation film with a second crystal orientation; and first and second p-type diffusion regions formed in said semiconductor substrate at a first side and an opposite side of said second gate electrode, said first gate electrode and said second gate electrode being commonly connected, said second p-type diffusion region and said first n-type diffusion region being commonly connected, said first crystal orientation and said second crystal orientation being set such that a current drivability of said p-channel MIS transistor balances a current drivability of said n-channel MIS transistor.

    摘要翻译： 互补MIS器件包括半导体衬底; n沟道MIS晶体管，包括：第一栅电极，其经由具有第一晶体取向的第一栅极绝缘膜形成在所述半导体衬底的主表面上; 以及在所述第一栅电极的第一侧和相对侧的所述半导体衬底中形成的第一和第二n型扩散区; 以及p沟道MIS晶体管，包括：通过具有第二晶体取向的第二栅极绝缘膜形成在所述半导体衬底上的第二栅电极; 以及形成在所述半导体衬底中的所述第二栅电极的第一侧和相对侧的第一和第二p型扩散区，所述第一栅电极和所述第二栅极共同连接，所述第二p型扩散区和所述 第一n型扩散区域共同连接，所述第一晶体取向和所述第二晶体取向被设置为使得所述p沟道MIS晶体管的电流驱动能力平衡所述n沟道MIS晶体管的电流驱动能力。

    Fluid control valve and fluid supply/exhaust system
    84.
    发明公开
    Fluid control valve and fluid supply/exhaust system 失效
    Steuerventil undFlüssigkeitszuführungs-/ Entleerungs-系统

    公开(公告)号：EP1666780A1

    公开(公告)日：2006-06-07

    申请号：EP06005025.9

    申请日：1997-12-01

    申请人： FUJIKIN Inc. ,  Tohoku Steel Co., Ltd ,  OHMI, Tadahiro ,  TAKAHASHI, Migaku

    发明人： Ohmi, Tadahiro ,  Takahashi, Migaku ,  Yamaji, Michio ,  Tanigawa, Takeshi ,  Ikeda, Nobukazu ,  Doi, Ryosuke ,  Nishino, Koji ,  Yasumoto, Naofumi ,  Fukuda, Hiroyuki ,  Uno, Tomio ,  Yanai, Yasuyuki

    IPC分类号： F16K31/06

    CPC分类号： F16K31/082 ,  F16K7/14 ,  F16K31/0655 ,  F16K31/0672 ,  Y10T137/8242

    摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein:

    said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft,
    said member a comprises a magnetic material, and

    a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

    摘要翻译： 本发明涉及一种流体控制阀，其通过使用驱动单元来打开和关闭阀座和阀座之间的部分来控制流过阀体的流体，其中：所述驱动单元包括用于施加的杆形轴 通过所述阀座和阀杆的压力，以及围绕所述杆形轴固定的构件a，所述构件a包括磁性材料，以及线圈，其在其与轴之间具有空间并且设置在平行于所述杆状轴的位置处 轴通过电磁感应使所述构件向上和向下移动，并且使用弹簧的力，所述阀座和所述阀保持器之间的部分也被打开和关闭，并且在提供给所述线圈的励磁电流被切断之后 在短时间内经过一段短暂的时间后，一个令人兴奋的电流被补充到所述线圈上。

    MASK MAKING METHOD, MASK MAKING DEVICE, AND MASK DRAWING DEVICE
    86.
    发明公开
    MASK MAKING METHOD, MASK MAKING DEVICE, AND MASK DRAWING DEVICE 审中-公开
    方法和装置口罩蒙版绘制生产和考虑器件

    公开(公告)号：EP1602974A1

    公开(公告)日：2005-12-07

    申请号：EP04705928.2

    申请日：2004-01-28

    申请人： Ball Semiconductor Inc. ,  OHMI, Tadahiro

    发明人： Ohmi, Tadahiro ,  Sugawa, Shigetoshi ,  Takehisa, Kiwamu

    IPC分类号： G03F1/08 ,  G03F7/20 ,  H01L21/027

    CPC分类号： G03F7/70283 ,  G03F7/70291

    摘要： Laser light in a pattern reflected by a two-dimensional array micromirror 106 that is controlled on the basis of mask data of a mask pattern data output device 107 forms an enlarged pattern 110. This enlarged pattern is projected in a reduced manner onto a mask substrate 109 through a reduction-projection optical system 102, thereby forming a lithography pattern 111. Since a large number of patterns are written in an instant by the two-dimensional array micromirror 106, a time required for lithography the entire mask pattern is extremely shortened as compared with a conventional one. As a result, the mask cost can be largely reduced.

    摘要翻译： 在由二维阵列微镜106反射的图案的激光也被掩模图案数据输出装置107种形式的放大图案110的该放大的图案以缩小的方式投射的掩模数据的基础上，到掩模衬底控制 109通过一个缩小投影光学系统102，由此形成光刻图案111由于大量的模式由二维阵列微镜106写入到瞬间，光刻所需要的时间将整个掩模图案被大大地缩短为 与以往相比。 其结果，掩模成本能够大大降低。

    Method of fixing a plurality of lower members each having a reference bore for installing an upper member, and fixing jigs
    89.
    发明公开
    Method of fixing a plurality of lower members each having a reference bore for installing an upper member, and fixing jigs 审中-公开
    一种用于安装多个下部元件，每个具有用于安装一个上部元件和附接装置的一个基准孔方法

    公开(公告)号：EP1384925A3

    公开(公告)日：2004-02-18

    申请号：EP03024656.5

    申请日：1998-10-13

    申请人： Ohmi, Tadahiro ,  FUJIKIN INCORPORATED

    发明人： Ohmi, Tadahiro ,  Yamaji, Michio ,  Shinohara, Tsutomu

    IPC分类号： H01L21/00

    CPC分类号： F16K27/003 ,  Y10T29/49895 ,  Y10T29/49899 ,  Y10T29/49902 ,  Y10T29/53913 ,  Y10T29/53978

    摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.

    Method of fixing a plurality of lower members each having a reference bore for installing an upper member, and fixing jigs
    90.
    发明公开
    Method of fixing a plurality of lower members each having a reference bore for installing an upper member, and fixing jigs 审中-公开
    一种用于安装多个下部元件，每个具有用于安装一个上部元件和附接装置的一个基准孔方法

    公开(公告)号：EP1384925A2

    公开(公告)日：2004-01-28

    申请号：EP03024656.5

    申请日：1998-10-13

    申请人： Ohmi, Tadahiro ,  FUJIKIN INCORPORATED

    发明人： Ohmi, Tadahiro ,  Yamaji, Michio ,  Shinohara, Tsutomu

    IPC分类号： F16K27/00 ,  H01L21/00

    CPC分类号： F16K27/003 ,  Y10T29/49895 ,  Y10T29/49899 ,  Y10T29/49902 ,  Y10T29/53913 ,  Y10T29/53978

    摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.

    摘要翻译： 第一和第二两个限位夹具81被用于各具有长方体体81A与并排在等于106首先，82突起参考孔之间具有预定间隔的间距排列侧突起82形成在其底表面上 第一夹具81被装配在前面参考孔respectivement下部构件31，32，33的106，并且突出在后方参照第二夹具82的孔82的下构件106。 直角保持夹具84为矩形框架的形式，并且具有内侧面定位的分别与所述第一夹具81的前侧面相接触，该第二夹具81的后侧面和左右侧面 的两个夹具81被嵌合在两个夹具81的本体81a至腔106的配置调整为直角。 下部构件通过收紧螺丝部件110 固定到在该状态下的支撑部件