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公开(公告)号：EP0508748A3
公开(公告)日：1993-02-03
申请号：EP92303111.6
申请日：1992-04-08
申请人： EATON CORPORATION
发明人： Bellamy, Brad Lee
IPC分类号： H01L21/00
CPC分类号： H01L21/68 , H01L21/67796
摘要： A system for positioning a wafer (12) at a station within a wafer processing system such that the center of mass of the wafer coincides with the center of the rotatable chuck (22) at the station. A signal representative of the position of the wafer with respect to the rotatable chuck is produced by a sensor (54) and is utilized to determine a vector which defines distance and direction of the centering error between the center of rotation of the chuck and the center of mass of the wafer. The chuck and wafer are rotationally indexed through an angle to align the foregoing vector with a line which approximates the arcuate path traversed by the center of mass of the wafer when it is subsequently conveyed within the system. A transfer arm (44) is utilized to convey the wafer through the foregoing arcuate path with respect to the chuck so that the center of mass of the wafer coincides with the center of rotation of the chuck when the wafer is subsequently placed on same.
摘要翻译： 一种用于在晶片处理系统内的站处定位晶片（12）的系统，使得晶片的质心与工位的可旋转卡盘（22）的中心重合。 表示晶片相对于可旋转卡盘的位置的信号由传感器（54）产生，并且用于确定限定卡盘的旋转中心与中心的定心误差的距离和方向的矢量 的晶片质量。 卡盘和晶片被旋转成一定角度，以将前述矢量与接近在晶片质量随之在系统内传送的晶圆通过的弧形路径相对准。 转移臂（44）用于通过相对于卡盘的上述弧形路径传送晶片，使得当晶片随后放置在其上时，晶片的质心与卡盘的旋转中心重合。
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公开(公告)号：EP0516405A1
公开(公告)日：1992-12-02
申请号：EP92304824.3
申请日：1992-05-28
申请人： EATON CORPORATION
CPC分类号： H01L21/6715 , H01L21/67023
摘要： A drive mechanism (10) which permits both rotational and vertical translation of a fluid dispense arm (160) within a wafer processing system. A motor (14) drives a brake/clutch coupling (16) which, through selective actuation and the utilization of two drive gears, causes selective rotation and/or translation of an output shaft (18) attached to the fluid dispense arm. Selective rotation and/or translation of the output shaft and the fluid dispense arm permits the use of the apparatus without modification of the spin deflector (114) and associated baffling (112) in the wafer processing area.
摘要翻译： 驱动机构（10），其允许流体分配臂（160）在晶片处理系统内的旋转和垂直平移。 马达（14）驱动制动/离合器联轴器（16），其通过选择性致动和利用两个驱动齿轮引起连接到流体分配臂的输出轴（18）的选择性旋转和/或平移。 输出轴和流体分配臂的选择性旋转和/或平移允许使用该装置而不改变晶片处理区域中的旋转偏转器（114）和相关的挡板（112）。
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公开(公告)号：EP0404569A3
公开(公告)日：1992-04-01
申请号：EP90306793.2
申请日：1990-06-21
申请人： EATON CORPORATION , Savage, Howard T. , Wun- Fogle, Marilyn , Clark, Arthur E. , Kabacoff, Lawrence T., , INSTITUTO DE MAGNETISMO APLICADO DE LA UNIVERSIDAD COMPLUTENSE DE MADRID
发明人： Savage, Howard T. , Clark, Arthur E. , Wun-Fogle, Marilyn , Kabacoff, Lawrence T. , Hernando, Antonio Instituto de Magnetismo Aplicado , Beihoff, Bruce
IPC分类号： G01L3/10
CPC分类号： G01L3/102 , G01L3/105 , Y10T29/4902 , Y10T29/49071 , Y10T29/49075
摘要： Magnetostrictive wire having a low suface-to-volume ratio established by a constant non-planar cross-section, is helically deformed into contact with a shaft under a stress maintaining the wire in fixed relation to the shaft surface. Magnetic anisotropy is imparted to the wire by twist thereof about its cross-sectional axis while the wire is being helically deformed into contact with the shaft surface to form a torque sensor through which accurate torque detection is achieved.
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公开(公告)号：EP0428319A3
公开(公告)日：1991-11-13
申请号：EP90312164.8
申请日：1990-11-07
申请人： EATON CORPORATION
IPC分类号： H01J37/08 , H01J37/317
CPC分类号： H01J37/08 , H01J27/20 , H01J37/3171
摘要： An ion source (10) for creating an ion beam. The source includes an ionization chamber (16) having one wall that defines a generally elliptical opening (50) for allowing ions to exit the ionization chamber. Use of an elliptical (in section) ion beam has advantages over a rectangular ion beam which allow the integrity of a relatively high current ion beam to be maintained as ions travel to a beam treatment workstation. A dual configuration extraction electrode assembly (20) also provies for a range of extraction energies from a single source.
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公开(公告)号：EP0340023A3
公开(公告)日：1991-04-17
申请号：EP89304276.2
申请日：1989-04-28
申请人： MARS INCORPORATED
摘要： Jam reducing apparatus for use in coin operated machines, such as telephones, acts to prevent the insertion of coins when the entryway is obstructed by foreign matter, assists in dislodging jammed coins and discourages vandals. The apparatus comprises a coin entryway which includes an inclined surface as part of a flared end of a lid. An entry slot in an entrance blocker, which is an integral part of the lid, is in substantial alignment with the coin insert slot of the front panel of the machine in normal operation. The lid is connected to a torsion spring and is associated with a coin reject lever. The inclined surface of the entryway lies opposite the blocker slot and is angled toward an exit of the coin entryway, which directs a coin into the machine. In normal use, inserted coins pass through the entryway and are directed into a coin mechanism for coin testing. Foreign matter inserted into the machine hits the inclined surface and exerts a camming force on the lid, rotating the lid about a torsion spring. This moves the coin entry slot and the blocker slot out of substantial alignment, preventing the insertion of additional foreign matter or another coin. Removal of the foreign matter allows the lid to return to its normal operating position under the force of the spring.
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公开(公告)号：EP0339952A3
公开(公告)日：1991-04-03
申请号：EP89304133.5
申请日：1989-04-26
IPC分类号： B27N3/20
CPC分类号： B27N3/086
摘要： The subject invention relates to a novel press apparatus and method for steam pressing a mat (8) of compressible material and an uncured thermosetting binder into a formed product and has particular application to the steam pressing of lignocellulosic material and a binder to form composite board. The novelty resides in making provision for projection means (10) generally configured to the outline of the end product to be produced and which is carried by a press platen, preferably the upper press platen (1), and which is intended to impinge into the mat during its compression and to effect a steam pressure seal at the impingement area of the mat. As a pressure seal of the compressed mat is created about the mat edges, steam can then be built up in the mat in order to cure the binder. If desired, cool air can be passed through the mat after steaming to condense residual steam in the mat. The compressed mat after steaming, can also be subject to vacuum prior to releasing it from the press. The edges of the cured mat which have been subject to impingement, can subsequently be trimmed off.
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公开(公告)号：EP0416788A1
公开(公告)日：1991-03-13
申请号：EP90309305.2
申请日：1990-08-24
申请人： EATON CORPORATION
CPC分类号： F16K31/42 , B60C23/001 , B60C23/003 , F16K31/1221
摘要： A solenoid (30) controlled, pilot air actuated valve assembly (10) includes a poppet valve cartridge (20) which is either of the normally open type or normally closed type by reversing assembly of identical component parts.
摘要翻译： 螺线管（30）控制的先导空气致动阀组件（10）包括通过相同部件的反向组装的常开型或常闭型的提升阀阀芯（20）。
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公开(公告)号：EP0367488A3
公开(公告)日：1991-02-06
申请号：EP89311020.5
申请日：1989-10-25
申请人： EATON CORPORATION
CPC分类号： H01L21/68721 , C23C14/50 , C23C14/566 , C23C14/568 , H01L21/68707
摘要： A platen assembly (66) for holding a semiconductor wafer (30) for vacuum processing. The platen is a substantially solid, circular plate (194) which is surrounded by a movable clamp assembly (192) in the form of a ring having formed thereon a first set of projections (257, 258) for initially receiving a wafer above the plate, and a second set of projections (256) spaced axially from the first set for clamping the wafer to the plate. The ring is formed of two parts (251, 252) spaced apart axially and connected by spring members (254). A slot (255) is formed in the ring to permit the entry of wafers between the sets of projections. The clamp assembly is moved between a wafer receiving position and a clamping position by an annular fluid cylinder (228) and piston (232) assembly. The fluid cylinder and piston assembly includes bellows seals acting between the cylinder and piston rods (238) to maintain the vacuum integrity of the system.
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公开(公告)号：EP0378435A1
公开(公告)日：1990-07-18
申请号：EP90300364.8
申请日：1990-01-12
发明人： Oakley, John Richard
IPC分类号： B65B7/26
CPC分类号： B65B7/26
摘要： A tray-like carton for a food product has a hinged lid held closed by attachment to outturned flange panels carried by the carton side wall. The attachment is effected by means of a fusible polymeric protective coating on the inside surface of the carton. The carton is closed and sealed whilst passing along a conveyor with the lid disposed on one side of the carton path. The lid is ploughed back, after which the leading flange panel of the carton is folded forward under a static hold-down plate, the hold-down plate subsequently serving to fold back and hold the trailing flange panel.
The fold-down plate also serves to fold out the third flange panel by means of a camming member on its undersurface.
After the three flange panels (22) have been turned out the lid (12) is ploughed closed and into engagement with them. Heat sealing of the overlapping surfaces is then effected by heat and pressure, firstly for the third flange panel and then, after the carton has been turned through 90°, for the leading and trailing flange panels simultaneously.摘要翻译： 用于食品的盘状纸盒具有通过附接到由纸箱侧壁承载的翻转的法兰面板而保持关闭的铰接盖。 附件通过在纸箱内表面上的易熔聚合物保护涂层进行。 纸箱被封闭并密封，同时沿着输送机通过，盖子设置在纸箱路径的一侧。 将盖子倒回，然后将纸箱的前缘法兰面板向下折叠在静态压板下方，压紧板随后用于折回并保持后缘板。 折叠板还用于通过其下表面上的凸轮构件折叠第三法兰盘。 在三个法兰盘（22）已经出来之后，盖（12）被犁地关闭并与它们接合。 然后通过热和压力来实现重叠表面的热封，首先对于第三凸缘板，然后在纸箱已经转过90度之后，对于前法兰面板和后法兰面板同时进行。
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公开(公告)号：EP0344003A3
公开(公告)日：1990-06-20
申请号：EP89305336.3
申请日：1989-05-25
申请人： EATON CORPORATION
发明人： Beverly, James Alden
IPC分类号： B60C23/00
CPC分类号： B60C23/003
摘要： A diagnostic method for sensing and reacting to conditions indicative of leakage of an inflatable tire (12/14), the pressurization of which tire is measured and controlled by an on-board CTIS (10), said CTIS automatically measuring inflation pressurization of said tire at predetermined extended time intervals and, in the absence a sensed system fault condition or pressure modification commands, assuming a steady-state condition during each of said extended intervals between automatic pressure measurements, said method characterized by:
At the completion of each automatic pressure measurement operation and pressure adjustment operation, after desired tire pressurization is sensed, assuming steady-state conditions for a relatively short period of time, then performing a confirming pressure measurement to sense change in tire pressurement during said short period of time, and;
if the sensed change in tire pressurization is less than a referenced value, allowing said CTIS to assume steady-state conditions until expiration of said extended time interval; and
if the sensed change in tire pressurization is equal to or greater than said referenced value, causing said CTIS to pressurize the tire to desired pressurization and to perform continuing automatic tire pressurization measurements after shortened time intervals of steady-state condition.
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