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公开(公告)号：EP3358598A1
公开(公告)日：2018-08-08
申请号：EP18151066.0
申请日：2018-01-10
申请人： FEI Company
发明人： Schwind, Mr Gregory , Botman, Mr. Aurélien , Kellogg, Mr. Sean , Van Kouwen, Leon , Mele, Mr. Luigi
CPC分类号： H01J27/20 , H01J27/205 , H01J37/08 , H01J37/26 , H01J2237/006 , H01J2237/061 , H01J2237/082
摘要： A collision ionization source is disclosed herein. An example source includes an ionization region arranged to receive a gas and a charged particle beam, the charged particle beam to ionize at least some of the gas, and a supply duct arranged to provide the gas to the ionization region, the supply duct having a non-uniform height decreasing from an input orifice to an output orifice, the output orifice arranged adjacent to the ionization region.
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公开(公告)号：EP1829436A4
公开(公告)日：2010-11-24
申请号：EP05808221
申请日：2005-11-21
发明人： KOLODNEY ELI , BEKKERMAN ANATOLY , TSIPINYUK BORIS
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公开(公告)号：EP0056899A1
公开(公告)日：1982-08-04
申请号：EP81305685.0
申请日：1981-12-02
发明人： Pashley, Neil Arthur
CPC分类号： H01J27/20 , H01J2237/0802 , H01J2237/0807
摘要： A gas ion source in which a high density electric field is established between a first electrode in the form of a hollow needle 5 through which gas to be ionised may pass and a second extractor electrode 9 which has a through-aperture 10 through which the ions flow on their way to a target (not shown).
摘要翻译： 一种气体离子源，其中在要被电离的气体可以通过的空心针5形式的第一电极和具有通孔10的第二提取电极9之间建立高密度电场，通过该离子源离子 流向目标（未显示）。
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公开(公告)号：EP1829436B1
公开(公告)日：2016-03-23
申请号：EP05808221.5
申请日：2005-11-21
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公开(公告)号：EP1255277B1
公开(公告)日：2007-09-12
申请号：EP01650051.4
申请日：2001-05-01
申请人： TEL Epion Inc.
发明人： Dykstra, Jerald P.
CPC分类号： H01J37/08 , H01J27/026 , H01J27/20 , H01J2237/0048 , H01J2237/0812
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6.发明授权Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter 失效过程用于与这样的能量过滤器过滤电气带电粒子，能量过滤器和分析器
公开(公告)号：EP0545064B1
公开(公告)日：2001-08-08
申请号：EP92118282.0
申请日：1992-10-26
CPC分类号： H01J49/484 , H01J27/20 , H01J49/14 , H01J49/482
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公开(公告)号：EP0428319B1
公开(公告)日：1995-03-22
申请号：EP90312164.8
申请日：1990-11-07
申请人： EATON CORPORATION
IPC分类号： H01J37/08 , H01J37/317
CPC分类号： H01J37/08 , H01J27/20 , H01J37/3171
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公开(公告)号：EP0021204A1
公开(公告)日：1981-01-07
申请号：EP80103172.5
申请日：1980-06-09
发明人： Chandrashekhar, G.V. , Gambino, Richard Joseph , Chaudhari, Praveen , Harper, James McKeel Edwin , Cuomo, Jerome John
摘要： Ein lonengenerator in einer Vakuumkammer erzeugt einen lonenstrom hoher Stromdichte. In einem Vorratsraum befindet sich flüssiges oder gasförmiges ionisierbares Material. Eine begrenzende Wand besteht aus einem lonenleiter, in dem mittels einer Spannungsdifferenz ein elektrisches Feld erzeugt wird, das die Diffusion von Ionen quer durch den lonenleiter erzwingt und den lonenstrom in Richtung auf das Target beschleunigt.
摘要翻译： 在真空室中的离子发生器产生的高电流密度的离子电流。 在储是液态或气态电离材料。 一个限制壁由其中通过迫使穿过离子导体的离子的扩散，并加速的方向至目标的离子电流的电压差产生的电场的离子导体构成。
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公开(公告)号：EP1829436A2
公开(公告)日：2007-09-05
申请号：EP05808221.5
申请日：2005-11-21
摘要： An apparatus for the generation of anionic and neutral particulate beams is described. The apparatus comprises a duct defined by walls having an inner surface capable of sustaining a temperature above an electron emission temperature of the surface, so as to negatively charge electrically neutral particles being passed through the duct when the surface is heated to the temperature; a heating element for heating the inner surface to the temperature; and an acceleration electrode for ion-optically controlling and manipulating the negatively charged particles into the anion beam. The apparatus may further comprise a protection electrode defining a protected region, which substantially prevent emitted electrons from escaping the protected region. Moreover, a system for analyzing substances ejected from a surface of a sample bombarded with an anion beam generated by the apparatus is described. The system further comprises a detector for detecting the substances once ejected of the surface. Further, a method of generating an anion beam is described.
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