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公开(公告)号：EP0970387B1
公开(公告)日：2006-05-10
申请号：EP99901136.4
申请日：1999-01-22
IPC分类号： G01R27/26
CPC分类号： G01R27/2605
摘要： A static capacitance-to-voltage converter is capable of converting a static capacitance into a voltage without suffering from a stray capacitance formed between a signal and a shielding line or a stray capacitance formed between an exposed portion of the signal line and its surroundings. The static capacitance-to-voltage converter is formed of an operational amplifier placed in an imaginary short-circuit state between an inverting input and a non-inverting input thereof; a signal line having one end connected to the inverting input and the other end capable of being connected to a static capacitance; a shielding line surrounding the signal line and connected to the non-inverting input; an alternate current signal generator for applying the non-inverting input with an alternate current signal; and zero adjusters for adjusting the output of the static capacitance-to-voltage converter to minimum when no static capacitance is connected to the signal line.
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公开(公告)号：EP0970386B8
公开(公告)日：2006-06-21
申请号：EP99900308.0
申请日：1999-01-14
IPC分类号： G01R27/26
CPC分类号： G01R27/2605
摘要： An impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting of a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.
摘要翻译： 描述了用于将目标的阻抗转换为电压的阻抗 - 电压转换器，其包括运算放大器（OP），由信号线和屏蔽元件组成的同轴电缆以及AC信号发生器。 反馈阻抗电路连接在OP的输出端和反相端之间，并且其中非反相端和反相端是成像短路条件。 信号线的一端连接到OP的反相输入端子，另一端连接到目标的一个电极，交流信号发生器连接到OP的同相输入端子。 屏蔽元件包括围绕信号线的至少一个屏蔽层并且连接到OP的非反相输入端子，因此信号线和屏蔽层由于输入端子的成像不足而具有相同的电压 的OP，从而减少信号线上的噪声。
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公开(公告)号：EP0970386B1
公开(公告)日：2006-05-03
申请号：EP99900308.0
申请日：1999-01-14
IPC分类号： G01R27/26
CPC分类号： G01R27/2605
摘要： An impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting of a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.
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公开(公告)号：EP0975982B1
公开(公告)日：2007-04-11
申请号：EP99905244.2
申请日：1999-02-19
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： An apparatus for detecting an impedance variable in response to a sensed physical amount of a sensor is provided which comprises an impedance-frequency conversion unit and a counter. The impedance-frequency conversion unit converts the sensor impedance to an oscillation signal a frequency of which corresponds to the sensor impedance. The impedance-frequency conversion unit comprises an impedance-voltage converter for providing a voltage corresponding to the sensor impedance, and a Wien bridge oscillator including an element an impedance of which varies in response to the voltage from the impedance-voltage converter, for generating the oscillation signal. The Wien bridge oscillator is capable of generating a square wave signal as the oscillation signal. The counter counts the number of waves (or wave number) of the oscillation signal in a predetermined time period to output a count value which can be handled as a digital signal.
摘要翻译： 提供了一种用于检测响应于感测的传感器的物理量的阻抗变量的设备，其包括阻抗 - 频率转换单元和计数器。 阻抗频率转换单元将传感器阻抗转换为频率对应于传感器阻抗的振荡信号。 阻抗频率转换单元包括用于提供与传感器阻抗对应的电压的阻抗电压转换器和包括阻抗响应于来自阻抗电压转换器的电压而改变的元件的维恩桥式振荡器， 振荡信号。 维恩桥式振荡器能够产生方波信号作为振荡信号。 该计数器在预定时间周期内对振荡信号的波形（或波数）进行计数，以输出可作为数字信号处理的计数值。
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5.发明公开
公开(公告)号：EP2048497A1
公开(公告)日：2009-04-15
申请号：EP07792504.8
申请日：2007-08-14
申请人： Tokyo Electron Limited , Octec Inc.
CPC分类号： G01N30/6095 , G01N30/52 , G01N2030/525
摘要： A high separation efficiency column 10 for chromatography and a manufacturing method thereof are provided. The column 10 for chromatography includes a first substrate 11 having a plurality of pillars 22 formed on one surface thereof and a second substrate 12 bonded to the one surface of the first substrate 11 and constituting a flow path 13 together with the plurality of pillars 22 formed on the first substrate. At least a surface of each pillar is formed in a porous shape.
摘要翻译： 提供了用于色谱法的高分离效率柱10及其制造方法。 用于层析的柱10包括：第一基板11，其具有在其一个表面上形成的多个柱22;以及第二基板12，其与第一基板11的一个表面接合并与形成的多个柱22一起构成流路13 在第一衬底上。 每个柱的至少一个表面形成为多孔形状。
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公开(公告)号：EP0975983B1
公开(公告)日：2008-05-07
申请号：EP99905245.9
申请日：1999-02-19
发明人： MATSUMOTO, Toshiyuki , HIROTA, Yoshihiro , HARADA, Muneo , MIYANO, Takaya, Hirosaki University Shokuin Shukusha 32-4-56
IPC分类号： G01R27/26
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： A detection circuit which is capable of outputting a voltage proportional to a static capacitance of a sensor is provided, which comprises a voltage input terminal connected to receive an input voltage and an operational amplifier. The input voltage received at the voltage input terminal is changed between two different reference voltages. An inverting input terminal of the amplifier is connected to the voltage input terminal through a resistor, and a non-inverting input terminal of the amplifier is connected to the voltage input terminal through the sensor capacitance and to one of the reference voltages through a switch. An output voltage of the amplifier is connected to the inverting input terminal through a feedback circuit including a resistor and a switch. The switches are closed and one of the reference voltages is supplied to the input terminal during an initialization cycle. The switches are opened and the other reference voltage is supplied to the input terminal during a measurement cycle. The operational amplifier outputs an output voltage which linearly varies in response to the sensor capacitance.
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公开(公告)号：EP0972205B1
公开(公告)日：2006-12-13
申请号：EP99901137.2
申请日：1999-01-22
IPC分类号： G01R27/26
CPC分类号： G01R27/2605
摘要： An impedance-to-voltage converter utilizes an operational amplifier in an imaginary short-circuit state to convert an impedance into a voltage without suffering from the influence of a stray capacitances. The impedance-to-voltage converter is formed of an operational amplifier which has an imaginary short-circuit state between an inverting input and a non-inverting input thereof when an impedance element is connected between an output and the inverting input, a shielding line for shielding a line for connecting the impedance element to the inverting input, an alternate current signal generator connected to the non-inverting input, and a shielding line for shielding the signal line. The shielding lines are connected to the non-inverting input.
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公开(公告)号：EP2048497B1
公开(公告)日：2014-10-08
申请号：EP07792504.8
申请日：2007-08-14
申请人： Tokyo Electron Limited , Octec Inc.
CPC分类号： G01N30/6095 , G01N30/52 , G01N2030/525
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公开(公告)号：EP2182353A1
公开(公告)日：2010-05-05
申请号：EP08752421.1
申请日：2008-05-08
CPC分类号： G01N30/6095 , G01N30/6004
摘要： A chromatography detector 11 includes a base substrate 12 having a main surface 12a and a column flow path 15 formed on the main surface 12a, and a substrate block 13 and 14, which has a detection space 18 communicating with an outlet of the column flow path 15 and is stacked on the main surface 12a of the base substrate 12 so as to close a top surface of the column flow path 15.
摘要翻译： 色谱检测器11包括具有形成在主表面12a上的主表面12a和柱流路15的基底12和具有与柱流路的出口连通的检测空间18的基底块13和14 并且堆叠在基底基板12的主表面12a上，以封闭柱流路15的顶表面。
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公开(公告)号：EP1863046A1
公开(公告)日：2007-12-05
申请号：EP06729485.0
申请日：2006-03-20
申请人： TOKYO ELECTRON LIMITED , OCTEC INC.
CPC分类号： H01H1/0036 , B81B3/0054 , B81B2201/014 , B81B2203/053 , H01H1/24 , H01H37/46 , H01H67/22 , H01H2001/0042 , H01H2037/008
摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13 three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17 and the second wiring layer 13, and therefore close the switch 10.
摘要翻译： 第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在第一布线层16上三维交叉的第二布线层13设置在下基板11上的绝缘膜12上。 悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对置，其间具有间隔。 热塑性片19布置在上基板15上以覆盖通孔18.热塑片19被加热销20压靠在悬臂17上并变形，从而保持悬臂17和 第二布线层13，因此关闭开关10。
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