公开(公告)号：EP1118954A1

公开(公告)日：2001-07-25

申请号：EP99913706.0

申请日：1999-04-19

申请人： Kabushiki Kaisha Ultraclean Technology Research Institute ,  Shibata, Tadashi ,  Ohmi, Tadahiro

发明人： SHIBATA, Tadashi ,  OHMI, Tadahiro ,  NAKADA, Akira ,  MORIMOTO, Tatsuro ,  NITTA, Takahisa, K. K. Ultraclean Tech. Res. Ins.

IPC分类号： G06G7/12

CPC分类号： G06N3/063 ,  G06N3/0635

摘要： It is an object of the present invention to provide a semiconductor arithmetic unit which realizes a maximum or minimum value retrieval operation at high speed and with a high degree of accuracy used in a vector quantization processor composed of a binary-multivalue-analog merged operation processing circuit. In addition, it is another object to add a function for retrieving a vector with a distance of necessary order to the unit.
The present invention is characterized in that, in a multi-loop circuit comprising an amplifying circuit group composed of a plurality of sets of first amplifiers with a floating gate to which first electrodes and a single second electrode are capacitively coupled with a predetermined ratio, a logical operation circuit to which output signals of the amplifying circuit group are inputted and which outputs a logical 0 or 1, and a second amplifying circuit to which an output signal of the logical operation circuit is inputted and whose output is distributed to all of the second electrodes of the amplifying circuit group, the second amplifying circuit includes an adjusting circuit which adjusts an output current driving ability and a controlling circuit which controls the adjustment with a predetermined regulation, and the adjustment of the controlling circuit is executed according to variation of the output of the logical operation circuit.

摘要翻译： 本发明的目的是提供一种半导体运算单元，该半导体运算单元在由二进制多值模拟合并运算处理器构成的矢量量化处理器中以高速度和高精度地实现最大值或最小值检索操作 电路。 此外，另一个目的是添加用于检索具有必要顺序距离的向量到该单元的函数。 本发明的特征在于，在包括由具有浮置栅极的多组第一放大器组成的放大电路组的多回路电路中，第一电极和单个第二电极以预定比率电容耦合， 输入放大电路组的输出信号并输出​​逻辑0或1的逻辑运算电路，输入逻辑运算电路的输出信号的第2放大电路，其输出分配给第2 放大电路组的电极，第二放大电路包括调节输出电流驱动能力的调节电路和控制电路，控制电路以预定的调节进行调节，并且根据输出的变化执行控制电路的调整 的逻辑运算电路。

公开(公告)号：EP1079394A1

公开(公告)日：2001-02-28

申请号：EP99913705.2

申请日：1999-04-19

申请人： Kabushiki Kaisha Ultraclean Technology Research Institute ,  Ohmi, Tadahiro ,  Shibata, Tadashi

发明人： OHMI, Tadahiro ,  SHIBATA, Tadashi ,  WEE, Keng Hoong ,  YONEZAWA, Takemi ,  NOZAWA, Toshiyuki ,  NITTA, Takahisa, Kabushiki Kaisha Ultraclean

IPC分类号： G11C16/02

CPC分类号： G11C11/5642 ,  G11C11/5621 ,  G11C11/5628 ,  G11C27/005 ,  G11C2211/5613

摘要： The present invention is intended to provide a semiconductor memory circuit that can store analog and many-valued data at high speed and with a high degree of accuracy. The semiconductor memory circuit is characterized by comprising a memory cell in which analog and many-valued signals can be written and stored, a readout circuit having an output terminal which outputs the values stored in the memory cell to the outside as voltages, a comparator having an output terminal which outputs a write end signal when the output terminal voltage of the readout circuit equals to a predetermined voltage, a write voltage controlling circuit having an output terminal which outputs an output voltage corresponding to the analog and many-valued voltage values inputted to an input terminal as a writing voltage of the memory cell, and a write voltage switching circuit having a function which supplies the output voltage of the write voltage controlling circuit to the memory cell and stops to supply the output voltage of the write voltage controlling circuit to the memory cell when the write end signal is outputted to the output terminal of the comparator.

摘要翻译： 本发明旨在提供一种能够以高速度和高精度存储模拟和多值数据的半导体存储器电路。 半导体存储器电路的特征在于包括：存储单元，其中可以写入和存储模拟和多值信号;读出电路，具有将存储在存储单元中的值作为电压输出到外部的输出端;比较器，具有 输出端子，当读出电路的输出端子电压等于预定电压时输出写入结束信号;写入电压控制电路，具有输出端子，输出端子输出对应于模拟输入电压值和输出的多值电压值的输出电压; 作为所述存储单元的写入电压的输入端子和具有将所述写入电压控制电路的输出电压提供给所述存储单元并停止以将所述写入电压控制电路的输出电压提供给所述存储单元的功能的写入电压切换电路， 当写结束信号被输出到比较器的输出端子时存储单元。

公开(公告)号：EP1065709A1

公开(公告)日：2001-01-03

申请号：EP99949372.9

申请日：1999-10-22

申请人： Kabushiki Kaisha Ultraclean Technology Research Institute ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  HIRAYAMA, Masaki ,  NITTA, Takahisa K. K. Ultraclean Tech. Res.Inst.

IPC分类号： H01L21/3065 ,  H01L21/205

CPC分类号： H01L21/67213 ,  H01L21/67167 ,  H01L21/6719

摘要： The present invention relates to a semiconductor manufacturing apparatus, capable of uniform processing on the substrate, occupying a small floor area for installation, and presenting a good maintainability.
The semiconductor manufacturing apparatus of the present invention, is composed of a vacuum vessel, wherein at least one substrate stage is provided on said vacuum vessel bottom plate; a cylinder is installed surrounding said substrate stage; the gap between said cylinder and said vacuum vessel top plate or bottom plate is made variable by lifting/lowering said cylinder; at least one cylinder lifting/lowering mechanism per one said cylinder is provided, in order to separate a space inside said cylinder composing a processing chamber for processing said substrate surface from a space outside said cylinder composing a transport chamber for transferring said substrate; said transport chamber is provided with a substrate conveyer mechanism for transferring said substrate between said processing chamber and said transport chamber through said gap; said processing chamber is provided with a processing chamber gas inlet and a processing chamber gas outlet; and said transport chamber is provided with a transport chamber gas inlet and a transport chamber gas outlet.

摘要翻译： 半导体制造装置技术领域本发明涉及一种半导体制造装置，能够对基板进行均匀的加工，占地面积小，安装性好，维修性好。 本发明的半导体制造装置由真空容器构成，其中在所述真空容器底板上设置有至少一个基板台; 围绕所述基底台安装圆柱体; 所述气缸和所述真空容器顶板或底板之间的间隙通过提升/降低所述气缸而变得可变; 提供每一个所述气缸的至少一个气缸提升/降低机构，以便分离构成处理室的所述气缸内的空间，用于处理所述衬底表面与构成用于传送所述衬底的传送室的所述气缸外部的空间; 所述输送室设置有基板输送机构，用于通过所述间隙在所述处理室和所述输送室之间转移所述基板; 所述处理室设置有处理室气体入口和处理室气体出口; 并且所述输送室设置有输送室气体入口和输送室气体出口。