公开(公告)号：EP3255494A1

公开(公告)日：2017-12-13

申请号：EP16746667.1

申请日：2016-02-03

申请人： Sakai Display Products Corporation ,  AZ Electronic Materials Luxembourg S.à.r.l.

发明人： NODERA, Nobutake ,  SHINOZUKA, Akihiro ,  KOIWA, Shinji ,  KATO, Masahiro ,  MATSUMOTO, Takao ,  FUKE, Takashi ,  YOKOYAMA, Daishi ,  TANIGUCHI, Katsuto

IPC分类号： G03F7/023 ,  G02F1/1333 ,  G02F1/1368 ,  G03F7/075

CPC分类号： G03F7/075 ,  C08G73/08 ,  C08G77/04 ,  G02F1/1333 ,  G02F1/1368 ,  G03F7/023

摘要： The present invention provides a positive type photosensitive siloxane composition in which a film formed by the same has high heat resistance, high strength and high crack resistance, an active matrix substrate in which by-product is not generated, an occurrence of defects is suppressed, and an interlayer insulating film is easily formed at a low cost while having good transmittance, a display apparatus including the active matrix substrate, and a method of manufacturing the active matrix substrate. An active matrix substrate 30 includes a plurality of gate wirings 11 provided so as to extend parallel to each other on an insulating substrate 10, and a plurality of source wirings 12 provided so as to extend parallel to each other in a direction intersecting the respective gate wirings 11. An interlayer insulating film 14 and a gate insulating film 15 are interposed at portions including the intersecting portions of the gate wirings 11 and the source wirings 12, on a lower side of the source wiring 12. The interlayer insulating film 14 is formed using the positive type photosensitive siloxane composition without using a resist.

摘要翻译： 本发明提供一种正型光敏硅氧烷组合物，其中由其形成的膜具有高耐热性，高强度和高抗裂性，其中不产生副产物的有源矩阵基板，抑制了缺陷的发生， 以低成本容易地形成层间绝缘膜，同时具有良好的透射率，包括有源矩阵基板的显示装置以及有源矩阵基板的制造方法。 有源矩阵基板30具备：在绝缘基板10上相互平行地延伸设置的多个栅极配线11;以及在与各栅极交叉的方向上相互平行地延伸设置的多个源极配线12 布线11.在源极布线12的下侧，在包括栅极布线11和源极布线12的交叉部分的部分处插入层间绝缘膜14和栅极绝缘膜15.层间绝缘膜14形成 使用正型光敏硅氧烷组合物而不使用抗蚀剂。