公开(公告)号：EP1361782A4

公开(公告)日：2006-03-29

申请号：EP02715809

申请日：2002-01-18

申请人： TOKYO ELECTRON LTD ,  ANDO MAKOTO ,  TAKAHASHI MASAHARU

发明人： ANDO MAKOTO ,  TAKAHASHI MASAHARU ,  ISHII NOBUO

IPC分类号： H01J37/32 ,  H05H1/46 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065

CPC分类号： H01J37/32192 ,  H01J37/3244

摘要： A plasma device, comprising a slot antenna (30) for feeding a high frequency electromagnetic field (F) fed through a feeding part into a processing container (11), the feeding part further comprising a cavity (35) forming an oscillator and converting the fed high frequency electromagnetic field (F) to a rotating electromagnetic field and feeding the rotating electromagnetic field to the slot antenna (30).

公开(公告)号：EP1361782A1

公开(公告)日：2003-11-12

申请号：EP02715809.6

申请日：2002-01-18

申请人： TOKYO ELECTRON LIMITED ,  Ando, Makoto ,  Takahashi, Masaharu

发明人： ANDO, Makoto ,  TAKAHASHI, Masaharu ,  ISHII, Nobuo

IPC分类号： H05H1/46 ,  H01L21/3065 ,  H01L21/205 ,  C23C16/505

CPC分类号： H01J37/32192 ,  H01J37/3244

摘要： A plasma device includes a slot antenna (30) for supplying a high frequency electromagnetic field (F) supplied through a feeding part into a processing vessel (11). The feeding part has a cavity (35) for forming a resonator and converting the fed high frequency electromagnetic field (F) into a rotating electromagnetic field and supplying the rotating electromagnetic field to the slot antenna (30).

摘要翻译： 等离子体装置包括用于将通过馈送部分供应的高频电磁场（F）提供到处理容器（11）中的缝隙天线（30）。 馈电部分具有用于形成谐振器的空腔（35），并将馈送的高频电磁场（F）转换成旋转的电磁场，并将旋转的电磁场提供给缝隙天线（30）。