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公开(公告)号：EP1330672A2
公开(公告)日：2003-07-30
申请号：EP01981832.7
申请日：2001-10-04
IPC分类号： G02B26/08
CPC分类号： G02B26/0866
摘要： A micro-mechanical device including a gimbaled micro-mirror positionable by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.
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公开(公告)号：EP1346383A2
公开(公告)日：2003-09-24
申请号：EP01962238.0
申请日：2001-08-17
发明人： WEAVER, Billy, L. , GOETZ, Douglas, P. , HAGEN, Kathy, L. , HAMERLY, Mike, E. , SMITH, Robert, G. , THEISS, Silva, K.
IPC分类号： H01H1/00
CPC分类号： B81B3/0024 , B81B2201/031 , H01H1/0036 , H01H61/01 , H01H2001/0068 , H01H2061/006 , H01H2061/008
摘要： A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.
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公开(公告)号：EP1317762A1
公开(公告)日：2003-06-11
申请号：EP01978713.4
申请日：2001-08-17
发明人： WEAVER, Billy, L. , GOETZ, Douglas, P. , HAGEN, Kathy, L. , HAMERLY, Mike, E. , SMITH, Robert, G. , THEISS, Silva, K.
CPC分类号： G02B6/358 , B81B3/0024 , B81B3/0037 , B81B2201/031 , B81B2201/045 , B81B2203/0109 , B81B2203/0118 , B81B2203/053 , B82Y15/00 , G02B6/352 , G02B6/3576 , H01G5/18 , H01H1/0036 , H01H61/04 , H01H2061/006 , H01H2061/008
摘要： A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.
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