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    MEMS ELEMENT AND METHOD OF PRODUCING THE SAME, AND DIFFRACTION TYPE MEMS ELEMENT
    7.
    发明公开
    MEMS ELEMENT AND METHOD OF PRODUCING THE SAME, AND DIFFRACTION TYPE MEMS ELEMENT 审中-公开
    MEMS元件及其制造方法，以及它们的DIFFRAKTIONSARTIGES MEMS元件

    公开(公告)号：EP1602624A4

    公开(公告)日：2006-12-27

    申请号：EP04708917

    申请日：2004-02-06

    Applicant: SONY CORP

    Inventor： NANIWADA KOJI

    IPC: B81B3/00 ,  B81C1/00 ,  G02B6/34 ,  G02B26/08

    CPC classification number: B81B3/0072 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  G02B26/0808 ,  G02B26/0841

    Abstract: The invention provides an MEMS element having improved characteristics, reducing beam strain deformation, and a method of producing the same, and a diffraction type MEMS element. The MEMS element of the invention comprises a substrate-side electrode, and a beam driven by an electrostatic force produced between it and the substrate-side electrode, the beam being formed of a plurality of thin films including a drive-side electrode, the beam being provided with a deformation preventing means for preventing beam deformation due to stress-induced strain in the thin films. The diffraction type MEMS element of the invention, which has the same substrate-side electrode as in the above arrangement, has a plurality of mutually independent beams opposed to the substrate-side electrode.

    Method and system for packaging a micromechanical display
    8.
    发明公开
    Method and system for packaging a micromechanical display 有权
    Verfahren zurHäusungeiner mikromechanischen Anzeigevorrichtung

    公开(公告)号：EP1640320A2

    公开(公告)日：2006-03-29

    申请号：EP05255634.7

    申请日：2005-09-14

    Applicant: IDC, LLC

    Inventor： Cummings, William J. ,  Gally, Brian J. ,  Palmateer, Lauren ,  Floyd, Philip D. ,  Chui, Clarence

    IPC: B81B7/00 ,  G02B26/08

    CPC classification number: B81B7/0067 ,  B81B2201/045 ,  B81C2203/0109 ,  B81C2203/0145 ,  B81C2203/019 ,  G02B26/001

    Abstract: A package structure 800 and method of packaging for an interferometric modulator 830 is described. A transparent substrate 810 having an interferometric modulator 830 formed thereon is shown. A backplane 820 is joined to the transparent substrate 810 with a seal 840 where the interferometric modulator is exposed to the surrounding environment through an opening 850 in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure 800.

    Abstract translation: 描述了用于干涉式调制器830的封装结构800和封装方法。 示出了其上形成有干涉式调制器830的透明基板810。 背板820通过密封件840连接到透明基板810，其中干涉式调制器通过背板或密封件中的开口850暴露于周围环境。 在透明基板和背板接合之后，并且在任何期望的干燥剂，脱模材料和/或自对准单层引入到包装结构800中之后，密封该开口。

    Optical switch
    10.
    发明公开
    Optical switch 有权
    光开关

    公开(公告)号：EP1278083A3

    公开(公告)日：2004-09-22

    申请号：EP02090242.5

    申请日：2002-07-10

    Applicant: NEC CORPORATION

    Inventor： Utsunomiya, Motoyasu, c/o NEC Corporation

    IPC: G02B6/35 ,  G02B26/08

    CPC classification number: G02B6/357 ,  B81B3/0062 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3556

    Abstract: An analog beam-steering free-space optical switch for connecting and switching a plurality of optical signals includes a plurality of optical devices and electrostatic actuators for driving the optical devices. Each optical device is pivotally borne to allow rotation around a prescribed center,    and each electrostatic actuator includes the substrate that holds the optical devices and a plurality of driving electrodes secured to the substrate. The application of electrostatic voltage between an optical device and the driving electrodes generates electrostatic driving torque for causing the optical device to tilt with respect to the substrate around the center of rotation, whereby the direction of reflection of an optical signal is changed. The    driving electrodes are arranged in a radial pattern relative to the electrode center. Each driving electrode is formed such that the electrode width of a prescribed outer portion relative to the electrode center decreases with progression toward the outside. In addition, each driving electrode is shaped such that the width of a prescribed inner portion with respect to the electrode center decreases with progression toward the inside. Forming the driving electrodes in this way improves the driving torque characteristic of the micromirror and extends the range of steering angles within which stable positioning can be performed by low-voltage drive.

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