专利检索 ap:("ASML Holding N.V." OR "ASML Netherlands B.V.") AND inv:"RANJAN, Manish" 第 1 页

1.

发明公开
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGING A TRAJECTORY OF PARTICULATE DEBRIS 审中-公开

公开(公告)号：EP4094125A1

公开(公告)日：2022-11-30

申请号：EP20838574.0

申请日：2020-12-24

申请人： ASML Holding N.V. , ASML Netherlands B.V.

发明人： ALBRIGHT, Ronald, Peter , BAL, Kursat , BANINE, Vadim, Yevgenyevich , BRULS, Richard, Joseph , DE VRIES, Sjoerd, Frans , FRIJNS, Olav, Waldemar, Vladimir , HUANG, Yang-Shan , HUANG, Zhuangxiong , JACOBS, Johannes, Henricus, Wilhelmus , MOORS, Johannes, Hubertus, Josephina , NENCHEV, Georgi, Nenchev , NIKIPELOV, Andrey , RAASVELD, Thomas, Maarten , RANJAN, Manish , TE SLIGTE, Edwin , UMSTADTER, Karl, Robert , UZGÖREN, Eray , VAN DE KERKHOF, Marcus, Adrianus , YAGHOOBI, Parham

IPC分类号： G03F7/20 , H05G2/00

2.

发明公开
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE 审中-公开

公开(公告)号：EP3724721A1

公开(公告)日：2020-10-21

申请号：EP18811777.4

申请日：2018-11-27

申请人： ASML Netherlands B.V. , ASML Holding N.V.

发明人： BROUNS, Derk Servatius Gertruda , ADAMS, Joshua , BENDIKSEN, Aage , JACOBS, Richard , JUDGE, Andrew , KOTTAPALLI, Veera Venkata Narasimha Narendra Phani , LYONS, Joseph Harry , MODDERMAN, Theodorus Marinus , RANJAN, Manish , VAN DE KERKHOF, Marcus Adrianus , XIONG, Xugang

IPC分类号： G03F1/62 , G03F1/64 , G03F7/20