公开(公告)号：EP2856262A1

公开(公告)日：2015-04-08

申请号：EP13723161.9

申请日：2013-05-17

申请人： ASML Netherlands B.V.

发明人： DONDERS, Sjoerd, Nicolaas, Lambertus ,  FIEN, Menno ,  HOOGENDAM, Christiaan, Alexander ,  HOUBEN, Martijn ,  JACOBS, Johannes, Henricus, Wilhelmus ,  KOEVOETS, Adrianus, Hendrik ,  LAFARRE, Raymond, Wilhelmus, Louis ,  OVERKAMP, Jim, Vincent ,  TEN KATE, Nicolaas ,  WESTERLAKEN, Jan, Steven, Christiaan ,  DE GROOT, Antonius, Franciscus, Johannes ,  VAN BEIJNUM, Maarten ,  DE JONG, Rob

IPC分类号： G03F7/20

CPC分类号： G03F7/70716 ,  G03F7/70341 ,  G03F7/707 ,  G03F7/70733

摘要： A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.

摘要翻译： 用于光刻设备的支撑设备具有物体保持器和物体保持器径向外侧的抽出体。 对象持有者被配置为支持对象。 提取体包括提取开口，其构造成从支撑装置的顶表面提取流体。 提取体与物体保持器间隔开，使得提取体基本上与物体保持器分离。 提取体包括突出部，其被构造为使得其围绕物体保持器并且使得在使用中，一层液体保持在突出部上并与支撑在物体保持器上的物体接触。