公开(公告)号：EP3910417A1

公开(公告)日：2021-11-17

申请号：EP20174335.8

申请日：2020-05-13

申请人： ASML Netherlands B.V.

发明人： KOULIERAKIS, Eleftherios ,  LANCIA, Carlo ,  GONZALEZ HUESCA, Juan Manuel ,  YPMA, Alexander

IPC分类号： G03F7/20

摘要： Described is a method and associated computer program and apparatuses for method for making a decision as to whether to inspect a substrate from a group of substrates within a manufacturing process. The method comprises assigning to each substrate of the group of substrates, a probability value describing a probability of complying with a quality requirement, using a model trained to predict compliance with the quality requirement based on pre-processing data associated with the substrate; and deciding whether to inspect each substrate based on the probability value and one or both of: an expected cost of the inspection step and at least one objective value describing an expected value of inspecting the substrate in terms of at least one objective relating to the model.

公开(公告)号：EP4127834A1

公开(公告)日：2023-02-08

申请号：EP21707304.8

申请日：2021-03-01

申请人： ASML Netherlands B.V.

发明人： KOULIERAKIS, Eleftherios ,  LANCIA, Carlo ,  GONZALEZ HUESCA, Juan Manuel ,  YPMA, Alexander ,  GKOROU, Dimitra ,  SAHRAEIAN, Reza

IPC分类号： G03F7/20

公开(公告)号：EP3910419A1

公开(公告)日：2021-11-17

申请号：EP20174756.5

申请日：2020-05-14

申请人： ASML Netherlands B.V.

发明人： LANCIA, Carlo ,  GANTAPARA, Anjan Prasad ,  KERNKAMP, Dirk-Jan ,  MOSSAVAT, Seyed Iman ,  YPMA, Alexander

IPC分类号： G03F7/20 ,  G05B23/02

摘要： Disclosed is a method of tuning a prediction model relating to at least one particular configuration of a manufacturing device. The method comprises obtaining a function comprising at least a first function of first prediction model parameters associated with said at least one particular configuration, and a second function of the first prediction model parameters and second prediction model parameters associated with configurations of the manufacturing device and/or related devices other than the at least one particular configuration. Values of the first prediction model parameters are obtained based on an optimization of the function, and a prediction model is tuned according to these values of the first prediction model parameters to obtain a tuned prediction mode.

公开(公告)号：EP4115241A1

公开(公告)日：2023-01-11

申请号：EP21702283.9

申请日：2021-02-04

申请人： ASML Netherlands B.V.

发明人： LANCIA, Carlo ,  GANTAPARA, Anjan Prasad ,  KERNKAMP, Dirk-Jan ,  MOSSAVAT, Seyed Iman ,  YPMA, Alexander

IPC分类号： G03F7/20 ,  G05B23/02

公开(公告)号：EP3961518A1

公开(公告)日：2022-03-02

申请号：EP20192534.4

申请日：2020-08-25

申请人： ASML Netherlands B.V.

发明人： KOULIERAKIS, Eleftherios ,  LANCIA, Carlo ,  GONZALEZ HUESCA, Juan Manuel ,  YPMA, Alexander

IPC分类号： G06N20/00 ,  G03F7/20 ,  G03F9/00

摘要： Method and apparatus for adapting a distribution model of a machine learning fabric. The distribution model is for mitigating the effect of concept drift, and is configured to provide an output as input to a functional model of the machine learning fabric. The functional model is for performing a machine learning task. The method comprises obtaining a first data point, and providing the first data point as input to one or more distribution monitoring components of the distribution model. The one or more distribution monitoring components have been trained on a plurality of further data points. A metric representing a correspondence between the first data point and the plurality of further data points is determined, by at least one of the one or more distribution monitoring components. Based on the error metric, the output of the distribution model is adapted.