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    EXTRACTING A FEATURE FROM A DATA SET
    3.
    发明公开
    EXTRACTING A FEATURE FROM A DATA SET 审中-公开

    公开(公告)号：EP3705944A1

    公开(公告)日：2020-09-09

    申请号：EP19160933.8

    申请日：2019-03-06

    申请人： ASML Netherlands B.V.

    发明人： LARRANAGA, Maialen ,  GKOROU, Dimitra ,  HASIBI, Faegheh ,  YPMA, Alexander

    IPC分类号： G03F7/20 ,  G06N3/04

    摘要： A method of extracting a feature from a data set includes iteratively extracting a feature 244 from a data set based on a visualization 238 of a residual pattern comprised within the data set, wherein the feature is distinct from a feature extracted in a previous iteration, and the visualization of the residual pattern uses the feature extracted in the previous iteration. Visualizing 234 the data set using the feature extracted in the previous iteration may comprise showing residual patterns of attribute data that are relevant to target data. Visualizing 234 the data set using the feature extracted in the previous iteration may involve adding cluster constraints to the data set, based on the feature extracted in the previous iteration. Additionally or alternatively, visualizing 234 the data set using the feature extracted in the previous iteration may involve defining conditional probabilities conditioned on the feature extracted in the previous iteration.

    COMPUTER IMPLEMENTED METHOD FOR DIAGNOSING A SYSTEM COMPRISING A PLURALITY OF MODULES
    5.
    发明公开
    COMPUTER IMPLEMENTED METHOD FOR DIAGNOSING A SYSTEM COMPRISING A PLURALITY OF MODULES 审中-公开

    公开(公告)号：EP4116888A1

    公开(公告)日：2023-01-11

    申请号：EP21184240.6

    申请日：2021-07-07

    申请人： ASML Netherlands B.V.

    发明人： VAN HERTUM, Pieter ,  GKOROU, Dimitra ,  VAN SCHOUBROECK, Joachim, Kinley ,  KAREVAN, Zahra ,  YPMA, Alexander

    IPC分类号： G06N5/04 ,  G06N7/00 ,  G03F7/20 ,  G05B23/02

    摘要： A computer implemented method for diagnosing a system comprising a plurality of modules. The method comprises: receiving a causal graph, the causal graph defining (i) a plurality of nodes each representing a module of the system , wherein each module is characterized by one or more signals; and (ii) edges connected between the nodes, the edges representing propagation of performance between modules; generating a reasoning tool by augmenting the causal graph with diagnostics knowledge based on historically determined relations between performance, statistical and causal characteristics of at least one module out of the plurality of modules; obtaining a health metric of the at least one module, wherein the health metric is associated with the one or more signals associated with the at least one module; and using the health metric as an input to the reasoning tool to identify a module that is the most likely cause of the behaviour.

    METHOD AND APPARATUS FOR DETERMINING FEATURE CONTRIBUTION TO PERFORMANCE
    6.
    发明公开
    METHOD AND APPARATUS FOR DETERMINING FEATURE CONTRIBUTION TO PERFORMANCE 审中-公开

    公开(公告)号：EP3767392A1

    公开(公告)日：2021-01-20

    申请号：EP19186833.0

    申请日：2019-07-17

    申请人： ASML Netherlands B.V.

    发明人： BASTANI, Vahid ,  SONNTAG, DAG ,  SAHRAEIAN, Reza ,  GKOROU, Dimitra

    IPC分类号： G03F7/20 ,  G05B19/418 ,  H01L21/66

    摘要： A method of determining the contribution of a process feature to the performance of a process of patterning substrates. The method may comprise obtaining (402) a first model trained on first process data and first performance data. One or more substrates may be identified (404) based on a quality of prediction of the first model when applied to process data associated with the one or more substrates. A second model may be trained (406) on second process data and second performance data associated with the identified one or more substrates. The second model may be used (408) to determine the contribution of a process feature of the second process data to the second performance data associated with the one or more substrates.