-
公开(公告)号：EP2810128B1
公开(公告)日：2019-10-02
申请号：EP13700893.4
申请日：2013-01-17
发明人： LAFARRE, Raymond , DONDERS, Sjoerd , TEN KATE, Nicolaas , DZIOMKINA, Nina , KARADE, Yogesh , RODENBURG, Elisabeth
IPC分类号： G03F7/20
-
2.发明公开
公开(公告)号：EP2839342A1
公开(公告)日：2015-02-25
申请号：EP13711622.4
申请日：2013-03-19
IPC分类号： G03F7/20
CPC分类号： G03F7/70733 , G03F7/70341 , G03F7/70708 , H01L21/6831 , H01L21/6875
摘要： A substrate holder for use in a lithographic apparatus, the substrate holder including: a main body (100) having a surface (107); a plurality of burls (106) projecting from the surface and having end surfaces to support a substrate; and a thin film stack (200) on the main body surface and forming an electric component, the thin film stack having a conductive layer (108) configured to distribute electrical charge substantially uniformly throughout a plane of the stack in which the conductive layer is positioned.
-
3.发明公开SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER 审中-公开VERFAHREN ZUR HERSTELLUNG EINES SUBSTRATHALTERS的SUBSTRATHALTER
公开(公告)号：EP2810127A1
公开(公告)日：2014-12-10
申请号：EP13700401.6
申请日：2013-01-17
发明人： LAFARRE, Raymond , DONDERS, Sjoerd , TEN KATE, Nicolaas , DZIOMKINA, Nina , KARADE, Yogesh , RODENBURG, Elisabeth
IPC分类号： G03F7/20
摘要： A substrate holder for use in a lithographic apparatus. The substrate holder comprises a main body (400) and a plurality of burls provided on the main body and having end surfaces to support a substrate. The burls each comprise a lower portion (406a) protruding from the main body and an upper portion (406b) above the lower portion. The lower portions are a different material than the upper portions, the upper portions comprise diamond-like carbon, and the upper portions are separated from each other.
摘要翻译： 用于光刻设备的物体保持器具有具有表面的主体。 在薄膜叠层的表面或孔中形成有用于支撑物体的多个毛刺。 通过激光烧结形成至少一个毛刺。 通过激光烧结形成的毛刺中的至少一个可以是先前通过激光烧结形成的损坏的隆起的另一种方法的修复。
-
公开(公告)号：EP2810127B1
公开(公告)日：2020-03-04
申请号：EP13700401.6
申请日：2013-01-17
发明人： LAFARRE, Raymond , DONDERS, Sjoerd , TEN KATE, Nicolaas , DZIOMKINA, Nina , KARADE, Yogesh , RODENBURG, Elisabeth
IPC分类号： G03F7/20
-
公开(公告)号：EP2810128A2
公开(公告)日：2014-12-10
申请号：EP13700893.4
申请日：2013-01-17
发明人： LAFARRE, Raymond , DONDERS, Sjoerd , TEN KATE, Nicolaas , DZIOMKINA, Nina , KARADE, Yogesh , RODENBURG, Elisabeth
IPC分类号： G03F7/20
CPC分类号： B22F7/062 , B05D3/06 , B05D5/00 , B22F3/1055 , B23K26/342 , B23K26/354 , B23Q3/18 , B33Y10/00 , B33Y80/00 , G03F7/20 , G03F7/70341 , G03F7/70416 , G03F7/707 , G03F7/70708 , G03F7/70716 , G03F7/70733 , G03F7/708
摘要： An object holder (100) for a lithographic apparatus has a main body (400) having a surface (400a). A plurality of burls (406) to support an object are formed on the surface or in apertures of a thin-film stack (410, 440, 450). At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
摘要翻译： 用于光刻设备的物体保持器具有具有表面的主体。 在薄膜叠层的表面或孔中形成有用于支撑物体的多个毛刺。 通过激光烧结形成至少一个毛刺。 通过激光烧结形成的毛刺中的至少一个可以是先前通过激光烧结形成的损伤的隆起的另一种方法的修复。
-
-
-
-
搜索结果
5 条记录 (耗时 0.01 秒)
