专利检索 ap:("ASML Netherlands B.V.") AND inv:"VAN DER WEKKEN, Michael, Christiaan" 第 1 页

1.

发明公开
OBJECT TABLE 审中-公开

公开(公告)号：EP4390542A1

公开(公告)日：2024-06-26

申请号：EP22216468.3

申请日：2022-12-23

申请人： ASML Netherlands B.V.

发明人： ZHU, Jianqiang , ENGELEN, Johannes, Bernardus, Charles , KRUIZINGA, Matthias , ALLSOP, Nicholas Alan , KOEVOETS, Adrianus, Hendrik , GALAKTIONOV, Oleksiy, Sergiyovich , VAN DER WEKKEN, Michael, Christiaan , WARMING, Till

IPC分类号： G03F7/00 , H01L21/687

CPC分类号： G03F7/707 , H01L21/6875 , G03F7/7095 , H01L21/68757

摘要： An object table comprising a base having a planar surface, a substrate support or patterning device support comprising a clamp and a set of burls, the burls extending from the clamp and having distal ends adjacent to the planar surface of the base, wherein, the object table further comprises a compliant layer disposed between the burl distal ends and the planar surface of the base and a frictional layer which is in contact with the compliant layer.