公开(公告)号：EP4425259A1

公开(公告)日：2024-09-04

申请号：EP23159066.2

申请日：2023-02-28

申请人： ASML Netherlands B.V.

发明人： WIGGERS, Frank, Bert ,  LUDWIG, Heike ,  ALLSOP, Nicholas, Alan ,  WARMING, Till ,  HALM, Simon

IPC分类号： G03F7/00 ,  H01L21/683 ,  H01L21/687

CPC分类号： G03F7/70708 ,  G03F7/7095

摘要： The invention provides a method of manufacturing an electrostatic object clamp for a semiconductor processing apparatus, the method comprising the steps of:
- providing an electrode with a dielectric substrate,
- depositing a coating on a top surface of the dielectric substrate by alternatingly depositing:
- one or more electrically conductive base layers, and
- one or more electrically conductive protective layers, and

- laser ablating the coating to form one or more recesses in the coating to obtain a three-dimensional coating structure, and
- removing all areas of the one or more protective layers that are exposed after the step of laser ablating.

公开(公告)号：EP4390542A1

公开(公告)日：2024-06-26

申请号：EP22216468.3

申请日：2022-12-23

申请人： ASML Netherlands B.V.

发明人： ZHU, Jianqiang ,  ENGELEN, Johannes, Bernardus, Charles ,  KRUIZINGA, Matthias ,  ALLSOP, Nicholas Alan ,  KOEVOETS, Adrianus, Hendrik ,  GALAKTIONOV, Oleksiy, Sergiyovich ,  VAN DER WEKKEN, Michael, Christiaan ,  WARMING, Till

IPC分类号： G03F7/00 ,  H01L21/687

CPC分类号： G03F7/707 ,  H01L21/6875 ,  G03F7/7095 ,  H01L21/68757

摘要： An object table comprising a base having a planar surface, a substrate support or patterning device support comprising a clamp and a set of burls, the burls extending from the clamp and having distal ends adjacent to the planar surface of the base, wherein, the object table further comprises a compliant layer disposed between the burl distal ends and the planar surface of the base and a frictional layer which is in contact with the compliant layer.

公开(公告)号：EP4390541A1

公开(公告)日：2024-06-26

申请号：EP22216399.0

申请日：2022-12-23

申请人： ASML Netherlands B.V.

发明人： WARMING, Till

IPC分类号： G03F7/00 ,  H01L21/683

CPC分类号： G03F7/70708 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/6875

摘要： An object table comprising an electrostatic clamp which comprises at least one electrode provided between insulating layers, and a second clamp which comprises an array of electrically connected burls, the burls comprising a layer of resistive material at an object receiving surface of the burls.