公开(公告)号：EP4390542A1

公开(公告)日：2024-06-26

申请号：EP22216468.3

申请日：2022-12-23

申请人： ASML Netherlands B.V.

发明人： ZHU, Jianqiang ,  ENGELEN, Johannes, Bernardus, Charles ,  KRUIZINGA, Matthias ,  ALLSOP, Nicholas Alan ,  KOEVOETS, Adrianus, Hendrik ,  GALAKTIONOV, Oleksiy, Sergiyovich ,  VAN DER WEKKEN, Michael, Christiaan ,  WARMING, Till

IPC分类号： G03F7/00 ,  H01L21/687

CPC分类号： G03F7/707 ,  H01L21/6875 ,  G03F7/7095 ,  H01L21/68757

摘要： An object table comprising a base having a planar surface, a substrate support or patterning device support comprising a clamp and a set of burls, the burls extending from the clamp and having distal ends adjacent to the planar surface of the base, wherein, the object table further comprises a compliant layer disposed between the burl distal ends and the planar surface of the base and a frictional layer which is in contact with the compliant layer.

公开(公告)号：EP4165472A1

公开(公告)日：2023-04-19

申请号：EP21731762.7

申请日：2021-06-09

申请人： ASML Netherlands B.V. ,  ASML Holding N.V.

发明人： VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  VAN BERKEL, Koos ,  VAN DE KERKHOF, Marcus, Adrianus ,  HAMELINCK, Roger, Franciscus, Mattheus, Maria ,  SHERVIN, Shahab ,  VERSCHUREN, Marinus, Augustinus, Christiaan ,  ENGELEN, Johannes, Bernardus, Charles ,  KRUIZINGA, Matthias ,  UITTERDIJK, Tammo ,  GALAKTIONOV, Oleksiy, Sergiyovich ,  JANSSEN, Kjeld, Gertrudus, Hendrikus ,  PIJNENBURG, Johannes, Adrianus, Cornelis, Maria ,  VAN DELFT, Peter

IPC分类号： G03F7/20