公开(公告)号：EP2158279B1

公开(公告)日：2012-08-29

申请号：EP08751011.1

申请日：2008-05-20

申请人： AZ Electronic Materials USA Corp.

发明人： HOULIHAN, Francis ,  ABDALLAH, David ,  RAHMAN, M., Dalil ,  MCKENZIE, Douglas ,  ZHANG, Ruzhi ,  TIMKO, Allen, G. ,  KIM, Wookyu ,  LU, Ping-Hung

IPC分类号： C09D165/00

CPC分类号： C09D165/00 ,  G03F7/091 ,  H01L21/0276

公开(公告)号：EP2297610A1

公开(公告)日：2011-03-23

申请号：EP09742415.4

申请日：2009-03-30

申请人： AZ Electronic Materials USA Corp.

发明人： MCKENZIE, Douglas ,  ABDALLAH, David ,  TIMKO, Allen, G. ,  RAHMAN, M., Dalil

IPC分类号： G03F7/075 ,  G03F7/09

CPC分类号： G03F7/091

摘要： The invention relates to an anti reflective coating composition comprising a polymer, a crosslinker and a thermal acid generator, where the polymer comprises at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3), where R
1 to R
9 is independently selected from H and C
1 -C
6 alkyl, R' and R" is independently selected from H and C
1 -C
6 alkyl, X is C
1 -C
6 alkylene, Y is C
1 -C
6 alkylene. The invention further relates to a process for imaging a photoresist coated over the antireflective coating composition.

公开(公告)号：EP2158279A2

公开(公告)日：2010-03-03

申请号：EP08751011.1

申请日：2008-05-20

申请人： AZ Electronic Materials USA Corp.

发明人： HOULIHAN, Francis ,  ABDALLAH, David ,  RAHMAN, M., Dalil ,  MCKENZIE, Douglas ,  ZHANG, Ruzhi ,  TIMKO, Allen, G. ,  KIM, Wookyu ,  LU, Ping-Hung

IPC分类号： C09D165/00

CPC分类号： C09D165/00 ,  G03F7/091 ,  H01L21/0276

摘要： The present invention relates to an organic spin coatable anti reflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moiety in the backbone of the polymer. The invention further relates to a process for imaging the present composition.