MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS
    1.
    发明公开
    MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS 审中-公开
    MATERIALLAGERUNGS- UND -ABGABEVERPACKUNGEN UNDOVERHREN

    公开(公告)号:EP1877310A2

    公开(公告)日:2008-01-16

    申请号:EP06758572.9

    申请日:2006-04-25

    IPC分类号: B65B3/00

    摘要: Packages and methods for storage and dispensing of materials, e.g., high purity liquid reagents and chemical mechanical polishing compositions used in the manufacture of microelectronic device products, including containment structures and methods adapted for pressure-dispensing of high-purity liquids. Liner packaging of liquid or liquid-containing media is described, in which zero or near-zero head space conformations are employed to minimize adverse effects of particle generation, formation of bubbles and degradation of contained material.

    摘要翻译: 用于存储和分配材料的包装和方法,例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物,包括适于压力分配高纯度液体的容纳结构和方法。 描述了液体或含液体介质的衬里包装,其中采用零或接近零的顶部空间构型来最小化产生颗粒的不利影响,气泡的形成和所含材料的劣化。