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公开(公告)号:EP0878827B1
公开(公告)日:2002-02-27
申请号:EP98108907.1
申请日:1998-05-15
IPC分类号: H01J49/14 , G01N23/225 , H01J37/256 , H01J37/252
CPC分类号: G01N23/2258 , H01J37/252 , H01J37/256 , H01J49/142
公开(公告)号:EP0878827B1
公开(公告)日:2002-02-27
申请号:EP98108907.1
申请日:1998-05-15
IPC分类号: H01J49/14 , G01N23/225 , H01J37/256 , H01J37/252
CPC分类号: G01N23/2258 , H01J37/252 , H01J37/256 , H01J49/142