利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

149 条记录 (耗时 0.038 秒)

    TWO ROTATING ELECTRIC FIELDS MASS ANALYZER
    1.
    发明授权
    TWO ROTATING ELECTRIC FIELDS MASS ANALYZER 有权

    公开(公告)号：EP2956955B1

    公开(公告)日：2018-09-05

    申请号：EP14752094.4

    申请日：2014-02-07

    申请人： Office Tandem LLC

    发明人： HOTTA, Masanao ,  ADACHI, Tatsuya

    IPC分类号： H01J49/42 ,  H01J49/36 ,  H01J37/05 ,  H01J37/244 ,  H01J37/252

    CPC分类号： H01J49/06 ,  H01J37/05 ,  H01J37/244 ,  H01J37/252 ,  H01J49/26 ,  H01J49/36 ,  H01J49/421

    摘要： A mass analyzer includes two rotating electric field (REF) units, sinusoidal signal generators and a means for separation of dispersed ions. The REF units include a plurality of elongated electrodes surrounding a central axis, and are lined in tandem at elongated direction. Sinusoidal signals are applied to the electrodes to rotate electric fields within each REF unit. The means for separation is placed adjacent the downstream end of the 2nd REF unit. Ions enter the 1st REF unit, diverge outwards and leave the 1st REF unit on off-axis positions. The ions successively enter the 2nd REF unit and converge inwards because of 180 degrees phase difference from the 1st REF unit. Specified mass ions return to and travel along the central axis. However, unspecified mass ions deviate from the central axis and travel apart from the central axis. The means for separation separates specified ions from unspecified ions.

    Silicon drift X-ray detector
    6.
    发明公开
    Silicon drift X-ray detector 有权
    硅漂移，Röntgendetektor

    公开(公告)号：EP2202775A2

    公开(公告)日：2010-06-30

    申请号：EP09252804.1

    申请日：2009-12-16

    申请人： JEOL Ltd.

    发明人： Watanabe, Toshiyoshi ,  Miyatake, Kouji

    IPC分类号： H01J37/244 ,  H01J37/252

    CPC分类号： H01J37/244 ,  G01T1/2928 ,  H01J37/252 ,  H01J2237/24415 ,  H01L31/115

    摘要： A silicon drift detector used in an energy-dispersive X-ray spectrometer and having a background lower than heretofore. The detector has an X-ray detection device (1), an electrode terminal subassembly (2) for electrical connection, a Peltier device (3), and first and second shields (5,6) formed between the electrode terminal subassembly (2) and the Peltier device (3). The first shield (5) is made of a material consisting chiefly of an element having an atomic number smaller than the average atomic number of the elements included in the material of the Peltier device (3). The second shield (6) is made of a material consisting chiefly of an element having an atomic number greater than the atomic numbers of the elements included in the material of the Peltier device (3). The shields (5, 6) reduce the amount of secondary X-rays entering the X-ray detection device (1) after being produced from the Peltier device (3), the secondary X-rays being induced by X-rays transmitted through the detection device (1).

    摘要翻译： 用于能量色散X射线光谱仪的硅漂移探测器，背景比以前低。 检测器具有X射线检测装置（1），用于电连接的电极端子组件（2），珀耳帖装置（3）以及形成在电极端子组件（2）之间的第一和第二屏蔽件（5,6） 和珀耳帖装置（3）。 第一屏蔽（5）由主要由原子序数小于包含在珀耳帖装置（3）的材料中的元素的平均原子序数的元素组成的材料制成。 第二屏蔽（6）由主要由原子序数大于包含在珀耳帖装置（3）的材料中的元素的原子序数的元素组成的材料制成。 屏蔽（5,6）在从珀耳帖装置（3）产生之后，减少进入X射线检测装置（1）的二次X射线的量，二次X射线被透过X射线 检测装置（1）。

    DEVICE AND METHOD FOR INTRODUCING GAS FOR ANALYSIS DEVICE
    7.
    发明公开
    DEVICE AND METHOD FOR INTRODUCING GAS FOR ANALYSIS DEVICE 有权
    VORRICHTUNG UND VERFAHREN ZUREINFÜHRUNGVON GAS IN EINANALYSEGERÄT

    公开(公告)号：EP2166345A1

    公开(公告)日：2010-03-24

    申请号：EP08778225.6

    申请日：2008-07-10

    申请人： Toyota Jidosha Kabushiki Kaisha

    发明人： KISHITA, Keisuke ,  SAKAI, Hisashi

    IPC分类号： G01N23/207 ,  G01T1/18 ,  H01J37/18 ,  G01N1/00 ,  G01T7/02

    CPC分类号： H01J37/265 ,  G01N33/0011 ,  H01J37/18 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/182 ,  H01J2237/186 ,  H01J2237/188 ,  H01J2237/2445 ,  H01J2237/2446

    摘要： Gas is supplied from positive pressure (10 5 Pa or more) to an analysis device of high vacuum (10 -2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and the pressure of the gas is reduced by a pressure reducing pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the depressurized gas is introduced to a gas analysis device through a switching operation using a gas switching valve.

    摘要翻译： 在保持条件恒定并复制条件的同时，将气体从正压（10 5 Pa以上）提供到高真空（10 -2 Pa以下）的分​​析装置，并且稳定地进行，并进行切换到期望的气体 短时间。 根据气体导入装置和方法，在混合室中合成多种气体，导入合成气体，通过减压泵将气体的压力降低至0.1Pa〜0.1的压力 并且通过使用气体切换阀的切换操作将减压气体导入气体分析装置。

    FILM THICKNESS MEASUREMENT USING ELECTRON-BEAM INDUCED X-RAY MICROANALYSIS
    9.
    发明公开
    FILM THICKNESS MEASUREMENT USING ELECTRON-BEAM INDUCED X-RAY MICROANALYSIS 审中-公开
    测量电子诱导X射线显微分析的厚度

    公开(公告)号：EP1305815A4

    公开(公告)日：2007-06-27

    申请号：EP01944398

    申请日：2001-06-07

    申请人： KLA TENCOR CORP

    发明人： LEE SHING M

    IPC分类号： G01B15/02 ,  G01N23/22 ,  G01N23/225 ,  H01J37/244 ,  H01J37/252 ,  H01L21/66

    CPC分类号： G01B15/02 ,  G01N23/22 ,  H01J37/252 ,  H01J2237/24415 ,  H01J2237/2814

    摘要： An X-ray microanalysis test system comprising a beam generator (400), which induces X-rays to emanate from a semiconductor device containing film stacks. The charged particle beam will penetrate at least two layers of a film stack (330) on a semiconductor device so that these layers may be tested. The X-rays will be detected using multiple X-ray detectors (500) that detect X-ray photons having a specific energy level. The X-rays will then be used to analyze the characteristics of the semiconductor device. Each of the multiple X-ray detectors (500) may be wavelength dispersive system (WDS) detectors. The present invention also provides a method for measuring film stack characteristics on a semiconductor device. The method for measuring includes directing an electron beam towards the semiconductor device so that the electron beam penetrates at least a conductive film layer and a liner layer, detecting the X-rays which are caused to emanate from the device with multiple X-ray detectors that detect X-ray photons having a specific energy level. The present invention also provides a method and a computer-readable medium, which determines a film stack's properties using the data collected with the test system of the present invention. The method and computer-readable medium includes selecting a set of values which estimate the film stack characteristics.