公开(公告)号：EP2504273B1

公开(公告)日：2016-01-27

申请号：EP10785498.6

申请日：2010-11-22

Applicant: BAE Systems PLC

Inventor： HUCKER, Martyn John ,  STURLAND, Ian Michael ,  ELEY, Rebecka

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/313

CPC classification number: H01L41/313 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/051 ,  H01L41/096

Abstract: A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6), and relatively high rigidity in a direction through the plane; wherein the relatively low rigidity is provided by ridges and grooves (60) in a further surface of the layer of material (6), the further surface of the material (6) being substantially perpendicular to the direction in the plane. The MEMS device may comprise a layer of piezoelectric material (2) bonded to the surface of the layer of material (6). Actuation of the MEMS device (e.g. actuation in the plane of the surface of the layer of material (6)) may be performed by applying an electrical field across the piezoelectric material.

公开(公告)号：EP2504274B1

公开(公告)日：2016-04-20

申请号：EP10787532.0

申请日：2010-11-22

Applicant: BAE Systems PLC

Inventor： ELEY, Rebecka ,  HUCKER, Martyn John ,  STURLAND, Ian Michael

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H02N2/043 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0109 ,  H01L41/0933 ,  H01L41/22

Abstract: A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in.

公开(公告)号：EP2504273A1

公开(公告)日：2012-10-03

申请号：EP10785498.6

申请日：2010-11-22

Applicant: BAE Systems Plc.

Inventor： HUCKER, Martyn John ,  STURLAND, Ian Michael ,  ELEY, Rebecka

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H01L41/313 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/051 ,  H01L41/096

Abstract: A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6), and relatively high rigidity in a direction through the plane; wherein the relatively low rigidity is provided by ridges and grooves (60) in a further surface of the layer of material (6), the further surface of the material (6) being substantially perpendicular to the direction in the plane. The MEMS device may comprise a layer of piezoelectric material (2) bonded to the surface of the layer of material (6). Actuation of the MEMS device (e.g. actuation in the plane of the surface of the layer of material (6)) may be performed by applying an electrical field across the piezoelectric material.

公开(公告)号：EP1425554A1

公开(公告)日：2004-06-09

申请号：EP02758565.2

申请日：2002-09-06

Applicant: BAE Systems PLC

Inventor： FELL, Christopher Paul ,  ELEY, Rebecka ,  FOX, Colin, Henry John ,  McWILLIAM, Stewart

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A three axis sensor including a substantially planar vibrator resonator (2) having a substantially ring or hoop like structure, drive means (4) for causing the resonator (2) to vibrate in an in plane cos2θ vibration mode, carrier mode pick-off means (5) for sensing movement of the resonator in response to said drive means, pick-off means (6) for sensing in plane sin2υ resonator motion induced by rotation about the z-axis, drive means (7) for nulling said motion, pick-off means (8) for sensing out of plane sin3υ resonator motion induced by rotation about the x-axis, drive means (9) for nulling said motion, pick-off means (10) for sensing out of plane cos3υ resonator motion induced by rotation about the y-axis, drive means (11) for nulling said motion, and support means (9) for flexibly supporting the resonator, wherein the support means comprises only L support beams, where L≠2Jx3K and J=0,1 or 2 and K=0 or 1 with L>24.

Abstract translation: 一种三轴传感器，包括具有基本上环形或环状结构的基本上平面的振动器谐振器（2），用于使谐振器（2）在平面内cos2θ振动模式下振动的驱动装置（4），载体模式拾取装置 （5），用于响应于所述驱动装置而感测谐振器的运动;拾取装置（6），用于感测绕z轴旋转引起的谐振器运动中的平面;驱动装置（7），用于使所述运动无效;拾取装置 - 用于检测由围绕x轴旋转引起的共振器运动的平面外的平面外的偏离装置（8），用于使所述运动零化的驱动装置（9），用于检测由平面外的共振器运动的离开装置（10） 绕y轴旋转，用于使所述运动无效的驱动装置（11），以及用于柔性地支撑谐振器的支撑装置（9），其中支撑装置仅包括L个支撑梁，其中L≠2J×3K且J = 0,1或 2且K = 0或1且L> 24。

公开(公告)号：EP4158310A1

公开(公告)日：2023-04-05

申请号：EP21730273.6

申请日：2021-05-26

Applicant: BAE SYSTEMS plc

Inventor： ELEY, Rebecka ,  BALMOND, Mark, David ,  FIGGURES, Christopher, Colin ,  STURLAND, Ian Michael ,  CHURCH, Simon Robert

IPC: G01N17/04

公开(公告)号：EP2504274A1

公开(公告)日：2012-10-03

申请号：EP10787532.0

申请日：2010-11-22

Applicant: BAE Systems Plc.

Inventor： ELEY, Rebecka ,  HUCKER, Martyn John ,  STURLAND, Ian Michael

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H02N2/043 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0109 ,  H01L41/0933 ,  H01L41/22

Abstract: A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in.

公开(公告)号：EP1425552A1

公开(公告)日：2004-06-09

申请号：EP02755323.9

申请日：2002-09-06

Applicant: BAE Systems PLC

Inventor： FELL, Christopher Paul ,  ELEY, Rebecka ,  FOX, Colin Henry John ,  MCWILLIAM, Stewart

IPC: G01C19/56 ,  G01P9/04

CPC classification number: G01C19/5684

Abstract: A single axis rate sensor including a substantially planar vibratory resonator (1) having a substantially ring or hoop-like structure with inner and outer peripheries (1a, 1b) extending around a common axis (z) drive means (6) for causing the resonator (1) to vibrate in a Cos2υ vibration mode, carrier mode pick-off means (7) for sensing movement of the resonator (1) in response to said drive means pick-off means (9) for detecting Sin2υ vibration mode motion induced by rotation around the Z-axis, Sin2υ vibration mode drive means (8) for nulling said motion and support means (2) for flexibly supporting the resonator (1) and for allowing the resonator (1) to vibrate relative to the support means (2) in response to the drive means, or to applied rotation wherein the support means comprises only L support beams, where L ≠ 2K, and K = 0, 1, 2 or 3.