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1.发明公开AQUEOUS POLISHING AGENT AND GRAFT COPOLYMERS AND THEIR USE IN PROCESS FOR POLISHING PATTERNED AND UNSTRUCTURED METAL SURFACES 审中-公开水基清洗剂和移植物及它们在一种用于清洁EYED化和非结构化的金属表面
公开(公告)号：EP2539412A4
公开(公告)日：2013-07-31
申请号：EP11746939
申请日：2011-01-19
Applicant: BASF SE
Inventor： RAMAN VIJAY IMMANUEL , GUBAYDULLIN ILSHAT , BRANDS MARIO , LI YUZHUO , PERETOLCHIN MAXIM
IPC: C09G1/02 , C08F271/02 , C09K3/14
CPC classification number: C09G1/02 , C08F283/00 , C09K3/1463 , C08F220/32
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2.发明公开PROCESS FOR REMOVING A BULK MATERIAL LAYER FROM A SUBSTRATE AND A CHEMICAL MECHANICAL POLISHING AGENT SUITABLE FOR THIS PROCESS 审中-公开除去方法基板和化学机械清洗机的材料，近地层这个过程
公开(公告)号：EP2507824A4
公开(公告)日：2013-09-25
申请号：EP10832736
申请日：2010-11-25
Applicant: BASF SE
Inventor： RAMAN VIJAY IMMANUEL , EBERT SOPHIA , BRANDS MARIO , LAN YONGQING , ZACHARIAS PHILIPP , GUBAYDULLIN ILSHAT , LI YUZHUO
IPC: H01L21/321 , C09G1/02
CPC classification number: C09G1/02 , C09K3/1463 , H01L21/3212
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