PROCESS FOR REMOVING BULK MATERIAL LAYER FROM SUBSTRATE AND CHEMICAL MECHANICAL POLISHING AGENT SUITABLE FOR THIS PROCESS
    8.
    发明公开
    PROCESS FOR REMOVING BULK MATERIAL LAYER FROM SUBSTRATE AND CHEMICAL MECHANICAL POLISHING AGENT SUITABLE FOR THIS PROCESS 审中-公开
    除去方法基板和化学机械清洗机的材料,近地层这个过程

    公开(公告)号:EP2507332A1

    公开(公告)日:2012-10-10

    申请号:EP10832737.0

    申请日:2010-11-25

    Applicant: BASF SE

    CPC classification number: H01L21/3212 C09G1/02 C09K3/1436 C09K3/1463

    Abstract: An aqueous chemical mechanical polishing (CMP) agent (A) comprising solid particles (a1) containing (a11) a corrosion inhibitor for metals, and (a12) a solid material, the said solid particles (a1) being finely dispersed in the aqueous phase; and its use in a process for removing a bulk material layer from the surface of a substrate and planarizing the exposed surface by chemical mechanical polishing until all material residuals are removed from the exposed surface, wherein the CMP agent exhibits at the end of the chemical mechanical polishing, without the addition of supplementary materials, - the same or essentially the same static etch rate (SER) as at its start and a lower material removal rate (MRR) than at its start, - a lower SER than at its start and the same or essentially the same MRR as at its start or - a lower SER and a lower MRR than at its start; such that the CMP agent exhibits a soft landing behavior.

    Abstract translation: 在wässrige化学机械抛光(CMP)剂(a)包含固体颗粒(a1)的含(A11)腐蚀抑制剂对金属,和(A12)的固体材料,所述固体粒子(A1)被精细地分散在wässrige相 ; 及其在一个过程中使用用于在化学机械的端部从基板的表面除去松散材料层,直到所有材料残差从暴露表面去除平坦化通过化学机械抛光的暴露表面,worin CMP试剂展品 抛光,不加入辅助材料,-the相同或本质上相同静态蚀刻速率(SER),其在它的开始和下材料去除速率(MRR)比在其开始,-A下SER比在其开始和 基本上相同或在其开始或-低级SER和比在其开始较低MRR相同MRR; 检查做了CMP试剂表现出软着陆的行为。

    VERFAHREN ZUR HERSTELLUNG VON ORGANISCHEN XEROGELEN

    公开(公告)号:EP2158243A1

    公开(公告)日:2010-03-03

    申请号:EP08759656.5

    申请日:2008-05-16

    Applicant: BASF SE

    Abstract: The invention relates to a method for production of organic xerogels comprising: (a) preparation of a composition containing an organic gel precursor (A) and a solvent (C), (b) reaction of the gel precursor (A) in the presence of the solvent (C) to give a gel, (c) modifying the obtained gel by means of at least one organic compound (D), which is not added in step (a) nor in step (b), (d) drying the modified gel by transforming the solvent (C) into the gaseous phase at a temperature and a pressure below the critical temperature and critical pressure of the solvent (C). The invention further relates to the organic xerogels thus obtained and the use thereof as insulation.

    Abstract translation: 本发明涉及一种制备有机干凝胶的方法,其包括:(a)制备含有有机凝胶前体(A)和溶剂(C)的组合物,(b)在有 (c)以得到凝胶,(c)借助至少一种在步骤(a)中和步骤(b)中未添加的有机化合物(D)对所获得的凝胶进行改性,(d)将 通过在低于溶剂(C)的临界温度和临界压力的温度和压力下将溶剂(C)转化成气相来改性凝胶。 本发明还涉及由此获得的有机干凝胶及其作为绝缘材料的用途。

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