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公开(公告)号：EP2241061A1
公开(公告)日：2010-10-20
申请号：EP09704663.5
申请日：2009-01-22
发明人： MCDONALD, Randall, J. , DUMAS, Oliver, J. , SULLIVAN, Robert, P. , VARONE, John, J. , CHOPY, Joseph, Jr. , JANKINS, Daniel, R.
IPC分类号： H04L12/28
CPC分类号： H04L12/403 , G05B9/02
摘要： A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
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公开(公告)号：EP2241061B1
公开(公告)日：2014-03-19
申请号：EP09704663.5
申请日：2009-01-22
发明人： MCDONALD, Randall, J. , DUMAS, Oliver, J. , SULLIVAN, Robert, P. , VARONE, John, J. , CHOPY, Joseph, Jr. , JANKINS, Daniel, R.
IPC分类号： H04L12/28 , G05B9/02 , H04L12/403
CPC分类号： H04L12/403 , G05B9/02
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公开(公告)号：EP1685598A2
公开(公告)日：2006-08-02
申请号：EP04780607.0
申请日：2004-08-10
发明人： SULLIVAN, Robert, P. , HARIS, Clint , BUFANO, Michael , FRIEDMAN, Gerald , HOFMEISTER, Christopher
IPC分类号： H01L29/00
CPC分类号： H01L21/68707 , B65G13/00 , B65G37/02 , H01L21/6773 , H01L21/67736
摘要： A semiconductor workpiece processing system compπsing at least one processing tool, a container(151 ), a first transport section (12) and a second transport section ( 14) The first transporting section having a transport vehicle (200) for moving a cassette while moving along a first track (16) The second transport section is not vehicle based and has a second track (18) The first and second tracks are disposed proximate to each other to allow a container to be moved therebetween in a single operation
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公开(公告)号：EP2310681A2
公开(公告)日：2011-04-20
申请号：EP09774335.5
申请日：2009-06-30
CPC分类号： F04B37/08 , B01D8/00 , F04B37/085
摘要： Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.
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5.发明公开AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS 审中-公开基于组合垂直KAROUSSELLS及架空提升机自动化材料处理系统的半导体制造
公开(公告)号：EP1535143A1
公开(公告)日：2005-06-01
申请号：EP03761012.8
申请日：2003-03-20
IPC分类号： G06F7/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： An automated material handling system comprising: a fixed shelf (732) configured to hold a cassette pod (710,810); and an overhead hoist transport subsystem (704,804) including an overhead transport vehicle (705,805) mounted with an overhead hoist (831), the overhead hoist (831) including a translating stage (833) capable of laterally moving and a hoist gripper (731,835) coupled to the translating stage (833) and capable of moving laterally with a lateral movement of the translating stage (833) and moving vertically by the hoist gripper (731,835) itself, the hoist gripper (731,835) being configured to grip the cassette pod(710,810), the overhead transport vehicle(705,805) being configured to move in a suspended manner along a suspended track(708,808) defining a predetermined route running adjacent to the fixed shelf(732) under a state in which the cassette pod(710,810) is being gripped by the hoist gripper (731,835), and being mounted with the overhead hoist (831) at a lower position than the suspended track(708,808).
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