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198 条记录 (耗时 0.015 秒)

    TESTING APPARATUS AND RELATIVE METHOD
    3.
    发明授权
    TESTING APPARATUS AND RELATIVE METHOD 有权

    公开(公告)号：EP2473862B1

    公开(公告)日：2018-06-20

    申请号：EP10752540.4

    申请日：2010-09-02

    申请人： Applied Materials, Inc.

    发明人： VAZZOLER, Michele

    IPC分类号： G01R31/26 ,  H01L21/00 ,  H01L21/683 ,  H01L31/18

    CPC分类号： H01L31/1876 ,  G01R31/2808 ,  G01R31/2893 ,  H01L21/67736 ,  H02S50/10 ,  Y02E10/50 ,  Y02P70/521

    摘要： Embodiments of the invention may provide a testing apparatus that is used to test solar cells or other electronic devices. The testing apparatus may comprise a substantially flat support that is configured to support a substrate or other device that is to be electrically tested and a plurality of testing probes. The support comprises a plurality of through holes, each suitable for the insertion of a corresponding testing probe, to allow each probe to make contact with a testing area formed on the substrate. The testing apparatus may comprise a suction device that is associated or associable with the support, and is able to exert a holding force on the substrate that counteracts the thrusting force exerted by the testing probes.

    CARRIER TRANSPORT SYSTEM AND TRANSPORT METHOD
    4.
    发明公开
    CARRIER TRANSPORT SYSTEM AND TRANSPORT METHOD 审中-公开
    载体运输系统和运输方法

    公开(公告)号：EP3159922A1

    公开(公告)日：2017-04-26

    申请号：EP15810222.8

    申请日：2015-04-30

    申请人： Murata Machinery, Ltd.

    发明人： TAKAI Kaname

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67733 ,  H01L21/67736 ,  H01L21/67769

    摘要： Carriers to be temporarily stored is increased in number, without providing a local vehicle with a lateral transfer mechanism. Carriers are transported between load ports of equipment by overhead travelling vehicles and local vehicles, both provided with a hoist, and the overhead travelling vehicles are provided with a lateral transfer mechanism for laterally translating the hoist. A travelling rail for the overhead travelling vehicles is provided so as to pass over a load port, and a travelling rail for the local vehicle is provided below the travelling rail for the overhead travelling vehicles and over the load port. Slidable buffers are provided and configured to slide between forward positions under the travelling rail for the local vehicle and rearward positions laterally separated from the positions under the travelling rail for the local vehicle. A space over the slidable buffers at the rearward position is open for the transfer of carriers.

    摘要翻译： 暂时储存的载体数量增加，而不提供具有横向传输机构的本地车辆。 通过设置有升降机的高架行驶车辆和本地车辆在设备的装载口之间运送载体，并且高架行驶车辆设置有用于横向平移升降机的横向传送机构。 用于高架行驶车辆的行驶轨道设置成越过装载口，并且用于本地车辆的行驶轨道设置在高架行驶车辆的行驶轨道下方和装载口上方。 滑动缓冲器被设置并构造成在本地车辆的行驶导轨下方的前方位置和本地车辆的行驶导轨下方的横向分离的后方位置之间滑动。 载体传输时，位于后部位置的可滑动缓冲区上方的空间开放。

    CARRIER BUFFERING DEVICE AND STORAGE METHOD
    5.
    发明公开
    CARRIER BUFFERING DEVICE AND STORAGE METHOD 审中-公开
    载波缓冲装置和存储方法

    公开(公告)号：EP3159921A1

    公开(公告)日：2017-04-26

    申请号：EP15809300.5

    申请日：2015-04-30

    申请人： Murata Machinery, Ltd.

    发明人： TAKAI Kaname

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67733 ,  B65G2201/0297 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67712 ,  H01L21/67724 ,  H01L21/67736 ,  H01L21/67769

    摘要： The interference between overhead travelling vehicles and a local vehicle is prevented, in a situation where an overhead travelling vehicle has trouble, and the overhead travelling vehicles and the controller cannot communicate. Carriers are temporarily stored between the overhead travelling vehicles and the load port. The local vehicle travels along a travelling rail for the local vehicle located below a travelling rail for the overhead travelling vehicles and over a load port, and plural buffers are provided. The overhead travelling vehicles and the local vehicle communicate with a controller via a terminal, and a sensor is provided at a height without interference with the local vehicle and detects an element of a hoist of the overhead travelling vehicles or a carrier raised/lowered. The local vehicle is restricted from travelling when the sensor detects an element of hoist or the carrier.

    摘要翻译： 在高架行驶车辆有故障的情况下，防止高架行驶车辆与本地车辆之间的干扰，并且高架行驶车辆和控制器不能通信。 运载车暂时存放在高架行驶车辆和装载港口之间。 本地车辆沿着用于高架行驶车辆的行驶轨道下方的本地车辆的行驶轨道和装载口上行驶，并且设置有多个缓冲器。 高架行驶车辆和本地车辆通过终端与控制器通信，并且传感器设置在不与本地车辆干涉的高度处，并且检测高架行驶车辆或升降架的升降机的元件。 当传感器检测到起重元件或承载件时，本地车辆被限制行驶。

    CARRIER BUFFERING DEVICE AND BUFFERING METHOD
    6.
    发明公开
    CARRIER BUFFERING DEVICE AND BUFFERING METHOD 审中-公开
    载波缓冲装置和缓冲方法

    公开(公告)号：EP3159920A1

    公开(公告)日：2017-04-26

    申请号：EP15809185.0

    申请日：2015-04-30

    申请人： Murata Machinery, Ltd.

    发明人： TAKAI Kaname

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67769 ,  H01L21/67706 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

    摘要： A temporary storage apparatus is provided with a slidable buffer which does not prevent installation of the temporary storage apparatus and maintenance of equipment and has increased storing capacity for carriers without a lateral transfer mechanism in a local vehicle. The temporary storage apparatus stores carriers between overhead travelling vehicles and a load port. The temporary storage apparatus is provided with the local vehicle travelling on a travelling rail below the travelling rail for the overhead travelling vehicles and a slidable buffer comprising a cell to support a carrier thereon and a guide mechanism sliding the slidable buffer between an advanced position under the travelling rail and a backward position laterally shifted from the travelling rail. The guide mechanism is configured to move between an active position laterally protruding from the travelling rail and a retracted position allowing transfer by the overhead travelling vehicles between the load port. The travelling rail extends along the front face of the equipment to a waiting position separated from a position over the load port.

    摘要翻译： 临时存储装置设置有可滑动的缓冲器，该缓冲器不妨碍临时存储装置的安装和设备的维护，并且增加了用于在本地车辆中没有横向传送机构的载体的存储容量。 临时存储装置在高架行驶车辆和装载口之间存储载体。 临时存储装置设置有在用于高架行驶车辆的行驶轨道下方的行驶轨道上行驶的本地车辆和包括用于在其上支撑载体的单元的可滑动缓冲器以及在第一位置和第二位置之间的前进位置之间滑动可滑动缓冲器的导向机构， 行驶轨道和从行驶轨道横向移位的后退位置。 引导机构构成为能够在从行驶轨道向侧方突出的作用位置与能够通过高架行驶车在搬入口之间移送的退避位置之间移动。 行驶轨道沿着设备的前表面延伸到与加载端口上的位置分离的等待位置。

    DUAL TRAY CARRIER UNIT
    7.
    发明公开
    DUAL TRAY CARRIER UNIT 有权
    双碑支持单位

    公开(公告)号：EP2522028A4

    公开(公告)日：2016-12-07

    申请号：EP11732061

    申请日：2011-01-05

    申请人： KLA-TENCOR CORP

    发明人： CHAN FOON M ,  CHEUNG KING W ,  LEUNG KA C ,  CHAN CHI Y C ,  TRUYENS CAROLUS ,  DE BLOCK ERIK J J M ,  VERMEULEN JIMMY J D

    IPC分类号： H01L21/677 ,  B65D85/86 ,  H01L21/304 ,  H01L21/50 ,  H01L21/673

    CPC分类号： H01L21/67333 ,  B65G37/005 ,  H01L21/67736

    摘要： A tray carrier system having a tray loading position, a tray off-loading position, and four parallel rails extending from the tray loading position to the tray off-loading position. A tray carrier platform is disposed on each rail, where each tray carrier platform is configured to move along the rail on which it is disposed between the tray loading position and the tray off-loading position. Each tray carrier platform includes a carriage for engaging the rail, swing arms attached to the carriage, retaining pieces attached to the swing arms for selectively retaining and releasing a tray, and means for moving the swing arms between an open position and a closed position. The retaining pieces retain the tray at a tray level when the swing arms are in the closed position, and release the tray and are disposed entirely below the tray level when the swing arms are in the open position. Two of the tray carrier platforms form a first tray carrier unit, and the other two tray carrier platforms form a second tray carrier unit. The first tray carrier unit is capable of passing underneath a tray carried by the second tray carrier unit in the closed position when the first tray carrier unit is in the open position.