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1.发明授权SYSTEMS AND METHODS FOR FABRICATING OPTICAL MICROSTRUCTURES USING A CYLINDRICAL PLATFORM AND A RASTERED RADIATION BEAM 有权系统及其制造方法光学微结构使用圆柱平台和网格化的辐射光束
公开(公告)号：EP1664859B1
公开(公告)日：2009-08-19
申请号：EP04781817.4
申请日：2004-08-20
CPC分类号： G02B3/0031 , G02B3/0012 , G02B3/0043 , G02B5/1857
摘要： Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.
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2.发明公开MICROLENS SHEETS HAVING MULTIPLE INTERSPERSED ANAMORPHIC MICROLENS ARRAYS 审中-公开微透镜具有多个分布式变形的微透镜阵列LEAVES
公开(公告)号：EP1877860A1
公开(公告)日：2008-01-16
申请号：EP06740425.1
申请日：2006-03-30
发明人： WOOD, Robert, L.
CPC分类号： G02B3/0043 , G03B21/62
摘要： Microlens sheets include a first array of anamorphic micolenses on a face of a substrate. The microlenses in the first array are defined by a first parametric model along a direction of the first array. A second array of anamorphic micolenses is also provided on the face of the substrate, and interspersed with the first array. The microlenses in the second array are defined by a second parametric model that is different from the first parametric model, along the direction of the first array.
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3.发明公开SYSTEMS AND METHODS FOR MASTERING MICROSTRUCTURES THROUGH A SUBSTRATE USING NEGATIVE PHOTORESIST AND MICROSTRUCTURE MASTERS SO PRODUCED 审中-公开微模板制备结构的系统和方法通过在基板使用负光致抗蚀剂而这样产生MIKROSTRUKTURMATRIZEN
公开(公告)号：EP1663851A2
公开(公告)日：2006-06-07
申请号：EP04781818.2
申请日：2004-08-20
IPC分类号： B81C1/00
CPC分类号： G02B3/0025 , B82Y10/00 , B82Y40/00 , G02B5/1857 , G03F7/0002 , G03F7/0005 , G03F7/0007 , G03F7/0015 , G03F7/2053 , G03F7/24
摘要： Microstructures (132) are fabricated by impinging a radiation beam (120), such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer (110) on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
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4.发明公开SYSTEMS AND METHODS FOR FABRICATING MICROSTRUCTURES BY IMAGING A RADIATION SENSITIVE LAYER SANDWICHED BETWEEN OUTER LAYERS, AND MICROSTRUCTURES FABRICATED THEREBY 有权微结构的影像学中间外层分层辐射敏感层中的生产系统和方法，因此生产的微观结构
公开(公告)号：EP1664929A2
公开(公告)日：2006-06-07
申请号：EP04809596.2
申请日：2004-08-20
CPC分类号： G03F7/0015 , G02B3/0025 , G02B3/0031 , G02B5/1852 , G02B5/1857 , G03F7/0005 , G03F7/161 , Y10S430/146
摘要： Microstructures are fabricated by imaging a microstructure master blank that includes a radiation sensitive layer (2320) sandwiched between a pair of outer layers (2310, 2330), on an imaging platform (2500), to define the microstructures in the radiation sensitive layer. At least one of the outer layers is then removed. The microstructures that were defined in the radiation sensitive layer are developed. The radiation sensitive layer sandwiched between the pair of outer layers may be fabricated as webs, to provide microstructure master blanks.
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5.发明公开SYSTEMS AND METHODS FOR FABRICATING OPTICAL MICROSTRUCTURES USING A CYLINDRICAL PLATFORM AND A RASTERED RADIATION BEAM 有权系统及其制造方法光学微结构使用圆柱平台和网格化的辐射光束
公开(公告)号：EP1664859A2
公开(公告)日：2006-06-07
申请号：EP04781817.4
申请日：2004-08-20
CPC分类号： G02B3/0031 , G02B3/0012 , G02B3/0043 , G02B5/1857
摘要： Optical microstructures (132), such as microlenses, are fabricated by rotating a cylindrical platform (100) that includes a radiation sensitive layer (110) thereon, about its axis, while simultaneously axially rastering a laser beam (120) across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.
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