公开(公告)号：EP2980665A2

公开(公告)日：2016-02-03

申请号：EP15182425.7

申请日：2006-06-05

申请人： Brooks Automation, Inc.

发明人： HOSEK, Martin ,  BEALE, Stuart ,  BOTEV, Roumen ,  COADY, Matthew ,  HOFMEISER, Christopher ,  IVES, Mark ,  CAVENEY, Robert T. ,  MOURA, Jairo

IPC分类号： G05B19/414 ,  G05B19/418

CPC分类号： G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

摘要： A control system (100) for complex non linear machines including a clustered architecture comprising:
- a master controller (105), one or more cluster controllers (110) each defining a cluster, remote controllers (115, 150) and end effectors,
- a central control section including one or more first remote controllers, said first remote controllers being autonomous remote controllers (150) under direct control of the master controller and
- a distributed control section including said cluster controller (110) controlled by the master controller (105), wherein each of said cluster controllers controls the activities of one or more second remote controllers (115) in said cluster, each of the first and second remote controllers being utilized to drive one or more axes of end effectors of complex multi axis non linear machines,
wherein the master controller includes a processor configured to generate trajectories, run control algorithms and provide torque commands for implementation by the autonomous remote controller (150);
and wherein said master controller and at least said one or more cluster controllers are connected together to a communication network (120) of said control system and defines nodes of said network.

摘要翻译： 一种用于复杂非线性机器的控制系统（100），包括：集群架构，包括：主控制器（105），每个定义集群的一个或多个集群控制器（110），远程控制器（115,150）和末端执行器， 包括一个或多个第一遥控器的中央控制部分，所述第一遥控器是主控制器的直接控制下的自主遥控器（150）; - 包括由主控制器（105）控制的所述集群控制器（110）的分布式控制部分 ），其中每个所述集群控制器控制所述集群中的一个或多个第二遥控器（115）的活动，所述第一和第二遥控器中的每一个被用于驱动复数多轴非线性的末端执行器的一个或多个轴 机器，其中所述主控制器包括被配置为产生轨迹，运行控制算法并提供用于由所述实施的转矩命令的处理器 自主遥控器（150）; 并且其中所述主控制器和至少所述一个或多个集群控制器连接在一起到所述控制系统的通信网络（120）并且定义所述网络的节点。

公开(公告)号：EP2980665A3

公开(公告)日：2016-04-20

申请号：EP15182425.7

申请日：2006-06-05

申请人： Brooks Automation, Inc.

发明人： HOSEK, Martin ,  BEALE, Stuart ,  BOTEV, Roumen ,  COADY, Matthew ,  HOFMEISER, Christopher ,  IVES, Mark ,  CAVENEY, Robert T. ,  MOURA, Jairo

IPC分类号： G05B19/414 ,  G05B19/418

CPC分类号： G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

摘要： A control system (100) for complex non linear machines including a clustered architecture comprising:
- a master controller (105), one or more cluster controllers (110) each defining a cluster, remote controllers (115, 150) and end effectors,
- a central control section including one or more first remote controllers, said first remote controllers being autonomous remote controllers (150) under direct control of the master controller and
- a distributed control section including said cluster controller (110) controlled by the master controller (105), wherein each of said cluster controllers controls the activities of one or more second remote controllers (115) in said cluster, each of the first and second remote controllers being utilized to drive one or more axes of end effectors of complex multi axis non linear machines,
wherein the master controller includes a processor configured to generate trajectories, run control algorithms and provide torque commands for implementation by the autonomous remote controller (150);
and wherein said master controller and at least said one or more cluster controllers are connected together to a communication network (120) of said control system and defines nodes of said network.

公开(公告)号：EP1904893B1

公开(公告)日：2012-11-28

申请号：EP06786953.7

申请日：2006-07-11

申请人： Brooks Automation, Inc.

发明人： HOFMEISER, Christopher ,  HOSEK, Martin ,  BEALE, Stuart

IPC分类号： H01L21/68 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/681 ,  H01L21/67259 ,  H01L21/68 ,  H01L21/68707

公开(公告)号：EP1913450A2

公开(公告)日：2008-04-23

申请号：EP06760684.8

申请日：2006-06-05

申请人： Brooks Automation, Inc.

发明人： HOSEK, Martin ,  BEALE, Stuart ,  BOTEV, Roumen ,  COADY, Matthew ,  HOFMEISER, Christopher ,  IVES, Mark ,  MOURA, Jairo ,  CAVENEY, Robert

IPC分类号： G05B19/18

CPC分类号： G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

公开(公告)号：EP1904893A2

公开(公告)日：2008-04-02

申请号：EP06786953.7

申请日：2006-07-11

申请人： Brooks Automation, Inc.

发明人： HOFMEISER, Christopher ,  HOSEK, Martin ,  BEALE, Stuart

IPC分类号： G03B27/42

CPC分类号： H01L21/681 ,  H01L21/67259 ,  H01L21/68 ,  H01L21/68707

摘要： A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.